Gushyira mubikorwa no gukora ubushakashatsi kubikorwa bya SiC mububiko bwa karubone / karubone ibikoresho byumuriro wa monocrystalline silicon-2

1 Gushyira hamwe nubushakashatsi iterambere rya silicon karbide itwikiriye ibikoresho bya karubone / karubone

1.1 Gushyira mubikorwa no gukora ubushakashatsi mugutegura gukomeye

Muri kristu imwe ya kirisiti yumuriro, ikarubone / karuboneikoreshwa cyane nkibikoresho bitwara ibikoresho bya silicon kandi bihuza naQuartz.

Ikomatanyirizo rya karubone / karubone ikomatanya yateguwe nuburyo bwo gutumura imyuka ya chimique hamwe na reaction. Ipitingi igizwe na karubide ya silicon (100 ~ 300μm), silikoni (10 ~ 20μm) hamwe na nitride ya silicon (50 ~ 100μm), ishobora kubuza kwangirika kwumwuka wumuyaga wa silikoni hejuru yimbere ya karubone / karubone ikomatanya. Mubikorwa byo kubyaza umusaruro, igihombo cya karubone / karubone ikomatanyirijwe hamwe ni 0,04 mm kuri buri ziko, kandi ubuzima bwa serivisi bushobora kugera ku ziko 180.

Abashakashatsi bifashishije uburyo bwa reaction ya chimique kugirango babone karbide imwe ya silikoni itwikiriye hejuru yubuso bwa karubone / karubone ifatika mugihe cyubushyuhe bumwe na bumwe no kurinda gaze yabatwara, bakoresheje dioxyde ya silicon nicyuma cya silicon nkibikoresho fatizo mu itanura ryubushyuhe bwo hejuru. Ibisubizo byerekana ko kuvura ubushyuhe bwo hejuru bidatezimbere gusa nububasha nimbaraga za sic coating, ahubwo binatezimbere cyane kwihanganira imyambarire yubuso bwa karubone / karubone, kandi bikarinda kwangirika kwubuso bwumusemburo wa SiO hamwe na atome ya ogisijeni ihindagurika mumatanura ya silikoni ya monocrystal. Ubuzima bwa serivisi bwibyingenzi bwiyongereyeho 20% ugereranije nubwa ngombwa nta sic coating.

1.2 Gushyira mubikorwa no gukora ubushakashatsi mubyerekezo byayobora

Imiyoboro ya silinderi iherereye hejuru yingenzi (nkuko bigaragara ku gishushanyo 1). Mubikorwa byo gukurura kristu, itandukaniro ryubushyuhe hagati yimbere ninyuma yumurima ni rinini, cyane cyane hejuru yo hepfo yegereye ibikoresho bya silikoni yashongeshejwe, ubushyuhe nibwinshi, kandi kwangirika kwumuyaga wa silicon nicyo gikomeye cyane.

Abashakashatsi bavumbuye inzira yoroshye hamwe no kurwanya okiside nziza yo kuyobora imiyoboro ya anti-okiside hamwe nuburyo bwo gutegura. Ubwa mbere, igice cya silicon carbide whisker cyari mu mwanya wahinzwe kuri matrix yumuyoboro uyobora, hanyuma hategurwa urwego rwinyuma rwa silicon karbide yo hanze, ku buryo hashyizweho urwego rwinzibacyuho rwa SiCw hagati ya matrix na karbide yuzuye ya silikoni, nkuko bigaragara ku gishushanyo cya 3. Coefficient yo kwagura ubushyuhe yari hagati ya matrix na karubide. Irashobora kugabanya neza guhangayikishwa nubushyuhe buterwa no kudahuza kwaguka kwinshi.

Isesengura ryerekana ko hamwe no kwiyongera kwibirimo bya SiCw, ingano n'umubare w'uduce twa coating bigabanuka. Nyuma ya okiside ya 10h mumyuka 1100 ℃, igipimo cyo kugabanya ibiro byurugero rwikigereranyo ni 0.87% ~ 8.87% gusa, kandi kurwanya okiside hamwe no guhangana nubushyuhe bwumuriro wa silikoni ya karubide iratera imbere cyane. Igikorwa cyose cyo kwitegura kirangizwa ubudahwema no gushiramo imyuka ya chimique, gutegura karubide ya silicon karbide byoroshe cyane, kandi imikorere yuzuye ya nozzle irashimangirwa.

Abashakashatsi batanze uburyo bwo gushimangira matrix no gutwikira hejuru ya grafite yo kuyobora imiyoboro ya czohr monocrystal silicon. Silicon carbide slurry yabonetse yashizwe kumurongo umwe hejuru yigitereko cyogushushanya cya grafite hamwe nuburinganire bwa 30 ~ 50 mkm ukoresheje uburyo bwo gutwika brush cyangwa uburyo bwo gutera spray, hanyuma bigashyirwa mu itanura ryubushyuhe bwo hejuru kugirango habeho reaction, ubushyuhe bwa reaction bwari 1850 ~ 2300 and, naho kubika ubushyuhe byari 2 ~ 6h. Igice cyo hanze cya SiC gishobora gukoreshwa muri 24 muri (60,96 cm) itanura imwe yo gukura kwa kirisiti, kandi ubushyuhe bwo gukoresha ni 1500 ℃, kandi ugasanga nta poro yamenetse kandi igwa hejuru yubushakashatsi bwa grafite nyuma ya 1500h.

1.3 Gushyira mubikorwa no gukora ubushakashatsi muri silinderi

Nka kimwe mu bintu by'ingenzi bigize sisitemu yo mu murima wa monocrystalline silicon, silinderi ikoreshwa mu kugabanya cyane gutakaza ubushyuhe no kugenzura ubushyuhe bw’ubushyuhe bw’ibidukikije. Nkigice gishyigikira urukuta rwimbere rwurururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururururizumizdaya (silicon vapor corrosion) rutera kugabanuka no gucika kw'ibicuruzwa, amaherezo biganisha ku kunanirwa kw'ibicuruzwa.

Mu rwego rwo kurushaho kunoza imyuka ya silicon irwanya ruswa ya C / C-sic composite insulation insulation, abashakashatsi bashyize ibicuruzwa byateguwe na C / C-sic composite insulation insuline mu itanura ry’imyuka ya chimique, banategura karbide yuzuye ya silikoni yuzuye hejuru y’ibicuruzwa bya C / C-sic. Ibisubizo byerekana ko, Inzira irashobora guhagarika neza kwangirika kwa fibre ya karubone yibanze ya C / C-sic ikomatanya nu mwuka wa silicon, kandi kurwanya ruswa ya parike ya silicon yiyongereyeho inshuro 5 kugeza ku 10 ugereranije na karubone / karubone, kandi ubuzima bwa serivisi bwa silinderi y’umutekano hamwe n’umutekano w’ibidukikije by’umuriro biratera imbere cyane.

2.Umwanzuro n'ibyiringiro

Silicon carbide coatingni byinshi kandi bikoreshwa cyane mubikoresho bya karubone / karubone yumuriro kubera imbaraga za okiside nziza cyane mubushyuhe bwinshi. Hamwe nubunini bwibikoresho bya carbone / carbone yumuriro bikoreshwa mu musaruro wa silikoni ya monocrystalline, uburyo bwo kunoza uburinganire bwa karubide ya silikoni itwikiriye hejuru y’ibikoresho byo mu murima no kuzamura ubuzima bwa serivisi y’ibikoresho bya karuboni / karubone byabaye ikibazo cyihutirwa gukemurwa.

Ku rundi ruhande, hamwe n’iterambere ry’inganda za silikoni ya monocrystalline, icyifuzo cy’ibikoresho byo mu murima wa karuboni / karubone zifite isuku nyinshi nacyo kiriyongera, kandi nanofibers ya SiC nayo ikura kuri fibre yimbere ya karubone mugihe cyo kubyitwaramo. Igipimo rusange cyo gukuraho no kugereranya umurongo wa C / C-ZRC na C / C-sic ZrC ibihimbano byateguwe nubushakashatsi ni -0.32 mg / s na 2.57 μ m / s. Igipimo cya misa n'umurongo wa C / C-sic -ZrC igizwe ni -0.24mg / s na 1,66 μ m / s. C / C-ZRC igizwe na SiC nanofibers ifite ibyiza byo gukuraho. Nyuma, ingaruka zamasoko atandukanye ya karubone kumikurire ya SiC nanofibers hamwe nuburyo bwa SiC nanofibers ishimangira imiterere yo gukuraho ibintu bya C / C-ZRC bizigwa.

Ikomatanyirizo rya karubone / karubone ikomatanya yateguwe nuburyo bwo gutumura imyuka ya chimique hamwe na reaction. Ipitingi igizwe na karubide ya silicon (100 ~ 300μm), silikoni (10 ~ 20μm) hamwe na nitride ya silicon (50 ~ 100μm), ishobora kubuza kwangirika kwumwuka wumuyaga wa silikoni hejuru yimbere ya karubone / karubone ikomatanya. Mubikorwa byo kubyaza umusaruro, igihombo cya karubone / karubone ikomatanyirijwe hamwe ni 0,04 mm kuri buri ziko, kandi ubuzima bwa serivisi bushobora kugera ku ziko 180.