Mokhoa oa ho holisa kristale ea silicon carbide le theknoloji ea lisebelisoa

1. Tsela ea theknoloji ea kholo ea kristale ea SiC

PVT (mokhoa oa sublimation),

HTCVD (CVD ea mocheso o phahameng),

LPE(mokhoa oa mohato oa metsi)

ke tse tharo tse tšoanangKristale ea SiCmekhoa ea kholo;

Mokhoa o tsebahalang haholo indastering ke mokhoa oa PVT, 'me likristale tse le' ngoe tsa SiC tse fetang 95% li lengoa ka mokhoa oa PVT;

LiindasteriKristale ea SiCsebōpi sa kholo se sebelisa mokhoa o tloaelehileng oa theknoloji ea PVT indastering.

2. Ts'ebetso ea kholo ea kristale ea SiC

Tlhahiso ea phofo-phekolo ea kristale ea peo-khristaro ea kholo-ingot annealing-sejana sa bohobeho sebetsana.

3. Mokhoa oa PVT oa ho holisaLikristale tsa SiC

Thepa e tala ea SiC e beoa tlase ho graphite crucible, 'me kristale ea peo ea SiC e holimo ho graphite crucible. Ka ho lokisa insulation, mocheso ho thepa e tala ea SiC o phahame 'me mocheso ho kristale ea peo o tlase. Thepa e tala ea SiC mochesong o phahameng e ea inela 'me ea bola hore e be lintho tsa khase, tse isoang ho kristale ea peo ka mocheso o tlase 'me li kristale ho etsa likristale tsa SiC. Ts'ebetso ea mantlha ea kholo e kenyelletsa lits'ebetso tse tharo: ho bola le ho qhaqha ha thepa e tala, ho fetisetsa boima, le ho kristaleha ho likristale tsa peo.

Ho bola le ho senngoa ha thepa e tala:

SiC(S)= Si(g)+C(S)

2SiC(S)= Si(g)+ SiC2(g)

2SiC(S)=C(S)+SiC2(g)

Nakong ea phetiso ea boima, mouoane oa Si o arabela le lebota le ka sebelisoang ho etsa SiC2 le Si2C:

Si(g)+2C(S) =SiC2(g)

2Si(g) +C(S)=Si2C(g)

Holim'a kristale ea peo, mekhahlelo e meraro ea khase e hola ka mekhoa e 'meli e latelang ho hlahisa likristale tsa silicon carbide:

SiC2_(g)+Si2C_(g)=3SiC_(s)

Si_(g)+SiC2_(g)=2SiC_(S)

4. Mokhoa oa PVT oa ho holisa mokhoa oa theknoloji oa lisebelisoa tsa kholo ea kristale ea SiC

Hona jwale, ho futhumatsa ka induction ke tsela e tlwaelehileng ya theknoloji bakeng sa dionto tsa kgolo ya kristale ya SiC ya mokgwa wa PVT;

Ho futhumatsa ha induction ea kantle ea coil le ho futhumatsa ha graphite ke tataiso ea nts'etsopele eaKristale ea SiClibotlolo tsa kholo.

5. Sebōpi sa kholo ea ho futhumatsa sa SiC sa lisenthimithara tse 8

(1) Ho futhumatsasebopi sa graphite karolo ea ho futhumatsaka ho kenya matla a makenete; ho laola matla a mocheso ka ho fetola matla a ho futhumatsa, boemo ba koili, le sebopeho sa ho futhumatsa;

(2) Ho futhumatsa graphite crucible ka ho futhumatsa kgahlanong le graphite le ho tsamaisa mahlaseli a mocheso; ho laola sebaka sa mocheso ka ho fetola motlakase wa graphite heater, sebopeho sa heater, le taolo ya motlakase wa sebaka;