Usoro uto kristal silicon carbide na teknụzụ akụrụngwa

1. Ụzọ teknụzụ uto kristal SiC

PVT (usoro sublimation),

HTCVD (CVD okpomọkụ dị elu),

LPE(usoro usoro mmiri mmiri)

atọ a na-ahụkarịKristal SiCusoro uto;

Usoro kachasị ama ama n'ụlọ ọrụ ahụ bụ usoro PVT, ihe karịrị 95% nke kristal otu SiC ka a na-eto site na usoro PVT;

Emepere emepe n'ụlọ ọrụ mmepụta iheKristal SiCỌkụ na-eto eto na-eji ụzọ teknụzụ PVT bụ isi nke ụlọ ọrụ ahụ.

2. Usoro uto kristal SiC

Nhazi ntụ ntụ - ọgwụgwọ kristal mkpụrụ - uto kristal - annealing-wafernhazi.

3. Usoro PVT iji tooKristal SiC

A na-etinye ihe eji emepụta SiC n'ala nke ihe eji emepụta graphite, kristal mkpụrụ SiC dịkwa n'elu ihe eji emepụta graphite. Site n'ịgbanwe ihe mkpuchi ahụ, okpomọkụ dị na ihe eji emepụta SiC dị elu karịa, okpomọkụ dị na kristal mkpụrụ ahụ dịkwa ala. Ihe eji emepụta SiC dị elu na-agbada ma na-agbaze ka ọ bụrụ ihe eji emepụta gas, nke a na-ebuga na kristal mkpụrụ ahụ na obere okpomọkụ ma na-eme ka ọ dị ka kristal SiC. Usoro uto bụ isi gụnyere usoro atọ: mmebi na sublimation nke ihe eji emepụta ihe, nnyefe oke, na kristal na kristal mkpụrụ.

Mbupụ na sublimation nke ihe eji arụ ọrụ:

SiC(S)= Si(g)+C(S)

2SiC(S)=Si(g)+SiC2(g)

2SiC(S)=C(S)+SiC2(g)

N'oge mbufe oke, Si vapor na-emeghachi omume na mgbidi graphite crucible iji mepụta SiC2 na Si2C:

Si(g)+2C(S) =SiC2(g)

2Si(g) +C(S)=Si2C(g)

N'elu kristal mkpụrụ ahụ, usoro gas atọ ahụ na-eto site na usoro abụọ ndị a iji mepụta kristal silicon carbide:

SiC2_(g)+Si2C_(g)=3SiC_(s)

Si_(g)+SiC2_(g)=2SiC_(S)

4. Usoro PVT iji zụlite ụzọ teknụzụ akụrụngwa uto SiC kristal

Ugbu a, ikpo ọkụ induction bụ ụzọ teknụzụ a na-ahụkarị maka usoro PVT SiC kristal na-eto ọkụ;

Okpomọkụ induction mpụga nke Coil na ikpo ọkụ iguzogide graphite bụ ntụziaka mmepe nkeKristal SiCọkụ ndị na-eto eto.

5. 8-inch SiC induction heat grout plantation

(1) Ịkpo ọkụihe mkpuchi graphite ihe na-ekpo ọkụsite na ntinye nke ebe ndọta; ịchịkwa ebe okpomọkụ site na ịgbanwe ike okpomọkụ, ọnọdụ eriri, na nhazi mkpuchi;

(2) Ịkpo ọkụ graphite crucible site na ikpo ọkụ na-eguzogide graphite na conduction nke radieshon okpomọkụ; ijikwa mpaghara okpomọkụ site na ịgbanwe ọkụ nke graphite heater, nhazi nke heater, na njikwa ọkụ mpaghara;