Maitiro eBCD

Chii chinonzi maitiro eBCD?

Maitiro eBCD itekinoroji yemaitiro akabatanidzwa ine chip imwe chete yakatanga kuunzwa neST muna 1986. Iyi tekinoroji inogona kugadzira zvishandiso zve bipolar, CMOS neDMOS pa chip imwe chete. Kuonekwa kwayo kunoderedza zvakanyanya nzvimbo ye chip.

Zvinogona kutaurwa kuti maitiro eBCD anoshandisa zvizere mabhenefiti eBipolar driving capacity, CMOS high integration uye low power using, uye DMOS high voltage uye high current flow capacity. Pakati pawo, DMOS ndiyo kiyi yekuvandudza simba nekubatanidzwa. Nekuvandudzwa kuri kuitwa tekinoroji ye integrated circuit, maitiro eBCD ave tekinoroji huru yekugadzira yePMIC.

Dhayagiramu yeBCD process cross-sectional, source network, ndatenda

Mabhenefiti eBCD process

Maitiro eBCD anoita kuti michina yeBipolar, michina yeCMOS, uye michina yeDMOS ishande pachip imwe chete panguva imwe chete, zvichibatanidza kugona kwe transconductance yakakura uye simba guru rekutyaira kwemidziyo yebipolar uye kushandiswa kwakanyanya uye simba shoma kweCMOS, kuitira kuti zvikwanise kuzadzisana uye kupa mukana wakazara kune zvakanakira zvavo; panguva imwe chete, DMOS inogona kushanda mu switching mode nekushandiswa kwesimba shoma zvakanyanya. Muchidimbu, kushandiswa kwesimba shoma, kushanda nesimba kwakanyanya uye kubatanidzwa kwakanyanya ndeimwe yemabhenefiti makuru eBCD. Maitiro eBCD anogona kuderedza zvakanyanya kushandiswa kwesimba, kuvandudza mashandiro esystem uye kuve nekuvimbika kuri nani. Mabasa ezvigadzirwa zvemagetsi ari kuwedzera zuva nezuva, uye zvinodiwa zvekuchinja voltage, kudzivirira capacitor uye kuwedzera hupenyu hwebhatiri zviri kuramba zvichikosha. Hunhu hweBCD hwekukurumidza uye hwekuchengetedza simba hunosangana nezvinodiwa zvemaitiro echips cheanalog/power management chakakwirira.

Matekinoroji akakosha eBCD process

Midziyo yakajairika yeBCD process inosanganisira low-voltage CMOS, high-voltage MOS tubes, LDMOS ine ma voltage akasiyana-siyana ekupwanyika, vertical NPN/PNP uye Schottky diodes, nezvimwewo. Mamwe maitiro anobatanidzawo michina yakaita seJFET neEEPROM, zvichikonzera mhando dzakasiyana dzemidziyo muBCD process. Saka, pamusoro pekufunga nezvekushanda kwemidziyo ine high-voltage nemidziyo ine low-voltage, double-click processes neCMOS processes, nezvimwewo mukugadzira, tekinoroji yakakodzera yekuzviparadzanisa inofanirawo kufungwa nezvayo.

Mu tekinoroji yeBCD isolation, matekinoroji akawanda akadai sejunction isolation, self-isolation uye dielectric isolation akabuda imwe mushure meimwe. Tekinoroji yeJunction isolation ndeyekugadzira mudziyo paN-type epitaxial layer yeP-type substrate uye kushandisa reverse bias hunhu hwePN junction kuti uwane isolation, nekuti PN junction ine resistance yakanyanya pasi pe reverse bias.

Tekinoroji yekuzviparadzanisa inonyanya kushandiswa kwePN junction isolation, iyo inoenderana nemaitiro ePN junction pakati penzvimbo dzinobva nedzinodonhedza mvura dzemudziyo ne substrate kuti dzikwanise kuparadzaniswa. Kana chubhu yeMOS yabatidzwa, nzvimbo inobva, nzvimbo inodonhedza mvura nechiteshi zvinokomberedzwa nenzvimbo inodonhedza mvura, zvichiita kuparadzaniswa kubva pasita. Kana yadzimwa, PN junction pakati penzvimbo inodonhedza mvura ne substrate inenge yakatenderedzwa ne reverse, uye voltage yakakwira yenzvimbo inobva inoparadzaniswa nenzvimbo inodonhedza mvura.

Kupatsanurana kwemagetsi kunoshandisa nzira dzekudzivirira kupisa dzakadai sesilicon oxide kuti zvikwanise kupatsanurana. Zvichibva pakupatsanurana kwemagetsi uye kupatsanurana kwemagetsi, kupatsanurana kwemagetsi kwequasi-dielectric kwakagadzirwa nekubatanidza zvakanakira zvese zviri zviviri. Nekushandisa tekinoroji yekupatsanurana iri pamusoro, kuenderana kwemagetsi ane simba guru nemagetsi mashoma kunogona kuwanikwa.

Nzira yekuvandudza maitiro eBCD

Kuvandudzwa kwetekinoroji yeBCD process hakuna kufanana nemaitiro eCMOS akajairwa, ayo agara achitevera mutemo waMoore wekukura nenzira ine upamhi hudiki uye kumhanya nekukurumidza. Maitiro eBCD anosiyana uye anogadzirwa munzira nhatu: voltage yakakwira, simba rakawanda, uye density yakakwira.

1. Kutungamirirwa kweBCD ine simba guru

BCD ine voltage yepamusoro inogona kugadzira macircuit ekudzora ane voltage shoma uye macircuit eDMOS ane voltage yakawanda panguva imwe chete, uye inogona kugadzira zvishandiso zve500-700V zvine voltage yakawanda. Zvisinei, kazhinji, BCD ichiri yakakodzera zvigadzirwa zvine zvinodiwa zvakanyanya zvemidziyo yemagetsi, kunyanya BJT kana michina yeDMOS ine simba rakawanda, uye inogona kushandiswa kudzora simba mumagetsi emagetsi uye mashandisirwo emaindasitiri.

Tekinoroji iripo pari zvino yekugadzira BCD ine voltage yakawanda ndiyo tekinoroji yeRESURF yakakurudzirwa naAppel et al. muna 1979. Mudziyo uyu wakagadzirwa uchishandisa epitaxial layer ine doped lightly doped kuti iite kuti pamusoro pemagetsi emagetsi pave flatter, nokudaro zvichivandudza hunhu hwekupwanyika kwenzvimbo, kuitira kuti kupwanyika kuitike mumuviri panzvimbo pepamusoro, nokudaro zvichiwedzera voltage yekupwanyika kwemudziyo. Kupwanya chiedza ndeimwe nzira yekuwedzera voltage yekupwanyika kweBCD. Inonyanya kushandisa double diffused drain DDD (double Doping Drain) uye lightly doped drain LDD (lightly Doping Drain). Munharaunda yekupwanya mvura yeDMOS, nzvimbo yekupwanya mvura yeN-type inowedzerwa kuti ichinje kubatana kwekutanga pakati pemvura yeN+ neP-type substrate kuenda kukubatana pakati peN-drain neP-type substrate, nokudaro ichiwedzera voltage yekupwanyika.

2. Kutungamira kweBCD ine simba guru

Ma voltage eBCD ane simba guru i40-90V, uye anonyanya kushandiswa mumagetsi emotokari anoda kugona kutyaira kwemagetsi akawanda, voltage yepakati uye ma control circuits ari nyore. Hunhu hwayo hwekudiwa ndere kugona kutyaira kwemagetsi akawanda, voltage yepakati, uye control circuit inowanzo kuve nyore.

3. Kutungamira kweBCD kwakawanda

BCD ine huwandu hwakanyanya hwemagetsi, huwandu hwemagetsi i5-50V, uye mamwe magetsi emagetsi emotokari anosvika 70V. Mabasa akawanda akaomarara uye akasiyana-siyana anogona kubatanidzwa pane chip imwe chete. BCD ine huwandu hwakanyanya hwemagetsi inoshandisa mamwe mazano ekugadzira modular kuti iwane kusiyana kwezvigadzirwa, zvinonyanya kushandiswa mukushandisa magetsi emagetsi emotokari.

Mashandisirwo makuru eBCD process

Maitiro eBCD anoshandiswa zvakanyanya mukutonga kwesimba (simba nekutonga mabhatiri), display drive, mota dzemagetsi, industrial control, nezvimwewo. Chip yekutonga simba (PMIC) ndeimwe yemhando dzakakosha dzeanalog chips. Kusanganiswa kweBCD process neSOI technology chinhu chikuru mukuvandudzwa kweBCD process.

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