Ko te whakatakoto kiriata angiangi he paninga i tētahi paparanga kiriata ki runga i te rauemi matua o te semiconductor. Ka taea te hanga i tēnei kiriata mai i ngā momo rauemi, pērā i te matū whakamarumaru silicon dioxide, te semiconductor polysilicon, te konganuku parahi, me ētahi atu. Ko ngā taputapu e whakamahia ana mō te paninga ka kiia he taputapu whakatakoto kiriata angiangi.
Mai i te tirohanga a te tukanga hanga maramara haurua-ira, kei roto i te tukanga o mua.
Ka taea te wehewehe i te tukanga whakarite kiriata angiangi kia rua ngā wāhanga e ai ki te tikanga hanga kiriata: te whakatakotoranga kohu ā-tinana (PVD) me te whakatakotoranga kohu matū.(CVD), i roto i ēnei ko ngā taputapu tukatuka CVD te mea he nui ake te ōwehenga.
Ko te whakatakotoranga kohu ā-tinana (PVD) e pā ana ki te mimiti o te mata o te pūtake rauemi me te whakatakotoranga ki te mata o te papa mā te hau/plasma pēhanga-iti, tae atu ki te mimiti, te pupuhi, te hihi katote, me ētahi atu;
Te whakatakotoranga o te kohu matū (CVD) e pā ana ki te tukanga o te whakatakoto i tētahi kiriata totoka ki runga i te mata o te anga silicon mā te tauhohenga matū o te ranunga hau. E ai ki ngā āhuatanga tauhohenga (pēhanga, mua), ka wehea ki te pēhanga hauāteaCVD(APCVD), pēhanga itiCVD(LPCVD), CVD whakarei ake i te plasma (PECVD), CVD plasma kiato teitei (HDPCVD) me te whakatakotoranga paparanga atomika (ALD).
LPCVD: He pai ake te kaha o te LPCVD ki te hipoki i ngā takahanga, he pai te whakahaere i te hanganga me te hanganga, he tere teitei te whakatakotoranga me te putanga, ā, he tino whakaiti i te pūtake o te parahanga matūriki. He mea tino nui te whakawhirinaki ki ngā taputapu whakamahana hei pūtake wera hei pupuri i te tauhohenga, te whakahaere pāmahana me te pēhanga hau. He whānuitia te whakamahinga i roto i te hanga paparanga Poly o ngā pūtau TopCon.
PECVD: Ka whakawhirinaki te PECVD ki te plasma i hangaia e te whakaoho auau reo irirangi hei whakatutuki i te pāmahana iti (iti iho i te 450 nekehanga) o te tukanga whakatakoto kiriata angiangi. Ko te whakatakoto pāmahana iti tōna painga matua, nā reira ka penapena pūngao, ka whakaiti i ngā utu, ka whakanui ake i te kaha whakaputa, me te whakaiti i te pirau o ngā kaikawe iti i roto i ngā papa silicon i puta mai i te pāmahana teitei. Ka taea te whakamahi ki ngā tukanga o ngā pūtau rerekē pēnei i te PERC, TOPCON, me te HJT.
ALD: He pai te ōrite o te kiriata, he matotoru, kāore he kōhao, he pai ngā āhuatanga hipoki takahanga, ka taea te mahi i te pāmahana iti (te pāmahana rūma - 400℃), ka taea te whakahaere tika me te ngāwari i te matotoru o te kiriata, he whānui te whakamahinga ki ngā papa o ngā āhua rerekē, ā, kāore e hiahiatia te whakahaere i te ōrite o te rere o te matū tauhohe. Engari ko te ngoikoretanga he puhoi te tere o te hanganga kiriata. Pērā i te paparanga marama konutea whanariki (ZnS) e whakamahia ana hei hanga i ngā ārai nanostructured (Al2O3/TiO2) me ngā whakaaturanga hiko angiangi-kiriata (TFEL).
Ko te whakatakoto paparanga atomika (ALD) he tukanga paninga korehau e hanga ana i tētahi kiriata angiangi ki runga i te mata o tētahi paparanga paparanga i te āhua o tētahi paparanga atomika kotahi. I te tau 1974, i whakawhanakehia e te tohunga ahupūngao rauemi Finnish, a Tuomo Suntola, tēnei hangarau, ā, i toa i te Tohu Hangarau Millennium 1 miriona euro. I whakamahia tuatahitia te hangarau ALD mō ngā whakaaturanga hiko-whakaata papatahi, engari kāore i whakamahia whānuitia. Nō te tīmatanga o te rautau 21 ka tīmata te whakamahi i te hangarau ALD e te umanga semiconductor. Mā te hanga rauemi tino angiangi teitei-dielectric hei whakakapi i te waikura silicon tuku iho, i whakaoti angitu i te raruraru iahiko turuturu i puta mai i te whakaiti i te whānui raina o ngā transistors pānga mara, ka akiaki i te Ture a Moore kia whanake ake ki ngā whānui raina iti ake. I kī a Tākuta Tuomo Suntola ka taea e te ALD te whakanui ake i te kiato whakauru o ngā wāhanga.
E whakaatu ana ngā raraunga tūmatanui i hangaia te hangarau ALD e Tākuta Tuomo Suntola o PICOSUN i Pinirana i te tau 1974, ā, kua whakawhanakehia ki tāwāhi, pērā i te kiriata hiko teitei i roto i te maramara 45/32 nanometer i whakawhanakehia e Intel. I Haina, i whakaurua e tōku whenua te hangarau ALD neke atu i te 30 tau i muri mai i ngā whenua ke. I te marama o Oketopa 2010, i manaaki a PICOSUN i Pinirana me te Whare Wānanga o Fudan i te hui whakawhiti mātauranga ALD tuatahi o te motu, i whakaurua ai te hangarau ALD ki Haina mō te wā tuatahi.
Ki te whakataurite ki te whakatakotoranga kohu matū tuku iho (CVD) me te whakatakotoranga kohu ā-tinana (PVD), ko ngā painga o te ALD he tino pai te āhua o te hanganga o ngā āhua e toru, te ōritetanga o te kiriata whānui, me te whakahaere matotoru tika, e tika ana mō te whakatipu kiriata tino angiangi i runga i ngā āhua mata matatini me ngā hanganga ōwehenga āhua teitei.
—Pūtake raraunga: Pūhara tukatuka moroiti-nano o Te Whare Wānanga o Tsinghua—
I te wā i muri i a Moore, kua tino pai ake te uaua me te nui o ngā tukanga hanga papa. Hei tauira, me te pikinga ake o te maha o ngā raina whakaputa me ngā tukanga i raro i te 45nm, inā koa ko ngā raina whakaputa me ngā tukanga o te 28nm me raro iho, kua teitei ake ngā whakaritenga mō te matotoru o te paninga me te whakahaere tika. Whai muri i te whakaurunga o te hangarau whakaaturanga maha, kua tino piki ake te maha o ngā mahi tukanga ALD me ngā taputapu e hiahiatia ana; i roto i te mara o ngā maramara mahara, kua whanake te tukanga hanga matua mai i te hanganga 2D NAND ki te hanganga 3D NAND, kua piki haere tonu te maha o ngā paparanga o roto, ā, kua āta whakaatuhia e ngā wāhanga he hanganga ōwehenga āhua teitei, he kiato teitei, ā, kua tīmata te puta o te tūranga nui o te ALD. Mai i te tirohanga o te whanaketanga o ngā semiconductors ā muri ake nei, ka nui haere te tūranga nui o te hangarau ALD i te wā i muri i a Moore.
Hei tauira, ko te ALD anake te hangarau whakatakoto ka taea te whakatutuki i ngā whakaritenga hipoki me te mahi kiriata o ngā hanganga matatini kua whakarārangihia ki te 3D (pēnei i te 3D-NAND). Ka kitea mārama tēnei i roto i te ahua i raro nei. Ko te kiriata kua whakatakotoria ki roto i te CVD A (kikorangi) kāore e kapi katoa i te wāhanga o raro o te hanganga; ahakoa ka mahia ētahi whakatikatika tukanga ki te CVD (CVD B) kia kapi ai, he tino ngoikore te mahi kiriata me te hanganga matū o te rohe o raro (he rohe mā i roto i te ahua); he rerekē, ko te whakamahinga o te hangarau ALD e whakaatu ana i te hipoki kiriata katoa, ā, ka tutuki ngā āhuatanga kiriata kounga teitei me te ōrite i ngā wāhanga katoa o te hanganga.
—-Pikitia Ngā Painga o te hangarau ALD ki te whakataurite ki te CVD (Puna: ASM)—-
Ahakoa kei te noho tonu te CVD i te wāhanga mākete nui rawa atu i roto i te wā poto, kua riro te ALD hei tētahi o ngā wāhanga tino tere te tipu o te mākete taputapu hanga wafer. I roto i tēnei mākete ALD me te kaha tipu nui me te tūranga matua i roto i te hanga maramara, ko ASM te kamupene ārahi i roto i te mara o ngā taputapu ALD.
Wā tuku: Pipiri-12-2024