Nyuma yaibumbaSubstrate iracukurwamo ikanakorwa, ubuso bwayo bugomba guhindurwamo icyuma, hanyuma imiterere y'ubuso igakorwa binyuze mu kwimura amashusho kugira ngo hagerwe ku mikorere y'amashanyarazi ya substrate ya ceramic. Gutunganya icyuma ku buso ni intambwe y'ingenzi mu gukora substrate za ceramic. Ibi biterwa nuko ubushobozi bw'ibyuma ku buso bwa ceramic ku bushyuhe bwinshi bugena imbaraga zo guhuza hagati y'ibyuma na ceramic. Imbaraga nziza zo guhuza ni garanti y'ingenzi ku mikorere myiza yo gupakira LED. Kuri ubu, uburyo busanzwe bwo guhuza icyuma ku buso bwa ceramic bushobora gushyirwa mu byiciro bitandukanye, harimo uburyo bwo gutwika hamwe (HTCC na LTCC), uburyo bwa thick film (TFC), uburyo bwo gushyiramo umuringa mu buryo butaziguye (DBC), uburyo bwo gushyiramo aluminium mu buryo butaziguye (DBA), n'uburyo bwa thin film (DPC)
Uburyo bwo gucurangira hamwe (HTCC/LTCC)
Hari ubwoko bubiri bw'uburyo bwo gucukura hamwe: bumwe ni ugucukura hamwe mu bushyuhe bwinshi (HTCC), ubundi ni ugucukura hamwe mu bushyuhe buke (LTCC). Uburyo bwo gukora byombi ni bumwe. Uburyo bw'ingenzi bwo gukora harimo gutegura ubushyuhe, gucukura no gukora imirongo, gukamura imibiri y'icyatsi kibisi, gucukura imyobo, gucapa no kuzuza imyobo, gucapa imiyobo, gushyiramo ibice no gucukura, hamwe no gukatamo ibice bya nyuma n'izindi nzira zo nyuma yo kuvura. Ifu ya alumina ivangwa n'ibikoresho byo gufunga by'umwimerere kugira ngo ikore ubushyuhe, hanyuma ubushyuhe bugatunganywa mu mpapuro hakoreshejwe icyuma gisya. Nyuma yo kuma, umubiri w'icyatsi kibisi ukorwa [10]. Hanyuma, hakurikijwe ibisabwa mu miterere, binyuze mu myobo bitunganywa ku mubiri w'icyatsi kibisi kandi byuzuzwa ifu y'icyuma. Ubuso bw'umubiri w'icyatsi kibisi butwikiriwe n'ikoranabuhanga ryo gucapa imiyoboro. Amaherezo, imibiri y'icyatsi kibisi ya buri cyiciro irashyirwa hamwe kandi igashyirwa hamwe, hanyuma igacukurwamo ikanakorwa mu itanura rihuza. Nubwo uburyo bwo gukora ubu buryo bubiri bwo gucukura hamwe ari bumwe, ubushyuhe bwo gucukura butandukanye cyane. Ubushyuhe bwo gushyushya hamwe kuri HTCC ni hagati ya 1300 na 1600℃, mu gihe ubushyuhe bwo gushyushya hagati ya LTCC ari hagati ya 850 na 900℃. Impamvu nyamukuru y'iri tandukaniro ni uko LTCC ikoresha LTCC irimo ibikoresho by'ibirahure bishobora kugabanya ubushyuhe bwo gushyushya, bitaboneka mu ruganda rwa HTCC rukoresha LTCC. Nubwo ibikoresho by'ibirahure bishobora kugabanya ubushyuhe bwo gushyushya, bituma ubushyuhe bugabanuka cyane.
Filimi nini ya Ceramic (TFC)
Uburyo bwo gukora filime nini buvuga inzira yo gukora aho icyuma gipfuka ku gikoresho cya ceramic hakoreshejwe icapiro rya ecran, hanyuma urwego rw'icyuma rugafata neza icyuma cya ceramic binyuze mu gushyushya ubushyuhe bwinshi. Guhitamo icyuma gipfuka icyuma ni ikintu cy'ingenzi mu kugena inzira ya filime nini. Kigizwe n'icyiciro cy'imikorere (ni ukuvuga ifu y'icyuma ifite ingano y'uduce turi munsi ya 2μm), icyuma gipfuka icyuma (igipfuka icyuma), n'icyuma gitwara ibinyabuzima. Ifu isanzwe y'icyuma irimo Au, Pt, Au/Pt, Au/Pd, Ag, Ag/Pt, Ag/Pd, Cu, Ni, Al na W, muri zo Ag, Ag/Pd na Cu slurry ni byo bikunze kugaragara. Igipfuka icyuma muri rusange ni ibikoresho by'ikirahure, okiside y'icyuma cyangwa uruvange rwa byombi. Inshingano yacyo ni uguhuza ceramic n'icyuma no kumenya uburyo icyuma gipfuka icyuma kinini gifatana na ceramic y'ibanze. Ni ingenzi mu gukora icyuma gipfuka icyuma kinini. Akamaro k'ingenzi k'icyuma gitwara ibintu kinyabuzima ni ugukwirakwiza igice cy'imikorere n'igice cy'ibifunga, ariko kigakomeza kugira ubukana runaka bw'urutare rw'icyuma kinini kugira ngo bitegure icapiro rikurikiraho. Bizagenda bihindagurika buhoro buhoro mu gihe cyo gutwika.
Umuringa uhambiriye ku buryo butaziguye (DBC)
DBC ni uburyo bwo guhuza icyuma mu guhuza icyuma cy'umuringa ku buso bwa ceramic (cyane cyane Al2O3 na AlN). Ni inzira nshya yatewe n'ikoranabuhanga ryo gupakira chip on Board (COB). Ihame ry'ibanze ni ukwinjiza ibintu bya ogisijeni hagati ya Cu na ceramic, hanyuma hagakorwa Cu/O eutectic liquid phase kuri 1065 kugeza 1083℃. Iki cyiciro gihita gikorana na ceramic matrix na aluminium foil kugira ngo hakorwe CuAlO2 cyangwa Cu(AlO2)2, kandi munsi y'igikorwa cy'igice cyo hagati, aluminium foil ifatanye na aluminium. Kubera ko Al N ari iya ceramics zitari oxide, ingenzi ku gusiga umuringa ku buso bwayo ni ukurema urwego rw'impinduka rwa Al2O3 ku buso bwayo, no kugera ku guhuza neza hagati ya aluminium foil na ceramic y'ibanze munsi y'igikorwa cy'urwego rw'impinduka.
Aluminium Ifatanye mu buryo butaziguye (DAB)
Uburyo bwo gusiga aluminiyumu butaziguye bukoresha uburyo aluminiyumu itose neza ku bimera biri mu mazi kugira ngo bugere ku guhuza kw'ibimera byombi. Iyo ubushyuhe burenze dogere 660, aluminiyumu ikomeye irashonga. Nyuma y'uko aluminiyumu y'amazi itose ku buso bwa aluminiyumu, uko ubushyuhe bugabanuka, urusobe rwa kristu rutangwa na aluminiyumu iri ku buso bwa aluminiyumu rurakomera kandi rurakura. Iyo ikonjeshejwe kugeza ku bushyuhe bw'icyumba, guhuza kw'ibi byombi biragerwaho. Bitewe n'uburyo aluminiyumu ikora cyane, ikunze kumera nk'iy'ubushyuhe bwinshi kugira ngo ikore filime ya Al2O3 iri ku buso bw'amazi ya aluminiyumu, bigabanya cyane ubushobozi bw'amazi ya aluminiyumu ku buso bwa aluminiyumu kandi bigatuma guhuza bigorana kugerwaho. Kubwibyo, igomba gukurwaho mbere yo guhuza cyangwa guhuza bigomba gukorwa mu gihe nta mwuka urimo. Peng Rong n'abandi [23,27] bakoresheje uburyo bwo gusuka icyuma cya grafiti mu gukwirakwiza aluminiyumu ishongeshejwe ku buso bwa Al2O3 na AlN ku buso munsi y'umuvuduko. Kubera ko filime ya Al2O3 idafite amazi, yagumye mu mwobo w'ibimera. Nyuma yo gukonjesha, habonetse substrate ya DAB ifatanye neza.
Umuringa Uzinze (DPC)
Uburyo bwa "thin-film" ni uburyo bukoresha cyane cyane uburyo bwo gushyira umwuka mu buryo bufatika (nk'uburyo bwo gusohora umwuka mu buryo butunguranye, gukoresha magnetron sputtering, nibindi) hamwe n'ubundi buryo bwo gukora urwego rw'icyuma ku buso bwa ceramic, hanyuma hagakoreshwa uburyo bwo gupfuka, gushushanya n'ubundi buryo bwo gukora urwego rw'icyuma. Muri ubwo buryo, gushyira umwuka mu buryo bufatika ni bwo buryo bukunze gukoreshwa mu gukora urwego rw'icyuma.
Igihe cyo kohereza: Nyakanga-16-2025