Gịnị bụ mkpuchi TaC?

N'ime ụlọ ọrụ semiconductor na-agbanwe ngwa ngwa, ihe ndị na-eme ka arụmọrụ, ogologo oge, na arụmọrụ dịkwuo mma dị oke mkpa. Otu n'ime ihe ọhụrụ ndị a bụ mkpuchi Tantalum Carbide (TaC), oyi akwa nchebe kachasị elu nke etinyere na ihe mejupụtara graphite. Blọọgụ a na-enyocha nkọwa mkpuchi TaC, uru teknụzụ, na ngwa mgbanwe ya na mmepụta semiconductor.

Ⅰ. Gịnị bụ mkpuchi TaC?

Mkpuchi TaC bụ akwa seramiiki dị elu nke e ji tantalum carbide (ihe mejupụtara tantalum na carbon) nke a na-etinye n'elu graphite. A na-ejikarị usoro Chemical Vapor Deposition (CVD) ma ọ bụ Physical Vapor Deposition (PVD) eme ihe mkpuchi a, na-emepụta ihe mgbochi dị oke njọ nke na-echebe graphite pụọ na ọnọdụ dị oke njọ.

Njirimara dị mkpa nke mkpuchi TaC

●Ịkwụsi Ike n'Okpomọkụ Dị Elu: Ọ na-anagide okpomọkụ karịrị 2200°C, na-arụ ọrụ karịa ihe ọdịnala dịka silicon carbide (SiC), nke na-ebelata ihe karịrị 1600°C.

●Nguzogide Kemịkalụ: Na-eguzogide nchara sitere na hydrogen (H₂), ammonia (NH₃), uzuoku silicon, na ọla agbaze agbaze, dị oke mkpa maka gburugburu nhazi semiconductor.

●Ọcha Dị Elu nke Ukwuu: Ọkwa adịghị ọcha dị n'okpuru 5 ppm, na-ebelata ihe egwu mmetọ na usoro uto kristal.

●Ogologo Oge Okpomọkụ na Mechanical: Nrapado siri ike na graphite, obere mgbasawanye okpomọkụ (6.3×10⁻⁶/K), na ike siri ike (~2000 HK) na-eme ka ndụ dị ogologo n'okpuru usoro okpomọkụ.

Ⅱ. Mkpuchi TaC na Mmepụta Semiconductor: Ngwa Ndị Dị Mkpa

Ihe mejupụtara graphite e ji TaC kpuchie dị oke mkpa na mmepụta semiconductor dị elu, ọkachasị maka ngwaọrụ silicon carbide (SiC) na gallium nitride (GaN). N'okpuru ebe a bụ okwu dị mkpa ha ji eme ihe:

1. SiC Otu Crystal Uto

A na-eji wafer SiC dị mkpa maka ngwa eletrọniki ike na ụgbọ ala eletrik. A na-eji ihe mkpuchi graphite na susceptors nke TaC kpuchie na sistemụ Physical Vapor Transport (PVT) na sistemụ CVD dị elu (HT-CVD) iji:

● Na-ebelata mmetọ: Ọdịnaya adịghị ọcha nke TaC dị ala (dịka ọmụmaatụ, boron <0.01 ppm vs. 1 ppm na graphite) na-ebelata ntụpọ na kristal SiC, na-eme ka iguzogide wafer dịkwuo mma (4.5 ohm-cm vs. 0.1 ohm-cm maka graphite a na-ekpuchighị ekpuchi).

● Mee ka Njikwa Okpomọkụ Ka Mma: Njupụta otu otu (0.3 na 1000°C) na-eme ka nkesa okpomọkụ na-aga n'ihu, na-eme ka ịdị mma kristal dịkwuo mma.

2. Uto Epitaxial (GaN/SiC)

N'ime ihe ndị na-emepụta ihe na-emepụta ihe na-emepụta ígwè (Metal-Organic CVD (MOCVD), ihe ndị e ji TaC kpuchie dịka ihe ndị na-ebu wafer na ihe ndị na-etinye n'ime ya:

●Gbochie Mmeghachi Omume Gas: Ọ na-eguzogide ammonia na hydrogen na okpomọkụ 1400°C, na-ejigide iguzosi ike n'ezi ihe nke reactor.

●Melite Mmepụta: Site na ibelata mmịpụta nke ihe ndị dị na graphite, mkpuchi CVD TaC na-ebelata ntụpọ dị na oyi akwa epitaxial, nke dị oke mkpa maka LEDs na ngwaọrụ RF nwere arụmọrụ dị elu.

3. Ngwa Semiconductor Ndị Ọzọ

●Ihe ndị na-eme ka okpomọkụ dị elu: Ihe ndị na-egbochi ihe na ihe na-ekpo ọkụ na mmepụta GaN na-erite uru site na nkwụsi ike nke TaC na gburugburu ebe jupụtara na hydrogen.

●Njikwa WaferIhe ndị e ji kpuchie ekpuchi dịka mgbaaka na mkpuchi na-ebelata mmetọ ígwè n'oge mbufe wafer

Ⅲ. Gịnị mere mkpuchi TaC ji arụ ọrụ karịa nhọrọ ndị ọzọ?

Ntụnyere ya na ihe ndị e ji eme ihe na-eme ka TaC dị elu:

Data sitere na ntụnyere ụlọ ọrụ

IV. Gịnị mere ị ga-eji họrọ onye na-agwọ ọrịa anụmanụ (VET)?

Mgbe etinyechara ego na nyocha na mmepe teknụzụ mgbe niile,VETAkụkụ e ji Tantalum carbide (TaC) kpuchie, dịkaMgbaaka nduzi graphite nke TaC kpuchie, Ihe na-egbochi efere mkpuchi CVD TaC, Ihe mkpuchi TaC maka ngwa Epitaxy,Ihe e ji graphite nke nwere porous kpuchie Tantalum carbidenaIhe na-egbochi Wafer nwere mkpuchi TaC, ha na-ewu ewu nke ukwuu n'ahịa Yuropu na Amerịka. VET na-atụ anya ịghọ onye mmekọ gị ogologo oge.