Kuisa firimu rakatetepa kunoreva kuputira firimu pamusoro pechinhu chikuru che semiconductor. Firimu iri rinogona kugadzirwa nezvinhu zvakasiyana-siyana, zvakaita se silicon dioxide inonyungudutsa, polysilicon ye semiconductor, mhangura yesimbi, nezvimwewo. Midziyo inoshandiswa pakupfekedza inonzi michina yekuisa firimu rakatetepa.
Kubva pamaonero ekugadzirwa kwemachipisi e semiconductor, iri muchikamu chepamberi.
Maitiro ekugadzira firimu rakatetepa anogona kukamurwa muzvikamu zviviri zvichienderana nenzira yekugadzira firimu: physical vapor deposition (PVD) uye chemical vapor deposition.(CVD), pakati pazvo michina yekugadzira CVD ine chikamu chikuru.
Kuiswa kwemhepo inofema (PVD) zvinoreva kupiswa kwemvura pamusoro pechinhu chinobuda uye kuiswa pamusoro pechinhu chinopfungaira kuburikidza negasi/plasma ine simba shoma, kusanganisira kupwanyika kwemvura, kusputtering, ion beam, nezvimwewo;
Kuiswa kwemhepo yemakemikari (CVD) zvinoreva maitiro ekuisa firimu rakasimba pamusoro pesilicon wafer kuburikidza nemakemikari emusanganiswa wegasi. Zvichienderana nemamiriro ekuita (kumanikidzwa, precursor), yakakamurwa kuita kumanikidzwa kwemhepo.CVD(APCVD), kumanikidzwa kwakadereraCVD(LPCVD), plasma yakawedzerwa CVD (PECVD), high density plasma CVD (HDPCVD) uye atomic layer deposition (ALD).
LPCVD: LPCVD ine kugona kuri nani kwekuvhara matanho, kugona kuumba zvakanaka uye kudzora chimiro, kugona kuisa zvinhu zvakawanda uye kubuda, uye inoderedza zvakanyanya kunobva kusvibiswa kwezvikamu. Kuvimba nemidziyo yekupisa senzvimbo yekupisa kuchengetedza reaction, kudzora tembiricha uye kumanikidzwa kwegasi zvakakosha zvikuru. Inoshandiswa zvakanyanya mukugadzira masero eTopCon ane poly layer.
PECVD: PECVD inoshandisa plasma inogadzirwa ne radio frequency induction kuti iwane tembiricha yakaderera (isingasviki madhigirii 450) ye thin film deposition process. Kuisa tembiricha yakaderera ndiyo mukana wayo mukuru, nokudaro ichichengetedza simba, ichideredza mari, ichiwedzera kugona kwayo kugadzira, uye ichideredza kuora kwehupenyu hwese kwe minority carriers mu silicon wafers kunokonzerwa nekupisa kwakanyanya. Inogona kushandiswa kune maitiro emasero akasiyana-siyana akadai sePERC, TOPCON, uye HJT.
ALD: Kuenzana kwakanaka kwefirimu, yakakora uye isina maburi, hunhu hwakanaka hwekufukidza matanho, inogona kuitwa patembiricha yakaderera (tembiricha yemukamuri-400℃), inogona kudzora ukobvu hwefirimu zviri nyore uye nemazvo, inoshanda zvakanyanya kune substrates dzemaumbirwo akasiyana, uye haidi kudzora kufanana kwekuyerera kwereactant. Asi chakaipa ndechekuti kumhanya kwekugadzirwa kwefirimu kunononoka. Zvakadai se zinc sulfide (ZnS) light-emitting layer inoshandiswa kugadzira nanostructured insulators (Al2O3/TiO2) uye thin-film electroluminescent displays (TFEL).
Atomic layer deposition (ALD) inzira yekuputira vacuum inoita firimu rakatetepa pamusoro pe substrate layer ne layer muchimiro che single atomic layer. Kare muna 1974, nyanzvi yefizikisi yekuFinland Tuomo Suntola akagadzira tekinoroji iyi ndokuhwina mubairo weMillennium Technology Award we1 miriyoni euro. Tekinoroji yeALD yakatanga kushandiswa pakuratidza ma electroluminescent e flat-panel, asi yakanga isingashandiswe zvakanyanya. Tekinoroji yeALD yakatanga kushandiswa neindasitiri ye semiconductor kusvika pakutanga kwezana remakore rechi21. Nekugadzira zvinhu zvakatetepa zvakanyanya zve high-dielectric kuti zvitsive silicon oxide yechinyakare, yakagadzirisa zvinobudirira dambudziko rekubuda kwemvura kwakakonzerwa nekuderedzwa kwehupamhi hwemutsara we transistors dze field effect, zvichiita kuti Moore's Law iwedzere kukura kusvika pahupamhi hwemutsara hudiki. Dr. Tuomo Suntola akambotaura kuti ALD inogona kuwedzera zvakanyanya huwandu hwekubatanidzwa kwezvikamu.
Ruzivo rweveruzhinji runoratidza kuti tekinoroji yeALD yakagadzirwa naDr. Tuomo Suntola wePICOSUN muFinland muna 1974 uye yave ichishanda kunze kwenyika, senge firimu re dielectric rine 45/32 nanometer chip rakagadzirwa neIntel. MuChina, nyika yangu yakaunza tekinoroji yeALD makore anopfuura makumi matatu gare gare kupfuura nyika dzekunze. Muna Gumiguru 2010, PICOSUN muFinland neFudan University vakaita musangano wekutanga wekuchinjana kwedzidzo yeALD, vachiunza tekinoroji yeALD kuChina kekutanga.
Zvichienzaniswa nekushandiswa kwemakemikari echinyakare (CVD) uye physical vapor deposition (PVD), zvakanakira zveALD zvinosanganisira kuenderana kwakanaka kwemativi matatu, kufanana kwefirimu munzvimbo yakakura, uye kutonga kwakaringana kweukobvu, izvo zvakakodzera kurima mafirimu matete zvakanyanya pamhando dzakaoma dzepamusoro uye maumbirwo ehupamhi hwepamusoro.
—Kunobva data: Chikuva chekugadzirisa micro-nano cheYunivhesiti yeTsinghua—
Munguva yeMoore, kuomarara uye huwandu hwemaitiro ekugadzira wafer zvakavandudzwa zvikuru. Tichitora logic chips semuenzaniso, nekuwedzera kwehuwandu hwemitsara yekugadzira ine maitiro ari pasi pe45nm, kunyanya mitsara yekugadzira ine maitiro e28nm uye pasi, zvinodiwa zvekuputira ukobvu uye kutonga kwakarurama zvakakwira. Mushure mekuunzwa kwetekinoroji yekuona zvakawanda, huwandu hwematanho ekugadzirisa eALD nemidziyo inodiwa yakawedzera zvakanyanya; mumunda wemachipisi ekurangarira, maitiro ekugadzira akajairika akashanduka kubva ku2D NAND kuenda ku3D NAND structure, huwandu hwezvikamu zvemukati zvakaramba zvichiwedzera, uye zvikamu zvishoma nezvishoma zvakaratidza zvimiro zvehupamhi hwepamusoro, uye basa rakakosha reALD ratanga kubuda. Kubva pamaonero ekuvandudzwa kweramangwana kwema semiconductors, tekinoroji yeALD ichaita basa rakakosha munguva yeMoore.
Semuenzaniso, ALD ndiyo chete tekinoroji yekuisa zvinhu inogona kusangana nezvinodiwa zvekufukidza uye kushanda kwemafirimu ezvivakwa zvakaoma zve3D (zvakadai se3D-NAND). Izvi zvinogona kuonekwa zvakajeka mumufananidzo uri pazasi. Firimu rakaiswa muCVD A (bhuruu) harifukidze chikamu chezasi chechivako chose; kunyangwe kana paine kugadziriswa kwemaitiro kukaitwa kuCVD (CVD B) kuti ifukidzwe, kushanda kwemafirimu uye kuumbwa kwemakemikoro enzvimbo yepasi kwakashata kwazvo (nzvimbo chena mumufananidzo); Kusiyana neizvi, kushandiswa kwetekinoroji yeALD kunoratidza kufukidza kwefirimu kwakazara, uye hunhu hwemafirimu emhando yepamusoro uye akafanana hunowanikwa munzvimbo dzese dzechivako.
—-Mufananidzo Mabhenefiti eALD tekinoroji zvichienzaniswa neCVD (Chitubu: ASM)—- Mufananidzo
Kunyangwe CVD ichiri kutora chikamu chikuru chemusika munguva pfupi, ALD yave imwe yenzvimbo dziri kukura nekukurumidza mumusika wemidziyo yewafer fab. Mumusika uyu weALD une mukana mukuru wekukura uye basa guru mukugadzira machipisi, ASM ikambani inotungamira mumunda wemidziyo yeALD.
Nguva yekutumira: Chikumi-12-2024