Ọganihu na nyocha nke mkpuchi SiC na ihe ọkụkụ carbon/carbon maka monocrystalline silicon-2

1 Ọganihu na nyocha nke mkpuchi silicon carbide na ihe ndị metụtara carbon/carbon

1.1 Ọganihu ngwa na nyocha n'ime nkwadebe nke ihe mkpuchi ọkụ

N'ime otu kristal okpomọkụ,ihe mkpuchi carbon/carbonA na-ejikarị ya eme ihe dị ka arịa ebu ihe maka ihe silicon ma na-ejikọta ya na iheihe mkpuchi quartz, dịka egosiri na Foto nke 2. Okpomọkụ ọrụ nke carbon/carbon crucible dị ihe dị ka 1450℃, nke a na-emebi okpukpu abụọ nke silicon siri ike (silicon dioxide) na silicon vepo, n'ikpeazụ crucible ahụ na-adị gịrịgịrị ma ọ bụ nwee mgbawa mgbanaka, nke na-ebute ọdịda nke crucible ahụ.

E ji usoro ikuku kemịkalụ na mmeghachi omume dị n'ime ya kwadebe ihe mkpuchi carbon/carbon mejupụtara ya. Ihe mkpuchi ahụ bụ mkpuchi silicon carbide (100~300μm), mkpuchi silicon (10~20μm) na mkpuchi silicon nitride (50~100μm), nke nwere ike igbochi ire ere nke silicon n'elu ime nke carbon/carbon composite crucible. N'ime usoro mmepụta ahụ, mfu nke ihe mkpuchi carbon/carbon composite covered bụ 0.04 mm kwa ọkụ, ndụ ọrụ ahụ nwekwara ike iru ugboro ọkụ 180.

Ndị nchọpụta ahụ jiri usoro mmeghachi omume kemịkalụ mepụta mkpuchi silicon carbide otu n'elu carbon/carbon composite crucible n'okpuru ọnọdụ okpomọkụ ụfọdụ na nchekwa nke gas ebu, na-eji silicon dioxide na silicon metal dị ka ihe eji eme ihe n'ime ọkụ sintering dị elu. Nsonaazụ ya na-egosi na ọgwụgwọ okpomọkụ dị elu abụghị naanị na ọ na-eme ka ịdị ọcha na ike nke mkpuchi sic dịkwuo mma, kamakwa ọ na-eme ka iguzogide iyi nke elu nke ihe mejupụtara carbon/carbon dịkwuo mma nke ukwuu, ma na-egbochi ire ere nke elu nke crucible site na SiO vapor na atọm oxygen na-agbanwe agbanwe na ọkụ silicon monocrystal. Ndụ ọrụ nke crucible na-abawanye site na 20% ma e jiri ya tụnyere nke crucible na-enweghị mkpuchi sic.

1.2 Ọganihu ngwa na nyocha na tube ntuziaka mmiri

Silinda nduzi dị n'elu ihe mkpuchi (dịka egosiri na Foto 1). N'usoro ịdọpụ kristal, ọdịiche okpomọkụ dị n'ime na mpụga ubi ahụ buru ibu, karịsịa elu ala dị nso na ihe silicon a gbazere agbaze, okpomọkụ kachasị elu, mmebi site na uzuoku silicon bụkwa nke kachasị njọ.

Ndị nchọpụta ahụ chepụtara usoro dị mfe na ezigbo iguzogide oxidation nke tube nduzi na usoro nkwadebe mgbochi oxidation. Nke mbụ, a kụrụ oyi akwa nke whisker silicon carbide n'ime matrix nke tube nduzi, wee kwadebe oyi akwa silicon carbide dị oke njọ, nke mere na e mepụtara oyi akwa mgbanwe SiCw n'etiti matrix na oyi akwa elu silicon carbide dị oke njọ, dịka egosiri na Foto 3. Oke nke mgbasawanye okpomọkụ dị n'etiti matrix na silicon carbide. Ọ nwere ike ibelata nrụgide okpomọkụ nke enweghị nkwekọ nke coefficient mgbasawanye okpomọkụ kpatara.

Nnyocha ahụ gosiri na ka ọdịnaya SiCw na-abawanye, nha na ọnụọgụ nke mgbawa dị na mkpuchi ahụ na-ebelata. Mgbe oxidation awa 10 gasịrị na ikuku 1100 ℃, ọnụego mfu ibu nke ihe nlele mkpuchi ahụ bụ naanị 0.87% ~ 8.87%, a na-emekwa ka iguzogide oxidation na iguzogide okpomọkụ nke mkpuchi silicon carbide ka mma nke ukwuu. A na-emecha usoro nkwadebe niile site na itinye uzuoku kemịkalụ, nkwadebe nke mkpuchi silicon carbide na-eme ka ọ dị mfe nke ukwuu, a na-emekwa ka arụmọrụ zuru oke nke nozzle ahụ sie ike.

Ndị nchọpụta ahụ tụrụ aro ụzọ isi mee ka matrix sie ike ma kpuchie elu nke tube nduzi graphite maka czohr monocrystal silicon. E ji mkpuchi ahịhịa ma ọ bụ usoro mkpuchi fesa kpuchie slurry silicon carbide e nwetara n'elu tube nduzi graphite ahụ nke nwere ọkpụrụkpụ mkpuchi nke 30 ~ 50 μm, wee tinye ya n'ime ọkụ ọkụ dị elu maka mmeghachi omume n'ime ebe ahụ, okpomọkụ mmeghachi omume ahụ bụ 1850 ~ 2300 ℃, nchekwa okpomọkụ ahụ dịkwa awa 2 ~ 6. Enwere ike iji oyi akwa mpụta SiC mee ihe n'ime ọkụ kristal na-eto eto nke dị sentimita 24 (60.96 cm), okpomọkụ ojiji ya bụ 1500 ℃, a chọpụtakwara na ọ dịghị ntụ ntụ na-agbawa agbawa na-ada n'elu silinda nduzi graphite mgbe awa 1500 gachara.

1.3 Ọganihu ngwa na nyocha na silinda mkpuchi

Dịka otu n'ime ihe ndị dị mkpa na sistemụ ebe okpomọkụ silicon monocrystalline, a na-ejikarị silinda mkpuchi eme ihe iji belata mfu okpomọkụ ma chịkwaa ọnọdụ okpomọkụ nke gburugburu ebe okpomọkụ. Dịka akụkụ na-akwado oyi akwa mkpuchi mgbidi dị n'ime nke otu kristal oven, nchara silinda na-eduga na mbelata na mgbawa nke ngwaahịa ahụ, nke na-emesịa na-eduga na ọdịda ngwaahịa.

Iji mee ka iguzogide nchara silicon nke tube mkpuchi ihe mejupụtara C/C-sic dịkwuo mma, ndị nchọpụta tinyere ngwaahịa tube mkpuchi ihe mejupụtara C/C-sic a kwadebere n'ime ọkụ kemịkalụ nke na-eme ka ikuku dị ọcha, wee kwadebe mkpuchi silicon carbide dị nkọ n'elu ngwaahịa tube mkpuchi ihe mejupụtara C/C-sic site na usoro nchekwa anwụrụ kemịkalụ. Nsonaazụ ya na-egosi na, Usoro a nwere ike igbochi nchara carbon nke ọma na isi nke ngwakọta C/C-sic site na ikuku silicon, a na-amụbakwa iguzogide nchara nke ikuku silicon site na ugboro ise ruo iri ma e jiri ya tụnyere ngwakọta carbon/carbon, a na-emekwa ka ndụ ọrụ nke silinda mkpuchi na nchekwa nke gburugburu ebe obibi okpomọkụ ka mma nke ukwuu.

2. Mmechi na atụmanya

Mkpuchi silicon carbideA na-ejikarị ya eme ihe n'ihe gbasara ikuku carbon/carbon n'ihi na ọ na-eguzogide oxidation dị mma n'oge okpomọkụ dị elu. Ka ọnụọgụgụ ihe ndị e ji carbon/carbon thermal field mee na-abawanye, otu esi eme ka mkpuchi silicon carbide dị n'elu ihe ndị e ji thermal field mee ka ọ dịkwuo mma ma melite ndụ ọrụ nke ihe ndị e ji thermal field mee ka carbon/carbon dị mma aghọwo nsogbu dị mkpa a ga-edozi.

N'aka nke ọzọ, site na mmepe nke ụlọ ọrụ silicon monocrystalline, ọchịchọ maka ihe dị elu nke carbon/carbon thermal field field na-amụbakwa, a na-etolitekwa nanofibers SiC na eriri carbon dị n'ime n'oge mmeghachi omume ahụ. Ọnụego ablation oke na ablation linear nke ngwakọta C/ C-ZRC na C/ C-sic ZrC nke nnwale kwadebere bụ -0.32 mg/s na 2.57 μm/s, n'otu n'otu. Ọnụego ablation oke na ahịrị nke ngwakọta C/ C-sic -ZrC bụ -0.24mg/s na 1.66 μm/s, n'otu n'otu. Ngwakọta C/ C-ZRC nwere nanofibers SiC nwere njirimara ablation ka mma. Mgbe e mesịrị, a ga-amụ banyere mmetụta nke isi mmalite carbon dị iche iche na uto nke nanofibers SiC na usoro nke nanofibers SiC na-eme ka njirimara ablation nke ngwakọta C/ C-ZRC sikwuo ike.

E ji usoro ikuku kemịkalụ na mmeghachi omume dị n'ime ya kwadebe ihe mkpuchi carbon/carbon mejupụtara ya. Ihe mkpuchi ahụ bụ mkpuchi silicon carbide (100~300μm), mkpuchi silicon (10~20μm) na mkpuchi silicon nitride (50~100μm), nke nwere ike igbochi ire ere nke silicon n'elu ime nke carbon/carbon composite crucible. N'ime usoro mmepụta ahụ, mfu nke ihe mkpuchi carbon/carbon composite covered bụ 0.04 mm kwa ọkụ, ndụ ọrụ ahụ nwekwara ike iru ugboro ọkụ 180.