Moloko oa pele oa thepa ea semiconductor o emeloa ke silicon ea setso (Si) le germanium (Ge), e leng motheo oa tlhahiso ea potoloho e kopaneng. Li sebelisoa haholo ho li-transistors le li-detector tse nang le motlakase o tlase, maqhubu a tlase, le matla a tlase. Ho feta 90% ea lihlahisoa tsa semiconductor li entsoe ka thepa e thehiloeng ho silicon;
Lisebelisoa tsa semiconductor tsa moloko oa bobeli li emeloa ke gallium arsenide (GaAs), indium phosphide (InP) le gallium phosphide (GaP). Ha li bapisoa le lisebelisoa tse thehiloeng ho silicon, li na le thepa ea optoelectronic e sebetsang khafetsa le e potlakileng haholo 'me li sebelisoa haholo masimong a optoelectronics le microelectronics.
Moloko oa boraro oa thepa ea semiconductor o emeloa ke thepa e hlahang e kang silicon carbide (SiC), gallium nitride (GaN), zinc oxide (ZnO), daemane (C), le aluminium nitride (AlN).
Carbide ea siliconke thepa ea bohlokoa ea motheo bakeng sa nts'etsopele ea indasteri ea semiconductor ea moloko oa boraro. Lisebelisoa tsa motlakase tsa silicon carbide li ka fihlela litlhoko tse phahameng tsa bokhoni, miniaturization le tse bobebe tsa litsamaiso tsa motlakase tsa motlakase ka khanyetso ea tsona e ntle ea motlakase o phahameng, khanyetso ea mocheso o phahameng, tahlehelo e tlase le thepa e meng.
Ka lebaka la thepa ea eona e phahameng ea 'mele: lekhalo le phahameng la lebanta (le tsamaellanang le tšimo ea motlakase e senyehileng haholo le bongata bo phahameng ba matla), ho khanna motlakase ho phahameng, le ho khanna mocheso ho phahameng, ho lebelletsoe hore e tla ba thepa ea motheo e sebelisoang haholo bakeng sa ho etsa li-chip tsa semiconductor nakong e tlang. Haholo-holo masimong a likoloi tse ncha tsa matla, tlhahiso ea motlakase oa photovoltaic, lipalangoang tsa terene, li-grid tse bohlale le masimo a mang, e na le melemo e totobetseng.
Ts'ebetso ea tlhahiso ea SiC e arotsoe ka mehato e meraro e meholo: Kholo ea kristale e le 'ngoe ea SiC, kholo ea lera la epitaxial le tlhahiso ea lisebelisoa, tse tsamaellanang le lihokelo tse 'ne tse kholo tsa ketane ea indasteri:substrate, epitaxy, disebediswa le dimmojule.
Mokhoa o ka sehloohong oa ho etsa li-substrate o qala ka ho sebelisa mokhoa oa ho etsa sublimation ea mouoane oa 'mele ho etsa sublimation ea phofo tikolohong ea vacuum e nang le mocheso o phahameng, le ho holisa likristale tsa silicon carbide holim'a kristale ea peo ka taolo ea tšimo ea mocheso. Ha ho sebelisoa wafer ea silicon carbide e le substrate, ho kenngoa ha mouoane oa lik'hemik'hale ho sebelisoa ho beha lera la kristale e le 'ngoe holim'a wafer ho etsa wafer ea epitaxial. Har'a tsona, ho holisa lera la silicon carbide epitaxial holim'a substrate ea silicon carbide e tsamaisang motlakase ho ka etsoa lisebelisoa tsa motlakase, tse sebelisoang haholo likoloing tsa motlakase, li-photovoltaics le masimo a mang; ho holisa lera la gallium nitride epitaxial holim'a semi-insulating.substrate ea silicon carbidee ka boela ea etsoa lisebelisoa tsa maqhubu a seea-le-moea, tse sebelisoang puisanong ea 5G le mafapheng a mang.
Hajoale, di-substrate tsa silicon carbide di na le dithibelo tse phahameng ka ho fetisisa tsa botekgeniki ketaneng ya indasteri ya silicon carbide, mme di-substrate tsa silicon carbide ke tsona tse thata ka ho fetisisa ho di hlahisa.
Bothata ba tlhahiso ea SiC ha bo so rarolloe ka botlalo, 'me boleng ba litšiea tsa kristale ea thepa e tala ha bo tsitsa' me ho na le bothata ba chai, e leng se lebisang litšenyehelong tse phahameng tsa lisebelisoa tsa SiC. Ho nka matsatsi a 3 feela hore thepa ea silicon e hōle ho ba molamu oa kristale, empa ho nka beke bakeng sa molamu oa kristale oa silicon carbide. Molamu oa kristale oa silicon o akaretsang o ka hola bolelele ba 200cm, empa molamu oa kristale oa silicon carbide o ka hola bolelele ba 2cm feela. Ho feta moo, SiC ka boeona ke thepa e thata le e robehang habonolo, 'me li-wafer tse entsoeng ka eona li sekametse ho qhetsoha ha ho sebelisoa mokhoa oa setso oa ho seha oa wafer, o amang chai le ts'epo ea sehlahisoa. Li-substrate tsa SiC li fapane haholo le li-ingot tsa silicon tsa setso, 'me ntho e' ngoe le e 'ngoe ho tloha lisebelisoa, lits'ebetso, ts'ebetso ho isa ho sehiloeng e hloka ho ntlafatsoa ho sebetsana le carbide ea silicon.
Ketane ea indasteri ea silicon carbide e arotsoe haholo-holo ka lihokelo tse 'ne tse kholo: substrate, epitaxy, lisebelisoa le lits'ebetso. Lisebelisoa tsa substrate ke motheo oa ketane ea indasteri, lisebelisoa tsa epitaxial ke senotlolo sa tlhahiso ea lisebelisoa, lisebelisoa ke motheo oa ketane ea indasteri, 'me lits'ebetso ke matla a susumetsang nts'etsopele ea indasteri. Indasteri e holimo e sebelisa lisebelisoa tse tala ho etsa lisebelisoa tsa substrate ka mekhoa ea sublimation ea mouoane oa 'mele le mekhoa e meng, ebe e sebelisa mekhoa ea ho beha mouoane oa lik'hemik'hale le mekhoa e meng ho holisa lisebelisoa tsa epitaxial. Indasteri e bohareng e sebelisa lisebelisoa tse holimo ho etsa lisebelisoa tsa maqhubu a seea-le-moea, lisebelisoa tsa motlakase le lisebelisoa tse ling, tse qetellang li sebelisoa puisanong ea 5G e tlase. , likoloi tsa motlakase, lipalangoang tsa terene, jj. Har'a tsona, substrate le epitaxy li etsa 60% ea litšenyehelo tsa ketane ea indasteri 'me ke boleng bo ka sehloohong ba ketane ea indasteri.
Substrate ea SiC: Likristale tsa SiC hangata li etsoa ho sebelisoa mokhoa oa Lely. Lihlahisoa tse kholo tsa machabeng li fetoha ho tloha lisenthimithara tse 4 ho ea ho lisenthimithara tse 6, 'me lihlahisoa tsa substrate tse tsamaisang motlakase tsa lisenthimithara tse 8 li se li ntlafalitsoe. Substrate tsa malapeng li boholo ba lisenthimithara tse 4. Kaha mela ea tlhahiso ea silicon wafer ea lisenthimithara tse 6 e teng e ka ntlafatsoa le ho fetoloa ho hlahisa lisebelisoa tsa SiC, karolo e phahameng ea 'maraka ea substrate ea lisenthimithara tse 6 e tla bolokoa nako e telele.
Ts'ebetso ea substrate ea silicon carbide e rarahane ebile e thata ho e hlahisa. Substrate ea silicon carbide ke thepa ea kristale e le 'ngoe ea semiconductor e entsoeng ka likarolo tse peli: carbon le silicon. Hona joale, indasteri e sebelisa haholo-holo phofo ea carbon e hloekileng haholo le phofo ea silicon e hloekileng haholo e le lisebelisoa tse tala ho kopanya phofo ea silicon carbide. Tlas'a tšimo e khethehileng ea mocheso, mokhoa oa phetisetso ea mouoane oa 'mele o hōlileng (mokhoa oa PVT) o sebelisoa ho holisa carbide ea silicon ea boholo bo fapaneng ka sebōping sa kholo ea kristale. Ingot ea kristale qetellong e sebetsoa, ea sehoa, ea siloa, ea bentšitsoe, ea hloekisoa le lits'ebetso tse ling tse ngata ho hlahisa substrate ea silicon carbide.
Nako ea poso: Mots'eanong-22-2024