Kuyika filimu yopyapyala kumaphatikizapo kuphimba filimu pamwamba pa chinthu chachikulu cha semiconductor. Filimuyi ikhoza kupangidwa ndi zinthu zosiyanasiyana, monga silicon dioxide, polysilicon ya semiconductor, mkuwa wachitsulo, ndi zina zotero. Zipangizo zomwe zimagwiritsidwa ntchito popaka filimu yopyapyala zimatchedwa zida zoyika filimu yopyapyala.
Kuchokera pakuwona njira yopangira ma chip a semiconductor, ili mu ndondomeko yoyambira.
Njira yokonzekera filimu yopyapyala ingagawidwe m'magulu awiri malinga ndi njira yopangira filimu: physical nthunzi deposition (PVD) ndi chemical nthunzi deposition(CVD), pakati pawo pali zida zogwirira ntchito za CVD zomwe zimakhala ndi gawo lalikulu.
Kuyika nthunzi ya thupi (PVD) kumatanthauza kuyika nthunzi pamwamba pa gwero la zinthu ndi kuika pamwamba pa gawo lapansi kudzera mu mpweya/plasma wochepa, kuphatikizapo kuuma, kutulutsa madzi, kuwala kwa ayoni, ndi zina zotero;
Kuyika kwa nthunzi ya mankhwala (Matenda a mtima (CVD)) amatanthauza njira yoyika filimu yolimba pamwamba pa silicon wafer kudzera mu mankhwala osakanikirana ndi mpweya. Malinga ndi momwe zimakhalira (kupanikizika, precursor), imagawidwa m'magulu a mlengalenga.Matenda a mtima (CVD)(APCVD), kuthamanga kochepaMatenda a mtima (CVD)(LPCVD), plasma enhanced CVD (PECVD), high density plasma CVD (HDPCVD) ndi atomic layer deposition (ALD).
LPCVD: LPCVD ili ndi mphamvu yabwino yophimba masitepe, kulamulira bwino kapangidwe kake ndi kapangidwe kake, kuchuluka kwa mafuta ndi kutulutsa kwake, ndipo imachepetsa kwambiri gwero la kuipitsa kwa tinthu. Kudalira zida zotenthetsera ngati gwero la kutentha kuti zisunge momwe zimachitikira, kuwongolera kutentha ndi kupanikizika kwa mpweya ndizofunikira kwambiri. Amagwiritsidwa ntchito kwambiri popanga maselo a TopCon omwe ali ndi zigawo za Poly.
PECVD: PECVD imadalira plasma yomwe imapangidwa ndi kulowetsedwa kwa ma radio frequency kuti ikwaniritse kutentha kochepa (kochepera madigiri 450) kwa njira yochepetsera filimu yopyapyala. Kuchepetsa kutentha ndiye phindu lake lalikulu, motero kusunga mphamvu, kuchepetsa ndalama, kuwonjezera mphamvu zopangira, ndikuchepetsa kuwonongeka kwa moyo wonse kwa zonyamulira zazing'ono mu ma silicon wafers omwe amayambitsidwa ndi kutentha kwambiri. Itha kugwiritsidwa ntchito pazinthu zosiyanasiyana monga PERC, TOPCON, ndi HJT.
ALD: Kufanana bwino kwa filimu, kokhuthala komanso kopanda mabowo, mawonekedwe abwino ophimba masitepe, kumatha kuchitika kutentha kochepa (kutentha kwa chipinda - 400℃), kumatha kuwongolera makulidwe a filimu mosavuta komanso molondola, kumagwiritsidwa ntchito kwambiri pazigawo zamitundu yosiyanasiyana, ndipo sikuyenera kuwongolera kufanana kwa kayendedwe ka reactant. Koma vuto ndilakuti liwiro lopanga filimuyo ndi lochepa. Monga zinc sulfide (ZnS) light-emitting layer yomwe imagwiritsidwa ntchito popanga nanostructured insulators (Al2O3/TiO2) ndi thin-film electroluminescent displays (TFEL).
Kuyika kwa Atomic layer (ALD) ndi njira yophikira vacuum yomwe imapanga filimu yopyapyala pamwamba pa substrate layer ndi layer mu mawonekedwe a single atomic layer. Kale mu 1974, katswiri wa sayansi ya zinthu ku Finland Tuomo Suntola adapanga ukadaulo uwu ndipo adapambana Mphotho ya Ukadaulo wa Millennium wa 1 miliyoni euro. Ukadaulo wa ALD poyamba unkagwiritsidwa ntchito powonetsera ma electroluminescent a flat-panel, koma sunagwiritsidwe ntchito kwambiri. Mpaka kumayambiriro kwa zaka za m'ma 2000, ukadaulo wa ALD unayamba kugwiritsidwa ntchito ndi makampani opanga ma semiconductor. Mwa kupanga zinthu zopyapyala kwambiri za dielectric kuti zilowe m'malo mwa silicon oxide yachikhalidwe, idathetsa bwino vuto la kutayikira kwamadzi lomwe limachitika chifukwa cha kuchepa kwa mzere wa transistors, zomwe zidapangitsa kuti Moore's Law ipitirire patsogolo kukhala ndi mzere wocheperako. Dr. Tuomo Suntola adanenapo kale kuti ALD ikhoza kuwonjezera kwambiri kuchuluka kwa zinthu zomwe zimagwirizana.
Deta ya anthu onse ikuwonetsa kuti ukadaulo wa ALD unapangidwa ndi Dr. Tuomo Suntola wa PICOSUN ku Finland mu 1974 ndipo wakhala ukukula m'mafakitale akunja, monga filimu ya dielectric yapamwamba mu chip ya 45/32 nanometer yomwe idapangidwa ndi Intel. Ku China, dziko langa linayambitsa ukadaulo wa ALD patatha zaka zoposa 30 kuposa mayiko akunja. Mu Okutobala 2010, PICOSUN ku Finland ndi Fudan University adachita msonkhano woyamba wapakhomo wosinthana maphunziro a ALD, womwe unayambitsa ukadaulo wa ALD ku China koyamba.
Poyerekeza ndi kuyika kwa nthunzi ya mankhwala yachikhalidwe (Matenda a mtima (CVD)) ndi physical vapor deposition (PVD), ubwino wa ALD ndi kukhala ndi mawonekedwe abwino kwambiri a mbali zitatu, kufanana kwa filimu yayikulu, komanso kuwongolera makulidwe molondola, zomwe ndizoyenera kukulitsa mafilimu owonda kwambiri pa mawonekedwe ovuta komanso kapangidwe kake ka aspect ratio.
—Chitsime cha deta: Nsanja yogwiritsira ntchito micro-nano ya Tsinghua University—
Mu nthawi ya pambuyo pa Moore, zovuta ndi kuchuluka kwa njira zopangira ma wafer zasintha kwambiri. Potengera zitsanzo za ma logic chips, ndi kuwonjezeka kwa kuchuluka kwa mizere yopanga ndi njira zochepera 45nm, makamaka mizere yopanga ndi njira zopitilira 28nm ndi pansi pake, zofunikira pakukuluka ndi kuwongolera molondola ndizokwera. Pambuyo poyambitsa ukadaulo wowonetsa zambiri, kuchuluka kwa njira za ALD ndi zida zofunika kwawonjezeka kwambiri; m'munda wa ma memory chips, njira yayikulu yopangira yasintha kuchokera ku 2D NAND kupita ku 3D NAND structure, kuchuluka kwa zigawo zamkati kwapitirira kuwonjezeka, ndipo zigawozo pang'onopang'ono zawonetsa kapangidwe ka high-density, high aspect ratio, ndipo gawo lofunika la ALD layamba kuonekera. Kuchokera pakuwona chitukuko chamtsogolo cha ma semiconductors, ukadaulo wa ALD udzakhala ndi gawo lofunika kwambiri mu nthawi ya pambuyo pa Moore.
Mwachitsanzo, ALD ndiyo ukadaulo wokhawo woyika zinthu womwe ungakwaniritse zofunikira pakuphimba ndi magwiridwe antchito a filimu ya nyumba zovuta za 3D (monga 3D-NAND). Izi zitha kuwoneka bwino pachithunzi chili pansipa. Filimu yomwe ili mu CVD A (buluu) siphimba gawo lonse la pansi la kapangidwe kake; ngakhale kusintha kwina kwa njira kupangidwa ku CVD (CVD B) kuti ikwaniritse kuphimba, magwiridwe antchito a filimu ndi kapangidwe ka mankhwala m'dera la pansi ndi koipa kwambiri (dera loyera pachithunzichi); Mosiyana ndi zimenezi, kugwiritsa ntchito ukadaulo wa ALD kukuwonetsa kuphimba kwathunthu kwa filimu, ndipo mawonekedwe apamwamba komanso ofanana a filimu amapezeka m'mbali zonse za kapangidwe kake.
—-Chithunzi Ubwino wa ukadaulo wa ALD poyerekeza ndi CVD (Chitsime: ASM)—-
Ngakhale kuti CVD ikadali ndi gawo lalikulu pamsika posachedwapa, ALD yakhala imodzi mwa magawo omwe akukula mofulumira pamsika wa zida za wafer. Mu msika wa ALD uwu womwe uli ndi kuthekera kwakukulu kokulira komanso gawo lofunika kwambiri popanga ma chip, ASM ndi kampani yotsogola pankhani ya zida za ALD.
Nthawi yotumizira: Juni-12-2024