Kodi njira ya BCD ndi chiyani?
Njira ya BCD ndi ukadaulo wophatikiza njira imodzi womwe unayambitsidwa koyamba ndi ST mu 1986. Ukadaulo uwu ukhoza kupanga zida za bipolar, CMOS ndi DMOS pa chip imodzi. Mawonekedwe ake amachepetsa kwambiri dera la chip.
Tinganene kuti njira ya BCD imagwiritsa ntchito bwino ubwino wa Bipolar driver capacity, CMOS high integration ndi kuchepa kwa mphamvu, komanso DMOS high voltage ndi high current flow capacity. Pakati pawo, DMOS ndiye chinsinsi chokweza mphamvu ndi kuphatikizana. Ndi chitukuko chowonjezereka cha ukadaulo wolumikizirana, njira ya BCD yakhala ukadaulo waukulu wopanga wa PMIC.
Chithunzi cha BCD process cross-sectional, source network, zikomo
Ubwino wa njira ya BCD
Njira ya BCD imapanga zida za Bipolar, zida za CMOS, ndi zida zamphamvu za DMOS pa chip imodzi nthawi imodzi, kuphatikiza transconductance yayikulu ndi mphamvu yoyendetsa katundu wamphamvu ya zida za bipolar komanso kuphatikiza kwakukulu ndi kugwiritsa ntchito mphamvu zochepa kwa CMOS, kuti athe kuthandizana ndikupatsa zabwino zawo zonse; nthawi yomweyo, DMOS imatha kugwira ntchito mu switching mode yokhala ndi mphamvu zochepa kwambiri. Mwachidule, kugwiritsa ntchito mphamvu zochepa, kugwiritsa ntchito mphamvu zambiri komanso kuphatikiza kwakukulu ndi chimodzi mwazabwino zazikulu za BCD. Njira ya BCD imatha kuchepetsa kwambiri kugwiritsa ntchito mphamvu, kukonza magwiridwe antchito a dongosolo komanso kukhala ndi kudalirika kwabwino. Ntchito zamagetsi zamagetsi zikuwonjezeka tsiku ndi tsiku, ndipo zofunikira pakusintha kwa magetsi, kuteteza capacitor ndi kuwonjezera moyo wa batri zikukhala zofunika kwambiri. Makhalidwe othamanga kwambiri komanso osunga mphamvu a BCD amakwaniritsa zofunikira za njira zama chips owongolera mphamvu za analog/power.
Ukadaulo wofunikira wa njira ya BCD
Zipangizo zomwe zimagwiritsidwa ntchito pa BCD zimaphatikizapo CMOS yamagetsi otsika, machubu a MOS amphamvu kwambiri, ma LDMOS okhala ndi ma voltage osiyanasiyana owonongeka, ma vertical NPN/PNP ndi ma Schottky diode, ndi zina zotero. Njira zina zimaphatikizanso zida monga JFET ndi EEPROM, zomwe zimapangitsa kuti pakhale mitundu yosiyanasiyana ya zida mu BCD. Chifukwa chake, kuwonjezera pa kuganizira momwe zida zamagetsi amphamvu ndi zida zamagetsi otsika zimagwirizanirana, njira zodina kawiri ndi njira za CMOS, ndi zina zotero. pakupanga, ukadaulo woyenera wodzipatula uyeneranso kuganiziridwa.
Mu ukadaulo wa BCD wodzipatula, ukadaulo wambiri monga kudzipatula kwa junction, kudzipatula ndi kudzipatula kwa dielectric watulukira umodzi pambuyo pa wina. Ukadaulo wa junction wodzipatula ndi wopanga chipangizochi pa gawo la N-type epitaxial la substrate ya P-type ndikugwiritsa ntchito mawonekedwe a reverse bias a junction ya PN kuti akwaniritse kudzipatula, chifukwa PN junction ili ndi kukana kwakukulu pansi pa reverse bias.
Ukadaulo wodzipatula kwenikweni ndi kudzipatula kwa PN junction, komwe kumadalira mawonekedwe achilengedwe a PN junction pakati pa madera oyambira ndi otaya madzi a chipangizocho ndi substrate kuti akwaniritse kudzipatula. Pamene chubu cha MOS chayatsidwa, dera loyambira, dera lotaya madzi ndi njira zimazunguliridwa ndi dera lotaya madzi, ndikupanga kudzipatula kuchokera ku substrate. Ikazimitsidwa, kulumikizana kwa PN pakati pa dera lotaya madzi ndi substrate kumakhala kozungulira, ndipo mphamvu yamagetsi ya dera loyambira imasiyanitsidwa ndi dera lotaya madzi.
Kudzipatula kwa magetsi pogwiritsa ntchito zinthu zotetezera kutentha monga silicon oxide kuti zitheke kudzipatula. Kutengera kudzipatula kwa magetsi pogwiritsa ntchito magetsi ndi magetsi, kudzipatula kwa magetsi pogwiritsa ntchito magetsi kwapangidwa mwa kuphatikiza ubwino wa zonse ziwiri. Mwa kugwiritsa ntchito ukadaulo wodzipatula womwe uli pamwambapa, kugwirizana kwa magetsi amphamvu ndi otsika kumatha kuchitika.
Malangizo a chitukuko cha njira ya BCD
Kukula kwa ukadaulo wa njira ya BCD sikufanana ndi njira ya CMOS yokhazikika, yomwe nthawi zonse yakhala ikutsatira lamulo la Moore loti ikule motsatira m'lifupi mwa mzere wocheperako komanso liwiro lofulumira. Njira ya BCD imasiyanitsidwa pang'ono ndikupangidwa m'mbali zitatu: mphamvu yamagetsi yapamwamba, mphamvu yamagetsi yayikulu, ndi kuchuluka kwamagetsi kwakukulu.
1. Malangizo a BCD amphamvu kwambiri
BCD yamagetsi amphamvu kwambiri imatha kupanga ma circuit olamulira otsika mphamvu kwambiri komanso ma circuit a DMOS okwera mphamvu kwambiri pa chip imodzi nthawi imodzi, ndipo imatha kupanga zida zamagetsi amphamvu za 500-700V. Komabe, nthawi zambiri, BCD imagwirabe ntchito pazinthu zomwe zimafunikira kwambiri pazida zamagetsi, makamaka BJT kapena zida za DMOS zamagetsi amphamvu kwambiri, ndipo ingagwiritsidwe ntchito powongolera mphamvu pamagetsi amagetsi ndi mafakitale.
Ukadaulo wamakono wopanga BCD yamagetsi amphamvu ndi ukadaulo wa RESURF womwe unaperekedwa ndi Appel et al. mu 1979. Chipangizochi chimapangidwa pogwiritsa ntchito gawo lochepa la epitaxial kuti chigawidwe chamagetsi cha pamwamba chikhale chosalala, motero chimawongolera mawonekedwe a kusweka kwa pamwamba, kotero kuti kusweka kumachitika m'thupi m'malo mwa pamwamba, motero kuwonjezera mphamvu ya chipangizocho. Kuchepetsa mphamvu yamagetsi ndi njira ina yowonjezera mphamvu yamagetsi ya BCD. Imagwiritsa ntchito makamaka DDD yothira madzi kawiri (double Doping Drain) ndi LDD yothira madzi pang'ono (lightly Doping Drain). Mu dera la kutsekereza madzi la DMOS, dera la kutsetsereka kwa mtundu wa N limawonjezedwa kuti lisinthe kukhudzana koyambirira pakati pa kutsekereza madzi kwa N+ ndi substrate ya mtundu wa P kukhala kukhudzana pakati pa kutsekereza madzi kwa N ndi substrate ya mtundu wa P, motero kumawonjezera mphamvu ya kusweka.
2. Malangizo a BCD amphamvu kwambiri
Mphamvu yamagetsi ya BCD yamphamvu kwambiri ndi 40-90V, ndipo imagwiritsidwa ntchito kwambiri mu zamagetsi zamagalimoto zomwe zimafuna mphamvu yoyendetsa yamagetsi yamphamvu kwambiri, mphamvu yamagetsi yapakatikati ndi ma circuit osavuta owongolera. Makhalidwe ake ofunikira ndi mphamvu yoyendetsa yamagetsi yamphamvu kwambiri, mphamvu yamagetsi yapakatikati, ndipo nthawi zambiri magetsi owongolera amakhala osavuta.
3. Kuwongolera kwa BCD yochuluka kwambiri
BCD yokhala ndi kuchuluka kwakukulu, kuchuluka kwa magetsi ndi 5-50V, ndipo zamagetsi zina zamagalimoto zimafika 70V. Ntchito zovuta komanso zosiyanasiyana zitha kuphatikizidwa pa chip imodzi. BCD yokhala ndi kuchuluka kwakukulu imagwiritsa ntchito malingaliro ena opanga modular kuti ikwaniritse kusiyanasiyana kwa zinthu, makamaka zomwe zimagwiritsidwa ntchito pakugwiritsa ntchito zamagetsi zamagalimoto.
Ntchito zazikulu za BCD
Njira ya BCD imagwiritsidwa ntchito kwambiri pakuwongolera mphamvu (kulamulira mphamvu ndi batri), kuyendetsa kowonetsera, zamagetsi zamagalimoto, kulamulira mafakitale, ndi zina zotero. Chip yowongolera mphamvu (PMIC) ndi imodzi mwa mitundu yofunika kwambiri ya ma chips a analog. Kuphatikiza kwa njira ya BCD ndi ukadaulo wa SOI ndi gawo lalikulu pakukula kwa njira ya BCD.
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Nthawi yotumizira: Sep-18-2024