Ko te whakatipuranga tuatahi o ngā rauemi haurua-waenga e tohuhia ana e te silicon tuku iho (Si) me te germanium (Ge), koinei te pūtake mō te hanga ara iahiko whakauru. He whānuitia te whakamahinga o ēnei i roto i ngā transistors me ngā pūoko iti-ngaohiko, iti-auau, me te iti-mana. Neke atu i te 90% o ngā hua haurua-waenga he mea hanga ki ngā rauemi e ahu mai ana i te silicon;
Ko ngā rauemi haurua-whakatipuranga tuarua e tohuhia ana e te gallium arsenide (GaAs), te indium phosphide (InP) me te gallium phosphide (GaP). Ki te whakatauritea ki ngā taputapu e ahu mai ana i te silicon, he āhuatanga optoelectronic auau teitei me te tere teitei, ā, e whakamahia whānuitia ana i roto i ngā mara o te optoelectronics me te microelectronics.
Ko te tuatoru o ngā whakatipuranga o ngā rauemi haurua-ā-ira e tohuhia ana e ngā rauemi hou pēnei i te silicon carbide (SiC), te gallium nitride (GaN), te zinc oxide (ZnO), te taimana (C), me te konumohe nitride (AlN).
Karāhe siliconHe rauemi taketake nui tēnei mō te whanaketanga o te umanga haurua-whakatipuranga tuatoru. Ka taea e ngā taputapu hiko silicon carbide te whakatutuki i ngā whakaritenga tino pai, te whakaitiiti me te mama o ngā pūnaha hiko mana me ō rātou ātete ngaohiko teitei, te ātete pāmahana teitei, te iti o te ngaronga me ētahi atu āhuatanga.
Nā ōna āhuatanga ā-tinana pai rawa atu: he āputa roopu teitei (e rite ana ki te papa hiko pakaru nui me te kiato mana teitei), he kawe hiko teitei, me te kawe wera teitei, e whakaarohia ana ka waiho hei rauemi taketake e whakamahia whānuitia ana mō te hanga maramara haurua-ira ā muri ake nei. Ina koa i roto i ngā mara o ngā waka hiko hou, te whakaputa hiko photovoltaic, te kawe tereina, ngā whatunga atamai me ētahi atu mara, he mārama ngā painga.
E toru ngā taahiraa matua o te tukanga whakaputa SiC: te tipu tioata kotahi SiC, te tipu paparanga epitaxial me te hanga taputapu, e rite ana ki ngā hononga matua e whā o te mekameka ahumahi:papa, epitaxy, ngā taputapu me ngā kōwae.
Ko te tikanga matua o te hanga paparanga matua ko te whakamahi tuatahi i te tikanga whakangawari kohu ā-tinana hei whakangawari i te paura i roto i te taiao korehau pāmahana teitei, ā, ka whakatipu i ngā tioata karawiti silicon ki runga i te mata o te tioata purapura mā te whakahaere i te mara pāmahana. Mā te whakamahi i te paparanga karawiti silicon hei paparanga, ka whakamahia te whakatakotoranga kohu matū hei whakatakoto i tētahi paparanga tioata kotahi ki runga i te paparanga hei hanga i tētahi paparanga epitaxial. I roto i ēnei, ka taea te hanga i tētahi paparanga epitaxial karawiti silicon ki runga i tētahi paparanga karawiti silicon kawe hei taputapu hiko, e whakamahia ana i roto i ngā waka hiko, ngā photovoltaics me ētahi atu mara; ka whakatipu i tētahi paparanga epitaxial gallium nitride ki runga i tētahi haurua-whakamātao.papa whakarewa silicon carbideka taea hoki te hanga hei taputapu auau reo irirangi, e whakamahia ana i roto i ngā whakawhitiwhiti kōrero 5G me ētahi atu mara.
I tēnei wā, ko ngā paparanga warowaihā silicon te mea tino arai hangarau i roto i te mekameka ahumahi warowaihā silicon, ā, ko ngā paparanga warowaihā silicon te mea tino uaua ki te whakaputa.
Kāore anō kia tino whakatauhia te arai whakaputa o te SiC, ā, he koretake te kounga o ngā pou tioata o te rauemi mata, ā, he raruraru hua, e hua ake ai te utu nui o ngā taputapu SiC. E toru noa ngā rā e hiahiatia ana mō te tipu o te rauemi silicon hei tokotoko tioata, engari kotahi wiki te roa mō te tokotoko tioata silicon carbide. Ka taea e te tokotoko tioata silicon whānui te tipu ki te 200cm te roa, engari ka taea e te tokotoko tioata silicon carbide te tipu ki te 2cm anake te roa. Heoi anō, he rauemi mārō, he pakarukaru hoki te SiC, ā, ka ngawari te pakaru o ngā papa i hangaia mai i taua mea ina whakamahia te tapahi mīhini tuku iho o te papa, ka pā ki te hua me te pono o te hua. He tino rerekē ngā papa SiC i ngā papa silicon tuku iho, ā, me whakawhanake ngā mea katoa mai i ngā taputapu, ngā tukanga, te tukatuka ki te tapahi hei whakahaere i te silicon carbide.
Ko te mekameka ahumahi silicon carbide e wehea ana kia whā ngā hononga matua: te papa, te epitaxy, ngā taputapu me ngā tono. Ko ngā rauemi papa te turanga o te mekameka ahumahi, ko ngā rauemi epitaxial te matua ki te hanga taputapu, ko ngā taputapu te uho o te mekameka ahumahi, ā, ko ngā tono te kaha akiaki mō te whanaketanga ahumahi. Ka whakamahia e te ahumahi o runga ake ngā rauemi mata hei hanga rauemi papa mā roto i ngā tikanga whakangawari kohu ā-tinana me ētahi atu tikanga, kātahi ka whakamahia ngā tikanga whakatakoto kohu matū me ētahi atu tikanga hei whakatipu rauemi epitaxial. Ka whakamahia e te ahumahi waenga ngā rauemi o runga ake hei hanga taputapu auau reo irirangi, taputapu hiko me ētahi atu taputapu, e whakamahia ana i roto i ngā whakawhitiwhitinga 5G o raro iho, ngā waka hiko, te tereina, me ētahi atu. I roto i ēnei, ko te papa me te epitaxy te 60% o te utu o te mekameka ahumahi, ā, koinei te uara matua o te mekameka ahumahi.
Papa SiC: Ko te tikanga Lely te tikanga hanga o ngā tioata SiC. Kei te neke haere ngā hua matua o te ao mai i te 4 inihi ki te 6 inihi, ā, kua whakawhanakehia ngā hua papa hiko 8-inihi. Ko ngā papa o te kāinga he 4 inihi te nuinga. Nā te mea ka taea te whakapai ake me te whakaputa i ngā raina whakaputa anga silicon 6-inihi o nāianei hei hanga taputapu SiC, ka mau tonu te wāhi mākete nui o ngā papa SiC 6-inihi mō te wā roa.
He uaua, he uaua hoki te hanga i te papa whakarewa waro silicon. Ko te papa whakarewa waro silicon he rauemi karaihe kotahi haurua-whakakotahi e rua ngā huānga: te waro me te silicon. I tēnei wā, ko te nuinga o te ahumahi e whakamahi ana i te paura waro tino parakore me te paura silicon tino parakore hei rauemi mata hei hanga i te paura waro silicon. I raro i tētahi mara pāmahana motuhake, ka whakamahia te tikanga tuku kohu tinana pakeke (tikanga PVT) hei whakatipu i te waro silicon o ngā rahi rerekē i roto i te oumu whakatipu tioata. Ka tukatukahia te ingot tioata, ka tapahia, ka hurihia, ka orohia, ka horoia, ā, ka maha atu ngā tukanga hei hanga i te papa whakarewa waro silicon.
Wā tuku: Mei-22-2024