Kugwiritsa ntchito ndi kupititsa patsogolo kafukufuku wa zokutira za SiC mu zida za carbon/carbon thermal field for monocrystalline silicon-2

1 Kugwiritsa ntchito ndi kupita patsogolo kwa kafukufuku wa zokutira za silicon carbide mu zida za carbon/carbon thermal field

1.1 Ntchito ndi kafukufuku akupita patsogolo pokonzekera crucible

M'munda umodzi wotentha wa crystal, thempweya / carbon cruciblechimagwiritsidwa ntchito ngati chotengera chotengera zinthu za silicon ndipo chimakhudzana ndiquartz crucible, monga momwe tawonetsera pa Chithunzi 2. Kutentha kwa ntchito ya carbon / carbon crucible ndi pafupifupi 1450 ℃, yomwe imakhudzidwa ndi kuphulika kwawiri kwa silicon yolimba (silicon dioxide) ndi mpweya wa silicon, ndipo potsiriza crucible imakhala yopyapyala kapena imakhala ndi phokoso la mphete, zomwe zimabweretsa kulephera kwa crucible.

Chophimba chophatikizika cha carbon/carbon composite crucible chinakonzedwa ndi njira yopitira ndi mpweya wamankhwala komanso momwe amachitira. The ❖ kuyanika gulu linapangidwa ndi pakachitsulo carbide ❖ kuyanika (100 ~ 300μm), pakachitsulo ❖ kuyanika (10 ~ 20μm) ndi pakachitsulo nitride ❖ kuyanika (50 ~ 100μm), amene akanakhoza bwino ziletsa dzimbiri wa pakachitsulo nthunzi pa mkati padziko mpweya / mpweya gulu crucible. Popanga, kutayika kwa crucible yopangidwa ndi kaboni / carbon composite crucible ndi 0.04 mm pa ng'anjo, ndipo moyo wautumiki ukhoza kufika nthawi 180.

Ofufuzawa adagwiritsa ntchito njira yopangira mankhwala kuti apange zokutira zofananira za silicon carbide pamwamba pa crucible ya carbon / carbon composite pansi pazikhalidwe zina za kutentha komanso kutetezedwa kwa mpweya wonyamulira, pogwiritsa ntchito silicon dioxide ndi chitsulo cha silicon ngati zida zopangira ng'anjo yotentha kwambiri. Zotsatirazi zikuwonetsa kuti kutentha kwapamwamba sikumangowonjezera chiyero ndi mphamvu ya sic ❖ kuyanika, komanso kumapangitsanso bwino kukana kwapamwamba kwa carbon / carbon composite, komanso kumalepheretsa kuwonongeka kwa pamwamba pa crucible ndi mpweya wa SiO ndi maatomu osasinthasintha a okosijeni mu ng'anjo ya monocrystal silicon. Moyo wautumiki wa crucible ukuwonjezeka ndi 20% poyerekeza ndi crucible popanda zokutira sic.

1.2 Kupititsa patsogolo ntchito ndi kafukufuku mu chubu chowongolera

Silinda yowongolera ili pamwamba pa crucible (monga momwe tawonetsera pa Chithunzi 1). Pokoka kristalo, kusiyana kwa kutentha pakati pa mkati ndi kunja kwamunda kumakhala kwakukulu, makamaka pansi ndi pafupi kwambiri ndi zinthu zosungunula za silicon, kutentha ndipamwamba kwambiri, ndipo dzimbiri ndi nthunzi ya silicon ndizovuta kwambiri.

Ofufuzawo adapanga njira yosavuta komanso kukana kwa okosijeni kwa chubu chowongolera anti-oxidation zokutira ndi njira yokonzekera. Choyamba, whisker ya silicon carbide whisker inali in-situ yomwe inakula pa matrix a chubu chowongolera, ndiyeno chitsulo chosungunuka cha silicon carbide chakunja chinakonzedwa, kotero kuti kusintha kwa SiCw kunapangidwa pakati pa matrix ndi wandiweyani wa silicon carbide pamwamba wosanjikiza, monga momwe tawonetsera pa Chithunzi 3. Coefficient of thermal expansion anali pakati pa silicon matrix ndi carbide matrix. Ikhoza kuchepetsa kupsinjika kwa kutentha komwe kumachitika chifukwa cha kusagwirizana kwa coefficient yowonjezera kutentha.

Kusanthula kukuwonetsa kuti pakuwonjezeka kwa zinthu za SiCw, kukula ndi kuchuluka kwa ming'alu pakuphimba kumachepa. Pambuyo 10h makutidwe ndi okosijeni mu 1100 ℃ mpweya, kuwonda mlingo wa ℃ ℃ chitsanzo ℃, ndi 0.87% ~ 8.87% kukana makutidwe ndi okosijeni ndi matenthedwe kukana kunjenjemera kwa ℃ ℃ ℃ ℃. Ntchito yonse yokonzekera imamalizidwa mosalekeza ndi kuyika kwa nthunzi wamankhwala, kukonza zokutira za silicon carbide kumakhala kosavuta, ndipo magwiridwe antchito amphuno yonse amalimbikitsidwa.

Ofufuzawo adapereka njira yolimbikitsira matrix ndi zokutira pamwamba pa chubu chowongolera cha graphite cha czohr monocrystal silicon. The analandira pakachitsulo carbide slurry anali uniformly TACHIMATA pamwamba pa graphite kalozera chubu ndi ❖ kuyanika makulidwe a 30 ~ 50 μm ndi ❖ kuyanika burashi kapena kutsitsi ❖ kuyanika njira, ndiyeno anaika mu ng'anjo mkulu kutentha kwa mu-situ anachita, kutentha anachita anali 1850 ~ 2300 ℃, ndi kutentha ~ 6h kuteteza. SiC wosanjikiza akunja angagwiritsidwe ntchito 24 mu (60.96 cm) limodzi galasi kukula ng'anjo, ndi kutentha ntchito ndi 1500 ℃, ndipo anapeza kuti palibe akulimbana ndi kugwa ufa pamwamba pa graphite kalozera yamphamvu pambuyo 1500h.

1.3 Kagwiritsidwe ntchito ndi kafufuzidwe kakupitilira mu silinda yotsekera

Monga chimodzi mwazinthu zofunika kwambiri za monocrystalline silicon thermal field system, silinda yotsekemera imagwiritsidwa ntchito kwambiri kuchepetsa kutayika kwa kutentha ndikuwongolera kutentha kwa malo otentha. Monga gawo lothandizira gawo lamkati lamkati la ng'anjo ya kristalo imodzi, silicon vapor corrosion imatsogolera kutsika kwa slag ndi kusweka kwa zinthu, zomwe pamapeto pake zimabweretsa kulephera kwazinthu.

Pofuna kupititsa patsogolo kukana kwa silicon vapor corrosion ya C/C-sic composite Insurance chubu, ofufuzawo adayika zida za C/C-sic composite kutchinjiriza mu ng'anjo yamoto, ndipo adakonza zokutira wandiweyani wa silicon carbide pamwamba pa C/C-sic composite insulation chubu pogwiritsa ntchito njira yoyika nthunzi. Zotsatira zikuwonetsa kuti, Njirayi imatha kuletsa dzimbiri la kaboni CHIKWANGWANI pachimake cha C/C-sic gulu ndi pakachitsulo nthunzi, ndi kukana dzimbiri pakachitsulo nthunzi nthunzi ukuwonjezeka ndi 5 mpaka 10 nthawi poyerekeza ndi mpweya gulu / mpweya, ndi moyo utumiki wa yamphamvu kutchinjiriza ndi chitetezo cha malo matenthedwe bwino bwino kumunda.

2.Mapeto ndi chiyembekezo

Kupaka silicon carbideamagwiritsidwa ntchito mochulukira mu zida za carbon/carbon thermal field chifukwa cha kukana kwake kwa okosijeni pa kutentha kwambiri. Ndi kukula kukula kwa mpweya / mpweya matenthedwe kumunda zipangizo ntchito monocrystalline pakachitsulo kupanga, mmene patsogolo yunifolomu silicon carbide ❖ kuyanika pamwamba pa zipangizo matenthedwe munda ndi kusintha moyo utumiki wa mpweya / mpweya matenthedwe kumunda zipangizo wakhala vuto mwamsanga kuthetsedwa.

Kumbali ina, ndi chitukuko cha makampani a monocrystalline silicon, kufunikira kwa zinthu zakumunda zoyera kwambiri za carbon/carbon thermal field zikuchulukirachulukira, ndipo ma SiC nanofibers amakulitsidwanso pazitsulo zamkati za kaboni panthawiyi. Kuchuluka kwa misa ndi kuchotsera kwamtundu wa C/ C-ZRC ndi C/ C-sic ZrC zopanga zokonzedwa ndi zoyeserera ndi -0.32 mg/s ndi 2.57 μm/s, motsatana. Misa ndi mizere yochotsera mizere ya C / C-sic -ZrC zophatikiza ndi -0.24mg / s ndi 1.66 μm / s, motero. Zophatikizika za C/ C-ZRC ndi SiC nanofibers zili ndi zinthu zabwinoko zotulutsa. Pambuyo pake, zotsatira za magwero osiyanasiyana a kaboni pakukula kwa SiC nanofibers ndi makina a SiC nanofibers omwe amalimbitsa mphamvu ya ablative ya C/C-ZRC composites adzaphunziridwa.

Chophimba chophatikizika cha carbon/carbon composite crucible chinakonzedwa ndi njira yopitira ndi mpweya wamankhwala komanso momwe amachitira. The ❖ kuyanika gulu linapangidwa ndi pakachitsulo carbide ❖ kuyanika (100 ~ 300μm), pakachitsulo ❖ kuyanika (10 ~ 20μm) ndi pakachitsulo nitride ❖ kuyanika (50 ~ 100μm), amene akanakhoza bwino ziletsa dzimbiri wa pakachitsulo nthunzi pa mkati padziko mpweya / mpweya gulu crucible. Popanga, kutayika kwa crucible yopangidwa ndi kaboni / carbon composite crucible ndi 0.04 mm pa ng'anjo, ndipo moyo wautumiki ukhoza kufika nthawi 180.