Te tukanga tipu tioata silicon carbide me te hangarau taputapu

1. Ara hangarau tipu tioata SiC

PVT (tikanga whakapūmau),

HTCVD (CVD pāmahana teitei),

LPE(tikanga āhua wai)

e toru ngā mea noaTioata SiCngā tikanga whakatipu;

Ko te tikanga PVT te tikanga tino mōhiotia i roto i te umanga, ā, neke atu i te 95% o ngā tioata takitahi SiC ka whakatipuria mā te tikanga PVT;

AhumahiTioata SiCE whakamahi ana te oumu whakatipu i te ara hangarau PVT matua o te umanga.

2. Te tukanga tipu tioata SiC

Te hanga paura-te maimoatanga karaihe purapura-te tipu karaihe-te whakamahana i te konganuku-papate tukatuka.

3. Tikanga whakatipu PVTNgā tioata SiC

Ka whakatakotoria te rauemi mata SiC ki raro o te ipu karāpiti, ā, kei runga ake o te ipu karāpiti te tioata purapura SiC. Mā te whakarerekē i te whakamarumaru, ka teitei ake te pāmahana i te rauemi mata SiC, ā, ka iti iho te pāmahana i te tioata purapura. Ka whakangawaritia, ka pirautia hoki te rauemi mata SiC i te pāmahana teitei hei matū āhua hau, ka haria ki te tioata purapura me te pāmahana iti iho, ka whakangawaritia hei hanga tioata SiC. Kei roto i te tukanga tipu taketake e toru ngā tukanga: te whakangawari me te whakangawari i ngā rauemi mata, te whakawhiti papatipu, me te whakangawari i runga i ngā tioata purapura.

Te pirau me te whakapūmau i ngā rauemi mata:

SiC(S)= Si(g)+C(S)

2SiC(S)= Si(g)+ SiC2(g)

2SiC(S)=C(S)+SiC2(g)

I te wā e whakawhiti papatipu ana, ka tauhohe anō te mamaoa Si ki te pakitara o te ipu karāpeti hei hanga i te SiC2 me te Si2C:

Si(g)+2C(S) = SiC2(g)

2Si(g) +C(S)=Si2C(g)

I runga i te mata o te tioata purapura, ka tipu ngā āhua hau e toru mā roto i ngā tauira e rua e whai ake nei hei whakaputa tioata silicon carbide:

SiC2_(g)+Si2C_(g)=3SiC_(ngā)

Si_(g)+SiC2_(g)=2SiC_(T)

4. Tikanga PVT hei whakatipu i te ara hangarau taputapu whakatipu karaihe SiC

I tēnei wā, ko te whakamahana arataki he huarahi hangarau noa mō ngā oumu tipu karaihe SiC tikanga PVT;

Ko te whakamahana ātete o waho o te koiri me te whakamahana ātete ki te karāhe te ahunga whanaketanga oTioata SiCngā oumu whakatipu.

5. 8-inihi te oumu whakatipu whakamahana SiC

(1) Te whakamahana i teoko paraihe wāhanga whakamahanamā te whakapūtanga o te papa aukume; te whakahaere i te papa pāmahana mā te whakarerekē i te mana whakamahana, te tūnga koiri, me te hanganga whakamarumaru;

(2) Te whakamahana i te ipu karāpeti mā te whakamahana ātete karāpeti me te kawe irahiko wera; te whakahaere i te āpure pāmahana mā te whakarerekē i te ia o te whakamahana karāpeti, te hanganga o te whakamahana, me te whakahaere iahiko rohe;