Pamene kupanga ma semiconductor kukusintha kukhala ma geometries ang'onoang'ono a zida, kuchuluka kwa ma wafer throughput, komanso miyezo yokhwima yowongolera kuipitsidwa, zida zokonzera kutentha zikukumana ndi mavuto osaneneka aukadaulo. Njira monga LPCVD, kutentha kwa okosijeni, kufalikira kwa dopant, ndi kutentha kwambiri tsopano zimafuna osati kutentha kofanana kokha, komanso nthawi yayitali yogwira ntchito ya zida, kupanga tinthu tating'onoting'ono kochepa, komanso kubwerezabwereza bwino kwa njira.
Ngakhale kuti nthawi zambiri imanyalanyazidwa poyerekeza ndi mpweya wopangidwa, machubu a ng'anjo, kapena mankhwala osungiramo zinthu, chogwirira cha cantilever chimatsimikizira momwe ma wafer amachitira zinthu m'malo otentha kwambiri. M'zinthu zambiri zamakono, sichimaonedwanso ngati chinthu chosavuta kugwiritsa ntchito, koma m'malo mwake chimaonedwa ngati chinthu chofunikira kwambiri chothandizira kukonza ma semiconductor okhazikika komanso obwerezabwereza.
Kodi SiC Cantilever Paddle ndi chiyani?
SiC Cantilever Paddle ndi gawo la kapangidwe ka silicon carbide loyera kwambiri lomwe limagwiritsidwa ntchito makamaka mu uvuni wa semiconductor diffusion ndi machitidwe a LPCVD. Nthawi zambiri limapangidwa ngati kapangidwe katali ka cantilever komwe kamatha kuthandizira maboti a quartz kapena SiC wafer panthawi yokonza kutentha kwambiri.
Chigawochi nthawi zambiri chimapangidwa pogwiritsa ntchito:
● silicon carbide yopangidwanso (RSiC)
● silicon carbide yopangidwa ndi nthunzi ya mankhwala (CVD SiC)
● zipangizo za SiC zolumikizidwa ndi mphamvu zambiri
Malinga ndi deta yofalitsidwa ndi CoorsTek ndi Saint-Gobain Performance Ceramics, zipangizo za SiC zoyera kwambiri nthawi zambiri zimasonyeza:
● Kutentha kwa mpweya: pafupifupi 120–200 W/m·K kutentha kwa chipinda
● Kutentha kwakukulu kogwira ntchito mumlengalenga wopanda mpweya: pamwamba pa 1600°C.
● Koyefifiti ya kukulitsa kutentha (CTE): pafupifupi 4.0–4.5×10⁻⁶/K.
● Kukana bwino kwambiri HCl, NH₃, O₂, ndi mankhwala a chlorine.
Udindo wa SiC Cantilever Paddle mu LPCVD Processing
Pakati pa ntchito zonse, makina a LPCVD ndi amodzi mwa machitidwe ofunikira kwambiri ogwiritsira ntchito SiC Cantilever Paddles.
Njira monga:
● Kuyika kwa polysilicon.
● silicon nitride (Si₃N₄).
● Kuyika kwa oxide wochepa mphamvu.
Kawirikawiri amagwira ntchito pakati pa 500°C ndi 900°C, nthawi zambiri pansi pa nthawi yayitali ya ntchito komanso malo omwe mankhwala amagwirira ntchito kwambiri.
Mkati mwa machitidwe awa, chogwirira cha cantilever chimagwira ntchito zingapo zofunika nthawi imodzi.
Choyamba, imapereka mayendedwe okhazikika a makina oyendera maboti oyenda pansi omwe amalowa ndi kutuluka mu chubu cha uvuni. Chifukwa chakuti ng'anjo zamakono zoyima zimatha kunyamula ma wafer mazana ambiri pa gulu lililonse, ngakhale kusintha pang'ono kwa paddle kungayambitse kusalingana kwa ma wafer, mtunda wosakhazikika, kapena kusungunuka kwa mphamvu ya makina.
Chachiwiri, chopondera chimagwira ntchito yofunika kwambiri pakugwirizana kwa kutentha. Kuchuluka kwa kutentha kwa SiC kumalola kutentha kufalikira mofanana motsatira kapangidwe kothandizira, kuchepetsa kutentha komwe kungakhudze kufanana kwa malo.
Chachitatu, kupanga tinthu tating'onoting'ono kochepa n'kofunika kwambiri. Tinthu ta semiconductor timapha mwachindunji, makamaka pakupanga zinthu za semiconductor zamphamvu komanso zamakono. Chifukwa cha kapangidwe kake kolimba ka ceramic komanso kukana dzimbiri, SiC yoyera kwambiri imachepetsa kwambiri chiopsezo cha kutayika kwa tinthu poyerekeza ndi zipangizo zachikhalidwe.
Mu mizere yapamwamba yopanga ya LPCVD, kukhazikika kwa nthawi yayitali kwa paddle kumakhudza mwachindunji:
● Kugwirizana kwa makulidwe a filimu.
● kubwerezabwereza kwa wafer kupita ku wafer.
● nthawi yogwira ntchito mu ng'anjo.
Ningbo VET Energy imagwira ntchito kwambiri ndi graphite yapamwamba, silicon carbide ceramics, ndi zigawo za semiconductor zopangidwa ndi CVD zomwe zimapangidwa kuti zigwiritsidwe ntchito popanga zinthu za semiconductor.
Zogulitsa za Core semiconductor zikuphatikizapo:
● SiC Cantilever Paddle
● SiC Coated Graphite Susceptor
● Chonyamulira Chophimbidwa ndi SiC
● Zigawo Zophimbidwa ndi SiC Zokhala ndi Halfmoon
● Zopangira Zopangira Zopangira Mpweya ndi Mpweya
● Chovala Chofewa cha Graphite & Chovala Cholimba cha Graphite
Zinthu zimenezi zimagwiritsidwa ntchito kwambiri mu:
● Machitidwe a Epitaxy
● Ma reactor a LPCVD
● Zitofu zofalitsira
● Machitidwe okulitsa makristalo a SiC
● Zipangizo zoyeretsera kutentha kwambiri.
Chifukwa cha kukula kwachangu kwa SiC ndi kupanga ma semiconductor amphamvu kwambiri, kufunikira kwa zida za ng'anjo zoyera kwambiri komanso zokhazikika kwambiri kudzapitirira kukula. Pachifukwa ichi, ukadaulo wa SiC Cantilever Paddle udzakhalabe chimodzi mwa zinthu zoyambira zothandizira kukonza ma semiconductor a m'badwo wotsatira.
Nthawi yotumizira: Meyi-14-2026