Bayan hakayumbuAn yi wa substrate siminti kuma an samar da shi, ana buƙatar a yi masa ƙarfe, sannan a yi tsarin saman ta hanyar canja wurin hoto don cimma aikin haɗin lantarki na substrate na yumbu. Ƙarfafa saman abu muhimmin mataki ne a cikin ƙera substrate na yumbu. Wannan saboda ikon jika ƙarfe zuwa saman yumbu a yanayin zafi mai yawa yana ƙayyade ƙarfin haɗin tsakanin ƙarfe da yumbu. Ƙarfin haɗin abu mai kyau muhimmin tabbaci ne don kwanciyar hankali na aikin marufi na LED. A halin yanzu, ana iya rarraba hanyoyin ƙarfe na gama gari akan saman yumbu zuwa nau'i da yawa, gami da hanyoyin ƙonawa tare (HTCC da LTCC), hanyar fim mai kauri (TFC), hanyar adana jan ƙarfe kai tsaye (DBC), hanyar adana aluminum kai tsaye (DBA), da hanyar fim mai siriri (DPC)
Hanyar Haɗa Harbi (HTCC/LTCC)
Akwai nau'ikan hanyoyin haɗa wuta guda biyu: ɗaya ita ce haɗa wuta mai zafi (HTCC), ɗayan kuma ita ce haɗa wuta mai zafi (LTCC). Tsarin aikin duka biyun iri ɗaya ne. Babban tsarin samarwa ya haɗa da shirya wuta mai zafi, jefawa da samar da tsiri, busar da jikin kore, haƙa ramuka, buga allo da cike ramuka, da'irar buga allo, yin layi da kuma yin sintering, da yankewa na ƙarshe da sauran hanyoyin bayan magani. Ana haɗa foda na alumina da abubuwan ɗaurewa na halitta don samar da slurry, sannan a sarrafa slurry ɗin zuwa zanen gado tare da gogewa. Bayan bushewa, ana samar da jikin kore na yumbu [10]. Sannan, bisa ga buƙatun ƙira, ana sarrafa ramuka ta cikin ramuka akan jikin kore kuma a cika da foda na ƙarfe. Ana shafa saman jikin kore da tsarin layi ta hanyar fasahar buga allo. A ƙarshe, ana tattara jikin kore na kowane layi kuma a matse su tare, sannan a yi sintering kuma a samar da su a cikin tanda mai haɗa wuta. Kodayake hanyoyin haɗa wuta guda biyu suna kama da juna, yanayin zafin sintering ya bambanta sosai. Zafin wutar lantarki na HTCC shine 1300 zuwa 1600℃, yayin da zafin wutar lantarki na LTCC shine 850 zuwa 900℃. Babban dalilin wannan bambanci shine gaskiyar cewa slurry na LTCC sintering yana ɗauke da kayan gilashi waɗanda zasu iya rage zafin wutar lantarki, waɗanda ba sa cikin slurry na HTCC co-fire. Kodayake kayan gilashi na iya rage zafin wutar lantarki, suna haifar da raguwa sosai a cikin yanayin zafi na substrate.
Yumbu Mai Kauri (TFC)
Hanyar fim mai kauri tana nufin tsarin kera inda ake shafa man shafawa kai tsaye a kan abin da aka yi da yumbu ta hanyar buga allo, sannan a manne layin ƙarfe da ƙarfi a kan abin da aka yi da yumbu ta hanyar yin sintering mai zafi. Zaɓin abin da aka yi da kauri mai sintering shine babban abin da ke ƙayyade tsarin fim mai kauri. Ya ƙunshi wani mataki mai aiki (watau, foda na ƙarfe mai girman barbashi ƙasa da 2μm), matakin ɗaurewa (mai ɗaurewa), da kuma mai ɗaukar kayan halitta. Foda na ƙarfe na yau da kullun sun haɗa da Au, Pt, Au/Pt, Au/Pd, Ag, Ag/Pt, Ag/Pd, Cu, Ni, Al da W, daga cikinsu Ag, Ag/Pd da Cu slurries sun fi yawa. Abin ɗaurewa gabaɗaya kayan gilashi ne, ƙarfe oxide ko cakuda duka biyun. Aikinsa shine haɗa yumbu da ƙarfe da kuma tantance mannewar abin da aka yi da kauri mai sintering zuwa yumbu na tushe. Shi ne mabuɗin samar da abin da aka yi da kauri mai sintering. Babban aikin mai ɗaukar kayan halitta shine ya wargaza matakin aiki da kuma matakin ɗaurewa, yayin da yake kiyaye ɗanɗanon fim mai kauri don shirya don bugawar allo na gaba. Zai yi rauni a hankali yayin aikin tacewa.
Tagulla Mai Haɗa Kai Tsaye (DBC)
DBC wata hanya ce ta ƙara ƙarfe don haɗa foil ɗin jan ƙarfe a saman yumbu (musamman Al2O3 da AlN). Wani sabon tsari ne da aka haɓaka tare da haɓakar fasahar marufi ta guntu akan Board (COB). Babban ƙa'idar ita ce a gabatar da abubuwan iskar oxygen tsakanin Cu da yumbu, sannan a samar da matakin ruwa na Cu/O eutectic a 1065 zuwa 1083℃. Wannan matakin zai yi aiki tare da matrix ɗin yumbu da foil ɗin jan ƙarfe don samar da CuAlO2 ko Cu(AlO2)2, kuma a ƙarƙashin aikin matakin matsakaici, foil ɗin jan ƙarfe yana haɗe da matrix. Tunda Al N na yumbu ne marasa oxide, mabuɗin rufin jan ƙarfe a samansa yana cikin ƙirƙirar Layer na sauyawa na Al2O3 a samansa, da kuma cimma haɗin kai mai inganci tsakanin foil ɗin jan ƙarfe da yumbu na tushe a ƙarƙashin aikin Layer na sauyawa.
An haɗa kai tsaye da Aluminum (DAB)
Hanyar rufe aluminum kai tsaye tana amfani da kyakkyawan juriyar aluminum zuwa yumbu a yanayin ruwa don cimma haɗin su biyun. Lokacin da zafin ya tashi sama da 660℃, ruwan aluminum mai ƙarfi yana shanyewa. Bayan ruwan aluminum ya jika saman yumbu, yayin da zafin ya faɗi, ƙwayoyin lu'ulu'u da aluminum ke bayarwa a kan saman yumbu suna shanyewa kuma suna girma. Lokacin da aka sanyaya zuwa zafin ɗaki, haɗin biyun yana samuwa. Saboda yawan amsawar aluminum, yana da saurin shanyewa a yanayin zafi mai yawa don samar da fim ɗin Al2O3 wanda ke wanzuwa a saman ruwan aluminum, wanda hakan ke rage yawan danshi na ruwan aluminum akan saman yumbu kuma yana sa haɗin ya yi wahala. Saboda haka, dole ne a cire shi kafin a haɗa shi ko kuma a yi haɗin a ƙarƙashin yanayin da ba shi da iskar oxygen. Peng Rong et al. [23,27] sun ɗauki hanyar graphite mold die-casting don yaɗa tsantsar aluminum mai narkewa akan saman substrate na Al2O3 da substrate na AlN a ƙarƙashin matsin lamba. Saboda rashin ruwa na fim ɗin Al2O3, ya kasance a cikin ramin mold. Bayan sanyaya, an sami wani abu mai kyau na DAB.
Tagulla Mai Rufi Kai Tsaye (DPC)
Hanyar fim mai siriri tsari ne da ke amfani da wurin ajiye tururi na zahiri (kamar evaporation na injin, magnetron sputtering, da sauransu) da sauran dabaru don samar da layin ƙarfe a saman yumbu, sannan kuma yana amfani da abin rufe fuska, etching da sauran ayyuka don samar da layin kewaye na ƙarfe. Daga cikinsu, wurin ajiye tururi na zahiri shine tsarin ƙera fim mai siriri da aka fi sani.
Lokacin Saƙo: Yuli-16-2025