Gushyira icyuma gito mu ruganda ni ugusiga urwego rwa firime ku bikoresho by'ingenzi bya semiconductor. Iyi firime ishobora gukorwa mu bikoresho bitandukanye, nko gukingira silicon dioxide, polysilicon ya semiconductor, umuringa w'icyuma, nibindi. Ibikoresho bikoreshwa mu gusiga byitwa ibikoresho byo gushyira icyuma gito mu ruganda.
Ukurikije uburyo bwo gukora chip za semiconductor, iherereye mu buryo bwo gukora imbere.
Uburyo bwo gutegura firime nto bushobora kugabanywamo ibyiciro bibiri hakurikijwe uburyo bwo gukora firime: PVD (ibyuka bifatika) n'ibyuka bikoresha imiti(indwara y'umutima), muri byo ibikoresho byo gutunganya CVD bifite umubare munini w’ibipimo.
Gushyira umwuka mu kirere (PVD) bivuga gusohora umwuka mu kirere ku buso bw'isoko y'ibintu no kuwushyira ku buso bw'ubutaka binyuze mu mwuka/plasma ifite umuvuduko muto, harimo guhumeka, gusuka amazi, urumuri rwa iyoni, nibindi;
Gushyira umwuka w'ibinyabutabire mu kirere (CVD) bivuga inzira yo gushyira agapira gakomeye ku buso bwa silicon wafer binyuze mu buryo bwa chemical reaction y'imvange ya gaze. Dukurikije imiterere y'uburyo ibintu bigenda (igitutu, icyabanjirije), gagabanyijemo igitutu cy'ikirereCVD(APCVD), umuvuduko mukeCVD(LPCVD), CVD yongerewe mu maraso (PECVD), CVD yongerewe mu maraso (HDPCVD) hamwe no gushyira mu buryo bwa atome (ALD).
LPCVD: LPCVD ifite ubushobozi bwo gutwikira intambwe neza, igenzura neza imiterere n'imiterere, igabanya cyane umusaruro w'ibice, kandi igabanya cyane ihumana ry'uduce. Kwishingikiriza ku bikoresho bishyushya nk'isoko y'ubushyuhe kugira ngo bikomeze gukora neza, kugenzura ubushyuhe n'umuvuduko wa gaze ni ingenzi cyane. Ikoreshwa cyane mu gukora uturemangingo twa TopCon.
PECVD: PECVD ikoresha plasma ikorwa na radiyo frequency kugira ngo igere ku bushyuhe buke (buri munsi ya dogere 450) bw'uburyo bwo gushyira filime nto. Gushyira ubushyuhe buke ni yo nyungu yayo nyamukuru, bityo ikaba izigama ingufu, ikagabanya ikiguzi, ikongera ubushobozi bwo gukora, kandi ikagabanya kwangirika kw'ubuzima bwose bw'ibikoresho bya silicon wafers biterwa n'ubushyuhe bwinshi. Ishobora gukoreshwa mu bikorwa by'uturemangingo dutandukanye nka PERC, TOPCON, na HJT.
ALD: Ifite filime imwe nziza, ifite ubucucike bwinshi kandi idafite imyobo, ifite imiterere myiza yo gutwikira intambwe, ishobora gukorwa ku bushyuhe buri hasi (ubushyuhe bw'icyumba - 400℃), ishobora kugenzura neza ubugari bwa filime mu buryo bworoshye kandi bunoze, ikoreshwa cyane ku bice by'imiterere itandukanye, kandi ntikeneye kugenzura imiterere y'urujya n'uruza rw'ibinyabutabire. Ariko ikibi ni uko umuvuduko wo gukora filime ugenda buhoro. Nk'urwego rutanga urumuri rwa zinc sulfide (ZnS) rukoreshwa mu gukora insulators za nanostructured (Al2O3 / TiO2) na thin-film electroluminescent displays (TFEL).
Gushyira mu mwanya wa atomiki (ALD) ni uburyo bwo gutwikira ibintu mu buryo bw'umwuka bukora agace gato ku buso bw'urupapuro rw'inyuma ku rundi mu buryo bw'urupapuro rw'inyuma rumwe. Mu 1974, umuhanga mu bya fiziki y'ibikoresho byo muri Finilande, Tuomo Suntola, yateje imbere iri koranabuhanga maze yegukana igihembo cya miliyoni imwe y'amayero mu ikoranabuhanga rya Millennium. Ikoranabuhanga rya ALD ryakoreshejwe mbere mu kwerekana amashanyarazi mu buryo bwa flat-panel, ariko ntiryakoreshejwe cyane. Kugeza mu ntangiriro z'ikinyejana cya 21, ni bwo ikoranabuhanga rya ALD ryatangiye gukoreshwa n'inganda zikora ibikoresho bya semiconductor. Mu gukora ibikoresho byoroheje cyane bifite dielectric kugira ngo bisimbuze oxyde ya silikoni isanzwe, byakemuye neza ikibazo cy'amazi asohoka cyatewe no kugabanuka k'ubugari bw'umurongo wa transistors z'ingaruka z'umurima, bituma umuhanga mu mategeko ya Moore akomeza gutera imbere agana ku bugari bw'umurongo muto. Dr. Tuomo Suntola yigeze kuvuga ko ALD ishobora kongera cyane ubucucike bw'ibice.
Amakuru rusange agaragaza ko ikoranabuhanga rya ALD ryavumbuwe na Dr. Tuomo Suntola wo muri PICOSUN muri Finlande mu 1974 kandi ryarashyizwe mu nganda mu mahanga, nko muri filime ifite amashanyarazi menshi muri chip ya nanometero 45/32 yakozwe na Intel. Mu Bushinwa, igihugu cyanjye cyazanye ikoranabuhanga rya ALD nyuma y'imyaka irenga 30 ugereranije n'ibihugu by'amahanga. Mu Ukwakira 2010, PICOSUN muri Finlande na Kaminuza ya Fudan byakiriye inama ya mbere yo guhanahana ubumenyi mu by'amasomo ya ALD mu gihugu, imenyekanisha ikoranabuhanga rya ALD mu Bushinwa ku nshuro ya mbere.
Ugereranyije n'uburyo gakondo bwo gushyira umwuka w'ibinyabutabire (CVD) hamwe no gushyira umwuka mu kirere (PVD), ibyiza bya ALD ni uburyo bwiza bwo guhuza imiterere y’ibice bitatu, imiterere y’agace kanini, no kugenzura neza ubugari, bikwiriye gukoreshwa mu guhinga filime nto cyane ku miterere y’ubuso igoye no ku miterere y’ubuso buri hejuru.
—Isoko y'amakuru: Urubuga rwo gutunganya micro-nano rwa Kaminuza ya Tsinghua—
Mu gihe cya nyuma ya Moore, imiterere y’imikorere n’ingano y’imikorere yo gukora wafer byarushijeho kuba byiza cyane. Dufashe urugero rw’udupira twa logic, hamwe n’ubwiyongere bw’imirongo y’imikorere ifite imikorere iri munsi ya 45nm, cyane cyane imirongo y’imikorere ifite imikorere ya 28nm no munsi yayo, ibisabwa kugira ngo habeho ubugari bw’ipamba n’igenzura ry’ubuziranenge biri hejuru. Nyuma yo gukoresha ikoranabuhanga ryo kwerekana ibintu byinshi, umubare w’intambwe n’ibikoresho bya ALD bikenewe byariyongereye cyane; mu rwego rwa memori chips, inzira isanzwe yo gukora yahindutse kuva kuri 2D NAND kugera kuri 3D NAND structure, umubare w’ibice by’imbere wakomeje kwiyongera, kandi ibice byagiye bigaragaza buhoro buhoro imiterere y’ubucucike bwinshi, kandi uruhare runini rwa ALD rwatangiye kugaragara. Ukurikije iterambere ry’ejo hazaza rya semiconductors, ikoranabuhanga rya ALD rizagira uruhare runini mu gihe cya nyuma ya Moore.
Urugero, ALD ni yo ikoranabuhanga ryonyine rishobora guhaza ibisabwa mu gutwikira no gukora neza kwa firime ku nyubako zikomeye za 3D (nka 3D-NAND). Ibi bigaragara neza ku ishusho iri hepfo. Filimi yashyizwe muri CVD A (ubururu) ntabwo itwikira igice cyo hasi cy’inyubako; nubwo habayeho impinduka zimwe na zimwe mu mikorere ya CVD (CVD B) kugira ngo ikwirakwizwe, imikorere ya firime n’imiterere ya shimi yo hasi ni bibi cyane (agace kera ku ishusho); mu buryo bunyuranye, ikoreshwa ry’ikoranabuhanga rya ALD rigaragaza ko firime yuzuye, kandi imiterere ya firime ifite ubuziranenge kandi ingana igerwaho mu bice byose by’inyubako.
—-Ishusho Ibyiza by'ikoranabuhanga rya ALD ugereranije na CVD (Inkomoko: ASM)—-
Nubwo CVD igifite umugabane munini ku isoko mu gihe gito, ALD yabaye kimwe mu bice bikura vuba ku isoko ry’ibikoresho bya wafer fab. Muri iri soko rya ALD rifite ubushobozi bwo gukura cyane n’uruhare runini mu gukora chips, ASM ni ikigo gikomeye mu bijyanye n’ibikoresho bya ALD.
Igihe cyo kohereza: Kamena-12-2024