1 Ngwa na ọganihu nyocha nke mkpuchi silicon carbide na ihe ọkụkụ carbon / carbon thermal
1.1 Ngwa na ọganihu nyocha na nkwadebe crucible
Na otu kristal thermal ubi, nacarbon/carbon cruciblea na-ejikarị dị ka ụgbọ mmiri na-ebu maka ihe silicon ma na-akpọtụrụ yaquartz crucible, dị ka egosiri na Figure 2. Igwe ọkụ na-arụ ọrụ nke carbon / carbon crucible bụ ihe dịka 1450 ℃, bụ nke a na-edozi okpukpu abụọ nke silicon siri ike (silicon dioxide) na vapor silicon, na n'ikpeazụ, crucible na-aghọ ihe dị nro ma ọ bụ nwee mgbanaka mgbanaka, na-akpata ọdịda nke crucible.
A kwadebere ihe mkpuchi ihe mejupụtara carbon/carbon composite crucible site na usoro ikuku vapor na mmeghachi omume n'ime ọnọdụ. Ihe mkpuchi ahụ mejupụtara bụ mkpuchi silicon carbide (100 ~ 300μm), mkpuchi silicon (10 ~ 20μm) na mkpuchi silicon nitride (50 ~ 100μm), nke nwere ike igbochi corrosion nke silicon vapor n'ime elu nke carbon / carbon composite crucible. Na usoro mmepụta, mfu nke ihe mkpuchi carbon / carbon composite crucible bụ 0.04 mm kwa ọkụ, na ndụ ọrụ nwere ike iru 180 ọkụ ugboro.
Ndị nyocha ahụ jiri usoro mmeghachi omume kemịkalụ mepụta mkpuchi mkpuchi silicon carbide edo edo n'elu ikuku carbon / carbon composite crucible n'okpuru ọnọdụ ọnọdụ okpomọkụ yana nchebe nke gas na-ebu, na-eji silicon dioxide na silicon metal dị ka akụrụngwa n'ime ọkụ na-ekpo ọkụ na-ekpo ọkụ. Nsonaazụ na-egosi na ọgwụgwọ okpomọkụ dị elu ọ bụghị nanị na-eme ka ịdị ọcha na ike nke mkpuchi sic dịkwuo mma, ma na-eme ka ọ dịkwuo mma nkwụsị nke elu nke carbon / carbon composite, ma na-egbochi corrosion nke elu nke crucible site na SiO vapor na ikuku oxygen na-agbanwe agbanwe na ọkụ silicon monocrystal. Ndụ ọrụ nke crucible na-abawanye site na 20% ma e jiri ya tụnyere nke crucible na-enweghị mkpuchi sic.
1.2 Ngwa na ọganihu nyocha na tube nduzi na-asọpụta
Silinda ntụzịaka dị n'elu crucible (dị ka egosiri na eserese 1). N'ime usoro ịdọrọ kristal, ọdịiche dị n'etiti okpomọkụ dị n'ime na n'èzí ubi dị ukwuu, karịsịa n'elu ala dị nso na ihe silicon a wụrụ awụ, okpomọkụ dị elu, na corrosion site na silicon vapor bụ ihe kasị njọ.
Ndị na-eme nchọpụta chepụtara usoro dị mfe na ezigbo nguzogide oxidation nke ndu tube mgbochi oxidation mkpuchi na usoro nkwadebe. Mbụ, a oyi akwa nke silicon carbide whisker nọ na-na-site na-eto na matriks nke ndu tube, na mgbe ahụ, a ok silicon carbide elu oyi akwa a kwadebere, nke mere na a SiCw mgbanwe oyi akwa e kpụrụ n'etiti matriks na ok silicon carbide elu oyi akwa, dị ka e gosiri na Figure 3. Ọnụọgụ nke thermal mgbasa dị n'etiti matrix na silicon carbide. Ọ nwere ike belata nrụgide okpomọkụ nke ọma site na ndakọrịta nke ọnụọgụ mgbasawanye thermal.
Nyocha ahụ na-egosi na mmụba nke ọdịnaya SiCw, nha na ọnụ ọgụgụ nke mgbawa na mkpuchi na-ebelata. Mgbe 10h oxidation na 1100 ℃ ikuku, arọ ọnwụ ọnụego nke mkpuchi sample bụ naanị 0.87% ~ 8.87%, na oxidation eguzogide na thermal ujo iguzogide nke silicon carbide mkpuchi na-ukwuu mma. A na-emecha usoro nkwadebe ahụ niile site na ntinye kemịkalụ kemịkalụ, nkwadebe nke mkpuchi silicon carbide na-adị mfe nke ukwuu, na arụmọrụ zuru oke nke nozzle dum na-ewusi ike.
Ndị nchọpụta ahụ tụrụ aro usoro nke ike matriks ike na mkpuchi elu nke tube nduzi graphite maka czohr monocrystal silicon. The enwetara silicon carbide slurry e uniformly ntekwasa n'elu nke graphite ndu tube na mkpuchi ọkpụrụkpụ nke 30 ~ 50 μm site ahịhịa mkpuchi ma ọ bụ ịgba mkpuchi usoro, na mgbe ahụ, enịm ke akwa okpomọkụ ọkụ maka in-n'ọnọdụ mmeghachi omume, mmeghachi omume okpomọkụ bụ 1850 ~ 2300 ℃, na okpomọkụ nchekwa bụ 2 ~ 6h. Enwere ike iji akwa oyi akwa SiC mee ihe na 24 in (60.96 cm) otu ọkụ na-eto kristal, na ojiji okpomọkụ bụ 1500 ℃, a chọpụtakwara na ọ dịghị cracking na ọdịda ntụ ntụ n'elu nke graphite ndu cylinder mgbe 1500h.
1.3 Ngwa na ọganihu nyocha na mkpuchi mkpuchi cylinder
Dị ka otu n'ime isi akụkụ nke monocrystalline silicon thermal field system, a na-ejikarị cylinder mkpuchi mee ihe iji belata ọnwụ okpomọkụ ma na-achịkwa gradient okpomọkụ nke gburugburu ebe okpomọkụ. Dị ka akụkụ na-akwado nke ime mgbidi mkpuchi oyi akwa nke otu ọkụ kristal, silicon vapor corrosion na-eduga na nkwụsịtụ slag na mgbawa nke ngwaahịa, nke na-emecha na-eduga ná ọdịda ngwaahịa.
Iji nwetakwuo nkwalite silicon vapor corrosion resistance nke C / C-sic composite insulation tube, ndị na-eme nchọpụta na-etinye ngwaahịa C / C-sic mejupụtara mkpuchi tube a kwadebere n'ime ọkụ ikuku mmeghachi omume kemịkalụ, ma kwadebere mkpuchi mkpuchi silicon carbide n'elu C / C-sic composite insulation tube ngwaahịa site na usoro ntinye mmiri mmiri. Nsonaazụ na-egosi na, Usoro ahụ nwere ike igbochi corrosion nke carbon fiber na isi nke C / C-sic composite site na silicon vapor, na nguzogide corrosion nke silicon vapor na-abawanye site na 5 ruo ugboro 10 ma e jiri ya tụnyere carbon / carbon composite, na ndụ ọrụ nke mkpuchi mkpuchi cylinder na nchekwa nke gburugburu ebe obibi okpomọkụ na-emewanyewanye nke ọma.
2.Mkpebi na atụmanya
Ihe mkpuchi silicon carbidea na-ejikarị eme ihe na carbon/carbon thermal ubi ihe n'ihi na nke magburu onwe oxidation iguzogide na elu okpomọkụ. N'ịba ụba nke carbon / carbon thermal field ihe eji na monocrystalline silicon mmepụta, otu esi emeziwanye otu ihe mkpuchi silicon carbide n'elu ihe ndị na-ekpo ọkụ ọkụ ma melite ọrụ ndụ nke carbon / carbon thermal field ihe aghọwo nsogbu dị ngwa a ga-edozi.
N'aka nke ọzọ, na mmepe nke ụlọ ọrụ silicon monocrystalline, ọchịchọ maka ihe ọkụkụ dị ọcha nke carbon / carbon thermal na-abawanye, na SiC nanofibers na-etolitekwa na eriri carbon dị n'ime n'oge mmeghachi omume. Ọnụọgụ oke na ọnụ ọgụgụ ablation nke C/C-ZRC na C/C-sic ZrC mejupụtara ndị a kwadebere site na nnwale bụ -0.32 mg/s na 2.57 μm/s, n'otu n'otu. Ọnụọgụ oke na ahịrị ablation nke C/C-sic-ZrC mejupụtara bụ -0.24mg/s na 1.66 μm/s, n'otu n'otu. Ngwakọta C/C-ZRC nwere SiC nanofibers nwere ihe mgbochi ka mma. Mgbe e mesịrị, a ga-amụ mmetụta nke ihe dị iche iche carbon dị iche iche na uto nke SiC nanofibers na usoro nke SiC nanofibers na-eme ka ihe ndị na-emepụta ihe nke C/C-ZRC dị ike.
A kwadebere ihe mkpuchi ihe mejupụtara carbon/carbon composite crucible site na usoro ikuku vapor na mmeghachi omume n'ime ọnọdụ. Ihe mkpuchi ahụ mejupụtara bụ mkpuchi silicon carbide (100 ~ 300μm), mkpuchi silicon (10 ~ 20μm) na mkpuchi silicon nitride (50 ~ 100μm), nke nwere ike igbochi corrosion nke silicon vapor n'ime elu nke carbon / carbon composite crucible. Na usoro mmepụta, mfu nke ihe mkpuchi carbon / carbon composite crucible bụ 0.04 mm kwa ọkụ, na ndụ ọrụ nwere ike iru 180 ọkụ ugboro.
Oge nzipu: Feb-22-2024