Te ahunga whakamua o te tono me te rangahau o te paninga SiC i roto i ngā rauemi mara wera waro/waro mō te silicon-2 monocrystalline

1 Te tono me te ahunga whakamua o te rangahau i te paninga silicon carbide i roto i ngā rauemi waro/waro wera

1.1 Te ahunga whakamua o te tono me te rangahau i roto i te whakarite ipu para

I roto i te mara wera tioata kotahi, ko teipu waro/waroe whakamahia ana hei oko kawe mō ngā rauemi silicon, ā, e pā ana ki teoko whakarewa kuata, e whakaaturia ana i te Pikitia 2. Ko te pāmahana mahi o te oko waro/waro he tata ki te 1450℃, ka pāngia e te mimiti rua o te silicon totoka (te hauhā silicon) me te kohu silicon, ā, i te mutunga ka angiangi te oko, ka pakaru rānei he mowhiti, ka pakaru te oko.

I hangaia he ipu whakarewa waro/waro paninga hiato mā te tukanga whakaurunga kohu matū me te tauhohenga ā-roto. I titoa te paninga hiato ki te paninga silicon carbide (100~300μm), te paninga silicon (10~20μm) me te paninga silicon nitride (50~100μm), ka taea te aukati i te waikura o te kohu silicon i runga i te mata o roto o te ipu whakarewa waro/waro. I roto i te tukanga whakaputa, ko te ngaronga o te ipu whakarewa waro/waro paninga hiato he 0.04 mm ia oumu, ā, ka taea e te roanga mahi te eke ki te 180 ngā wā oumu.

I whakamahia e ngā kairangahau tētahi tikanga tauhohenga matū hei whakaputa i tētahi paninga silicon carbide ōrite ki runga i te mata o te oko whakarewa waro/waro i raro i ētahi āhuatanga pāmahana me te tiaki i te hau kawe, mā te whakamahi i te silicon dioxide me te konganuku silicon hei rauemi mata i roto i te oumu whakamahana pāmahana teitei. E whakaatu ana ngā hua kāore te maimoatanga pāmahana teitei e whakapai ake i te parakore me te kaha o te paninga sic, engari ka tino whakapai ake hoki i te ātete kakahu o te mata o te whakakotahitanga waro/waro, ā, ka ārai i te waikura o te mata o te oko whakarewa e te kohu SiO me ngā ngota hāora hurihuri i roto i te oumu silicon kotahi-kiriata. Ka piki ake te roa o te mahi o te oko whakarewa mā te 20% ki te whakataurite ki te oko whakarewa kāore he paninga sic.

1.2 Te ahunga whakamua o te tono me te rangahau i roto i te ngongo arataki rere

Kei runga ake i te oko whakarewa te rango ārahi (e whakaaturia ana i te Pikitia 1). I roto i te tukanga kukume tioata, he nui te rerekētanga pāmahana i waenganui i roto me waho o te mara, inā koa ko te mata o raro e tata ana ki te rauemi silicon rewa, ko te pāmahana teitei rawa atu, ā, ko te waikura e te kohu silicon te mea tino kino.

I hangaia e ngā kairangahau tētahi tukanga māmā me te ātete pai ki te waikura o te ngongo arataki, me te tikanga whakarite. Tuatahi, i whakatōkia he paparanga o te ūkui silicon carbide ki runga i te matihiko o te ngongo arataki, kātahi ka whakaritea he paparanga o waho silicon carbide matotoru, kia hangaia he paparanga whakawhiti SiCw i waenganui i te matihiko me te paparanga mata silicon carbide matotoru, e whakaaturia ana i te Pikitia 3. Ko te tauwehenga o te whakawhānui wera i waenganui i te matihiko me te silicon carbide. Ka taea e ia te whakaiti i te ahotea wera i puta mai i te kore taurite o te tauwehenga whakawhānui wera.

E whakaatu ana te tātaritanga, me te pikinga ake o te ihirangi SiCw, ka heke te rahi me te maha o ngā kapiti i roto i te paninga. I muri i te 10 hāora o te waikura i roto i te hau 1100 ℃, ko te tere whakaheke taumaha o te tauira paninga he 0.87% ~ 8.87% noa iho, ā, kua tino pai ake te ātete waikura me te ātete ru wera o te paninga silicon carbide. Ka oti tonu te tukanga whakarite katoa mā te whakatakotoranga kohu matū, ka tino māmā ake te whakarite i te paninga silicon carbide, ā, ka kaha ake te mahi whānui o te pūwero katoa.

I whakaarohia e ngā kairangahau tētahi tikanga whakapakari matihiko me te paninga mata o te ngongo arataki karāhe mō te silicon monocrystal czohr. Ko te paru silicon carbide i whiwhihia i pania ōrite ki te mata o te ngongo arataki karāhe me te matotoru o te paninga o te 30~50 μm mā te paninga paraihe, te paninga rehu rānei, kātahi ka whakanohoia ki roto i te oumu pāmahana teitei mō te tauhohenga in-situ, ko te pāmahana tauhohenga he 1850~2300 ℃, ā, ko te tiaki wera he 2~6h. Ka taea te whakamahi i te paparanga o waho SiC i roto i te oumu tipu tioata kotahi 24 inihi (60.96 cm), ā, ko te pāmahana whakamahinga he 1500 ℃, ā, i kitea kāore he paura pakaru me te hinga i runga i te mata o te rango arataki karāhe i muri i te 1500h.

1.3 Te ahunga whakamua o te tono me te rangahau i roto i te rango whakamātao

Hei tētahi o ngā wāhanga matua o te pūnaha mara wera silicon monocrystalline, ko te rango whakamarumaru te mea matua e whakamahia ana hei whakaiti i te ngaronga wera me te whakahaere i te pikinga pāmahana o te taiao mara wera. Hei wāhanga tautoko o te paparanga whakamarumaru pakitara o roto o te oumu karaihe kotahi, ka hua te waikura o te kohu silicon ki te maturuturunga o te para me te ngatata o te hua, ā, ka mutu, ka rahua te hua.

Hei whakapakari ake i te ātete ki te waikura o te ngongo whakamahana hiato C/C-sic i te kohu silicon, i whakanohoia e ngā kairangahau ngā hua ngongo whakamahana hiato C/C-sic kua whakaritea ki roto i te oumu tauhohenga kohu matū, ā, i pania te mata o ngā hua ngongo whakamahana hiato C/C-sic mā te tukanga whakatakoto kohu matū ki runga i te mata. E whakaatu ana ngā hua, ka taea e te tukanga te aukati i te waikura o te muka waro i runga i te pūtake o te hiato C/C-sic e te kohu silicon, ā, ka piki ake te ātete ki te waikura o te kohu silicon mā te 5 ki te 10 ngā wā ki te whakataurite ki te hiato waro/waro, ā, ka tino pai ake te roa o te ora o te rango whakamahana me te haumaru o te taiao wera.

2. Whakatau me te tirohanga

Paninga karawiti siliconKei te whānui haere te whakamahinga i roto i ngā rauemi mara wera waro/waro nā tōna ātete pai ki te waikura i te pāmahana teitei. I te piki haere o te rahi o ngā rauemi mara wera waro/waro e whakamahia ana i roto i te hanga silicon monocrystalline, me pēhea te whakapai ake i te ōritetanga o te paninga silicon carbide i runga i te mata o ngā rauemi mara wera me te whakapai ake i te roa o te mahi o ngā rauemi mara wera waro/waro kua noho hei raruraru nui hei whakatau.

I tētahi atu taha, me te whanaketanga o te umanga silicon monocrystalline, kei te piki haere hoki te hiahia mō ngā rauemi mara wera waro/waro parakore teitei, ā, ka whakatipuhia hoki ngā muka nano SiC ki runga i ngā muka waro o roto i te wā o te tauhohenga. Ko ngā tere tango papatipu me te tango raina o ngā hiato C/C-ZRC me C/C-sic ZrC i whakaritea e ngā whakamātautau he -0.32 mg/s me te 2.57 μm/s, ia. Ko ngā tere tango papatipu me te tango raina o ngā hiato C/C-sic -ZrC he -0.24mg/s me te 1.66 μm/s, ia. He pai ake ngā āhuatanga tango o ngā hiato C/C-ZRC me ngā muka nano SiC. Ā muri ake nei, ka akohia ngā pānga o ngā pūtake waro rerekē ki te tipu o ngā muka nano SiC me te tikanga o ngā muka nano SiC e whakapakari ana i ngā āhuatanga tango o ngā hiato C/C-ZRC.

I hangaia he ipu whakarewa waro/waro paninga hiato mā te tukanga whakaurunga kohu matū me te tauhohenga ā-roto. I titoa te paninga hiato ki te paninga silicon carbide (100~300μm), te paninga silicon (10~20μm) me te paninga silicon nitride (50~100μm), ka taea te aukati i te waikura o te kohu silicon i runga i te mata o roto o te ipu whakarewa waro/waro. I roto i te tukanga whakaputa, ko te ngaronga o te ipu whakarewa waro/waro paninga hiato he 0.04 mm ia oumu, ā, ka taea e te roanga mahi te eke ki te 180 ngā wā oumu.