Mbadwo woyamba wa zipangizo za semiconductor umaimiridwa ndi silicon (Si) yachikhalidwe ndi germanium (Ge), zomwe ndi maziko opangira ma circuit integrated. Amagwiritsidwa ntchito kwambiri mu transistors ndi zozindikira zamagetsi otsika, otsika, komanso otsika. Zoposa 90% za zinthu za semiconductor zimapangidwa ndi zipangizo zochokera ku silicon;
Zipangizo za semiconductor za m'badwo wachiwiri zimayimiridwa ndi gallium arsenide (GaAs), indium phosphide (InP) ndi gallium phosphide (GaP). Poyerekeza ndi zipangizo zopangidwa ndi silicon, zili ndi mphamvu ya optoelectronic yothamanga kwambiri komanso yothamanga kwambiri ndipo zimagwiritsidwa ntchito kwambiri m'magawo a optoelectronics ndi microelectronics.
Mbadwo wachitatu wa zipangizo za semiconductor umaimiridwa ndi zipangizo zatsopano monga silicon carbide (SiC), gallium nitride (GaN), zinc oxide (ZnO), diamondi (C), ndi aluminium nitride (AlN).
Silikoni kabidendi chinthu chofunikira kwambiri pakukula kwa makampani opanga ma semiconductor a m'badwo wachitatu. Zipangizo zamagetsi za silicon carbide zimatha kukwaniritsa bwino ntchito yabwino, kuchepetsa mphamvu, komanso kupepuka kwa makina amagetsi amphamvu chifukwa cha kukana kwawo kwamphamvu kwambiri, kukana kutentha kwambiri, kutayika kochepa ndi zina.
Chifukwa cha makhalidwe ake abwino kwambiri: kusiyana kwa band (kofanana ndi mphamvu yamagetsi yotsika kwambiri komanso kuchuluka kwa mphamvu), mphamvu yamagetsi yokwera kwambiri, komanso mphamvu yamagetsi yokwera kwambiri, ikuyembekezeka kukhala chinthu chofunikira kwambiri popanga ma semiconductor chips mtsogolo. Makamaka m'magawo a magalimoto atsopano amphamvu, kupanga mphamvu ya photovoltaic, transit ya sitima, ma grid anzeru ndi magawo ena, ili ndi zabwino zodziwikiratu.
Njira yopangira SiC imagawidwa m'magawo atatu akuluakulu: Kukula kwa kristalo imodzi ya SiC, kukula kwa epitaxial layer ndi kupanga zida, zomwe zimagwirizana ndi maulalo anayi akuluakulu a unyolo wamafakitale:gawo lapansi, epitaxy, zipangizo ndi ma module.
Njira yodziwika bwino yopangira zinthu zoyambira imagwiritsa ntchito njira yogwiritsira ntchito nthunzi kuti ipange ufawo pamalo otentha kwambiri, ndikukulitsa makristalo a silicon carbide pamwamba pa kristalo ya mbewu kudzera mu mphamvu ya malo otentha. Pogwiritsa ntchito wafer wa silicon carbide ngati substrate, mankhwala oika nthunzi amagwiritsidwa ntchito kuyika wosanjikiza wa kristalo imodzi pa wafer kuti apange wafer wa epitaxial. Pakati pawo, kukulitsa wosanjikiza wa silicon carbide epitaxial pa substrate ya silicon carbide yoyendetsa magetsi kungapangidwe kukhala zida zamagetsi, zomwe zimagwiritsidwa ntchito kwambiri m'magalimoto amagetsi, ma photovoltaics ndi madera ena; kukulitsa wosanjikiza wa gallium nitride epitaxial pa semi-insulating.silicon carbide substrateikhoza kupangidwanso kukhala zida zama wailesi, zomwe zimagwiritsidwa ntchito polumikizirana ndi 5G ndi madera ena.
Pakadali pano, ma substrate a silicon carbide ali ndi zopinga zaukadaulo zapamwamba kwambiri mu unyolo wamakampani a silicon carbide, ndipo ma substrate a silicon carbide ndi ovuta kwambiri kupanga.
Vuto la kupanga SiC silinathetsedwe kwathunthu, ndipo ubwino wa zitsulo zopangira kristalo ndi wosakhazikika ndipo pali vuto la zokolola, zomwe zimapangitsa kuti zipangizo za SiC zikhale zokwera mtengo. Zimatenga masiku atatu okha kuti zinthu za silicon zikule kukhala ndodo ya kristalo, koma zimatenga sabata imodzi kuti ndodo ya silicon carbide crystal ikule. Ndodo ya silicon crystal imatha kukula 200cm, koma ndodo ya silicon carbide crystal imatha kukula 2cm yokha. Kuphatikiza apo, SiC yokha ndi chinthu cholimba komanso chophwanyika, ndipo ma wafer opangidwa ndi iyo amatha kusweka pogwiritsa ntchito makina odulira ma wafer, zomwe zimakhudza kukolola ndi kudalirika kwa zinthu. Ma substrates a SiC ndi osiyana kwambiri ndi ma ingot a silicon achikhalidwe, ndipo chilichonse kuyambira zida, njira, kukonza mpaka kudula chiyenera kupangidwa kuti chigwire silicon carbide.
Unyolo wa makampani a silicon carbide umagawidwa m'magulu anayi akuluakulu: substrate, epitaxy, zipangizo ndi ntchito. Zipangizo za substrate ndiye maziko a unyolo wa makampani, zipangizo za epitaxial ndiye kiyi yopanga zipangizo, zipangizo ndiye maziko a unyolo wa makampani, ndipo ntchito ndiye mphamvu yoyendetsera chitukuko cha mafakitale. Makampani akumtunda amagwiritsa ntchito zipangizo zopangira zinthu za substrate kudzera mu njira zoyeretsera nthunzi ndi njira zina, kenako amagwiritsa ntchito njira zoyika nthunzi ndi njira zina zokulira zinthu za epitaxial. Makampani akumtunda amagwiritsa ntchito zipangizo zakumtunda kupanga zida zama wailesi, zida zamagetsi ndi zida zina, zomwe pamapeto pake zimagwiritsidwa ntchito polumikizirana ndi 5G, magalimoto amagetsi, mayendedwe a sitima, ndi zina zotero. Pakati pawo, substrate ndi epitaxy zimakhala 60% ya mtengo wa unyolo wa makampani ndipo ndizofunika kwambiri pa unyolo wa makampani.
Chitsulo cha SiC: Makristalo a SiC nthawi zambiri amapangidwa pogwiritsa ntchito njira ya Lely. Zinthu zazikulu padziko lonse lapansi zikusintha kuchoka pa mainchesi 4 mpaka mainchesi 6, ndipo zinthu zopangira zinthu zopangira zinthu za mainchesi 8 zapangidwa. Zinthu zopangira zinthu zapakhomo zimakhala mainchesi 4 makamaka. Popeza mizere yopanga zinthu za silicon wafer ya mainchesi 6 yomwe ilipo ikhoza kusinthidwa ndikusinthidwa kuti ipange zida za SiC, gawo lalikulu la msika wa zinthu zopangira zinthu za SiC za mainchesi 6 lidzasungidwa kwa nthawi yayitali.
Njira yopangira silicon carbide substrate ndi yovuta komanso yovuta kupanga. Silicon carbide substrate ndi chinthu cha kristalo chimodzi chopangidwa ndi zinthu ziwiri: kaboni ndi silicon. Pakadali pano, makampaniwa amagwiritsa ntchito ufa wa kaboni woyeretsedwa kwambiri komanso ufa wa silicon woyeretsedwa kwambiri ngati zopangira zopangira ufa wa silicon carbide. Pansi pa gawo lapadera la kutentha, njira yotumizira nthunzi ya thupi yokhwima (PVT method) imagwiritsidwa ntchito kukulitsa silicon carbide yamitundu yosiyanasiyana mu uvuni wokulira wa kristalo. Ingot ya kristalo pamapeto pake imakonzedwa, kudulidwa, kuponderezedwa, kupukutidwa, kutsukidwa ndi njira zina zambiri kuti apange silicon carbide substrate.
Nthawi yotumizira: Meyi-22-2024