Cov teeb meem kev siv tshuab rau silicon carbide yog dab tsi?

Cov khoom siv semiconductor thawj tiam yog sawv cev los ntawm cov silicon ib txwm muaj (Si) thiab germanium (Ge), uas yog lub hauv paus rau kev tsim cov khoom siv hluav taws xob sib xyaw. Lawv siv dav hauv cov transistors thiab cov khoom siv hluav taws xob tsawg, zaus tsawg, thiab lub zog tsawg. Ntau tshaj 90% ntawm cov khoom semiconductor yog Ua los ntawm cov khoom siv silicon;
Cov ntaub ntawv semiconductor tiam thib ob yog sawv cev los ntawm gallium arsenide (GaAs), indium phosphide (InP) thiab gallium phosphide (GaP). Piv nrog cov khoom siv silicon, lawv muaj cov khoom siv optoelectronic siab thiab ceev ceev thiab siv dav hauv cov teb ntawm optoelectronics thiab microelectronics.
Cov khoom siv semiconductor tiam thib peb yog sawv cev los ntawm cov khoom siv tshiab xws li silicon carbide (SiC), gallium nitride (GaN), zinc oxide (ZnO), pob zeb diamond (C), thiab txhuas nitride (AlN).

Silicon carbideyog ib qho khoom siv tseem ceeb rau kev txhim kho kev lag luam semiconductor tiam thib peb. Cov khoom siv fais fab silicon carbide tuaj yeem ua tau raws li qhov ua tau zoo, me me thiab lub teeb yuag ntawm cov tshuab hluav taws xob fais fab nrog lawv qhov kev tiv thaiv hluav taws xob siab zoo heev, tiv taus kub siab, poob qis thiab lwm yam khoom.

Vim nws cov khoom zoo tshaj plaws: qhov sib txawv ntawm cov kab sib txawv (sib raug rau lub zog hluav taws xob tawg thiab lub zog ceev), kev ua hluav taws xob siab, thiab kev ua kom sov siab, nws yuav dhau los ua cov khoom siv yooj yim tshaj plaws rau kev ua cov chips semiconductor yav tom ntej. Tshwj xeeb tshaj yog nyob rau hauv cov teb ntawm cov tsheb fais fab tshiab, photovoltaic fais fab tiam, kev thauj mus los ntawm tsheb ciav hlau, smart grids thiab lwm yam teb, nws muaj qhov zoo pom tseeb.

Cov txheej txheem tsim SiC muab faib ua peb kauj ruam tseem ceeb: SiC ib leeg siv lead ua kev loj hlob, epitaxial txheej kev loj hlob thiab kev tsim khoom siv, uas sib raug rau plaub qhov txuas tseem ceeb ntawm cov saw hlau kev lag luam:cov khoom siv hauv av, epitaxation, cov khoom siv thiab cov modules.

Txoj kev tseem ceeb ntawm kev tsim cov khoom siv ua ntej siv txoj kev sublimation lub cev vapor kom sublimate cov hmoov hauv qhov chaw kub siab, thiab loj hlob silicon carbide crystals rau ntawm qhov chaw ntawm cov noob crystal los ntawm kev tswj hwm ntawm qhov kub thiab txias. Siv silicon carbide wafer ua lub substrate, cov tshuaj vapor deposition siv los tso ib txheej ntawm cov siv lead ua ke rau ntawm wafer los tsim ib qho epitaxial wafer. Ntawm lawv, kev loj hlob ntawm silicon carbide epitaxial txheej ntawm cov silicon carbide substrate conductive tuaj yeem ua rau cov khoom siv fais fab, uas feem ntau yog siv hauv tsheb fais fab, photovoltaics thiab lwm yam teb; kev loj hlob ntawm gallium nitride epitaxial txheej ntawm ib nrab-insulatingsilicon carbide substratetuaj yeem ua ntxiv rau hauv cov khoom siv hluav taws xob, siv rau hauv kev sib txuas lus 5G thiab lwm yam teb.

Tam sim no, cov khoom siv silicon carbide muaj cov teeb meem kev siv tshuab siab tshaj plaws hauv cov saw hlau kev lag luam silicon carbide, thiab cov khoom siv silicon carbide yog qhov nyuaj tshaj plaws los tsim.

Qhov teeb meem ntawm kev tsim khoom ntawm SiC tseem tsis tau daws tiav, thiab qhov zoo ntawm cov khoom siv siv lead ua tsis ruaj khov thiab muaj teeb meem txog kev tsim khoom, uas ua rau tus nqi siab ntawm cov khoom siv SiC. Nws tsuas yog siv sijhawm nruab nrab ntawm 3 hnub rau cov khoom siv silicon kom loj hlob mus rau hauv cov pas nrig siv lead ua, tab sis nws siv sijhawm ib lub lim tiam rau cov pas nrig siv lead ua silicon carbide. Ib qho pas nrig siv lead ua silicon dav dav tuaj yeem loj hlob 200cm ntev, tab sis cov pas nrig siv lead ua silicon carbide tsuas yog loj hlob 2cm ntev. Ntxiv mus, SiC nws tus kheej yog cov khoom siv tawv thiab brittle, thiab wafers ua los ntawm nws yooj yim rau ntug chipping thaum siv cov tshuab txiav wafer dicing, uas cuam tshuam rau cov khoom tsim tawm thiab kev ntseeg tau. SiC substrates txawv ntawm cov silicon ingots ib txwm muaj, thiab txhua yam los ntawm cov khoom siv, cov txheej txheem, kev ua tiav mus rau kev txiav yuav tsum tau tsim los tswj silicon carbide.

Cov saw hlau kev lag luam silicon carbide feem ntau muab faib ua plaub qhov txuas tseem ceeb: substrate, epitaxy, cov khoom siv thiab daim ntawv thov. Cov ntaub ntawv substrate yog lub hauv paus ntawm cov saw hlau kev lag luam, cov ntaub ntawv epitaxial yog qhov tseem ceeb rau kev tsim khoom siv, cov khoom siv yog lub hauv paus ntawm cov saw hlau kev lag luam, thiab cov ntawv thov yog lub zog tsav tsheb rau kev txhim kho kev lag luam. Kev lag luam upstream siv cov khoom siv raw los ua cov ntaub ntawv substrate los ntawm cov txheej txheem vapor sublimation lub cev thiab lwm txoj hauv kev, thiab tom qab ntawd siv cov txheej txheem tso pa tshuaj lom neeg thiab lwm txoj hauv kev los cog cov ntaub ntawv epitaxial. Kev lag luam midstream siv cov ntaub ntawv upstream los ua cov khoom siv xov tooj cua zaus, cov khoom siv fais fab thiab lwm yam khoom siv, uas thaum kawg siv rau hauv kev sib txuas lus 5G downstream. , tsheb fais fab, kev thauj mus los ntawm tsheb ciav hlau, thiab lwm yam. Ntawm lawv, substrate thiab epitaxy suav txog 60% ntawm tus nqi ntawm cov saw hlau kev lag luam thiab yog tus nqi tseem ceeb ntawm cov saw hlau kev lag luam.

SiC substrate: SiC crystals feem ntau yog tsim los ntawm kev siv txoj kev Lely. Cov khoom lag luam thoob ntiaj teb tab tom hloov pauv ntawm 4 nti mus rau 6 nti, thiab cov khoom siv conductive 8-nti tau tsim. Cov substrates hauv tsev feem ntau yog 4 nti. Txij li thaum cov kab tsim khoom silicon wafer 6-nti uas twb muaj lawm tuaj yeem hloov kho thiab hloov pauv los tsim cov khoom siv SiC, qhov feem pua ​​​​​​ntawm kev lag luam ntawm 6-nti SiC substrates yuav raug khaws cia ntev.

Cov txheej txheem silicon carbide substrate yog qhov nyuaj thiab nyuaj rau tsim. Silicon carbide substrate yog cov khoom siv semiconductor ib leeg siv lead ua ke uas muaj ob lub ntsiab lus: carbon thiab silicon. Tam sim no, kev lag luam feem ntau siv cov hmoov carbon siab thiab cov hmoov silicon siab ua cov khoom siv raw los ua cov hmoov silicon carbide. Hauv qab qhov kub tshwj xeeb, txoj kev xa pa tawm lub cev (PVT txoj kev) yog siv los cog silicon carbide ntawm ntau qhov ntau thiab tsawg hauv lub cub tawg siv lead ua ke. Thaum kawg, cov khoom siv lead ua ke raug ua tiav, txiav, sib tsoo, txhuam, ntxuav thiab lwm yam txheej txheem ntau yam los tsim cov silicon carbide substrate.