I muri i teukuKa whakakorikoria te papa, ka hangaia, me whakakorikori tōna mata, kātahi ka hangaia te tauira mata mā te whakawhiti whakaahua hei whakatutuki i te mahi hononga hiko o te papa uku. He taahiraa nui te whakakorikori mata i roto i te hanganga o ngā papa uku. Nā te mea ko te kaha mākū o ngā konganuku ki ngā mata uku i ngā pāmahana teitei ka whakatau i te kaha here i waenga i ngā konganuku me ngā uku. Ko te kaha here pai he taurangi nui mō te pumau o te mahi takai LED. I tēnei wā, ka taea te whakarōpū i ngā tikanga whakakorikori noa i runga i ngā mata uku ki ētahi momo, tae atu ki ngā tikanga tahu tahi (HTCC me LTCC), te tikanga kiriata matotoru (TFC), te tikanga whakatakotoranga parahi tika (DBC), te tikanga whakatakotoranga konumohe tika (DBA), me te tikanga kiriata angiangi (DPC).
Tikanga Whakakā Ngātahi (HTCC/LTCC)
E rua ngā momo tikanga tahu tahi: ko tētahi ko te tahu tahi pāmahana-teitei (HTCC), ā, ko tētahi ko te tahu tahi pāmahana-iti (LTCC). He rite tonu ngā rerenga tukanga o ngā mea e rua. Ko ngā rerenga tukanga whakaputa matua ko te whakarite paru, te whakarewa me te whakaputa rīpene, te whakamaroke i ngā tinana matomato, te keri i roto i ngā kōhao, te tā mata me te whakakī i ngā kōhao, ngā ara iahiko tā mata, te whakatakoto me te whakahinuhinu, me te tapatapahi whakamutunga me ētahi atu tukanga i muri i te maimoatanga. Ka konatunatua te paura alumina ki ngā here waro hei hanga paru, kātahi ka tukatukahia te paru hei rau me te waru. I muri i te maroke, ka hangaia he tinana matomato uku [10]. Kātahi, e ai ki ngā whakaritenga hoahoa, ka tukatukahia ngā kōhao mā roto i te tinana matomato ka whakakīia ki te paura whakarewa. Ka pania te mata o te tinana matomato ki te tauira rārangi mā te hangarau tā mata. Hei whakamutunga, ka whakarārangihia ngā tinana matomato o ia paparanga ka pēhia ngātahi, kātahi ka whakahinuhinuhia ka hangaia ki roto i te oumu tahu tahi. Ahakoa he rite tonu ngā tukanga o ngā tikanga tahu tahi e rua, he rerekē rawa ngā pāmahana whakahinuhinu. Ko te pāmahana tahunga tahi mō te HTCC he 1300 ki te 1600℃, ko te pāmahana sintering mō te LTCC he 850 ki te 900℃. Ko te take matua mō tēnei rerekētanga kei roto i te meka kei roto i te paru sintering LTCC ngā rauemi karāhe ka taea te whakaheke i te pāmahana sintering, kāore i roto i te paru tahunga tahi HTCC. Ahakoa ka taea e ngā rauemi karāhe te whakaheke i te pāmahana sintering, ka arahi rātou ki te whakahekenga nui o te kawe wera o te papa.
Kiriata Matotoru Uku (TFC)
Ko te tikanga kiriata matotoru e pā ana ki te tukanga hanga e pania tika ana te whakapiri kawe ki runga i te papa uku mā te tā mata, kātahi ka piri pūmau te paparanga whakarewa ki te papa uku mā te whakamahana pāmahana teitei. Ko te whiriwhiri i te para kawe kiriata matotoru he mea nui ki te whakatau i te tukanga kiriata matotoru. He wāhanga mahi (arā, te paura whakarewa he iti iho i te 2μm te rahi o te matūriki), he wāhanga here (here), me te kaikawe waro. Ko ngā paura whakarewa noa ko te Au, Pt, Au/Pt, Au/Pd, Ag, Ag/Pt, Ag/Pd, Cu, Ni, Al me te W, ko ngā para Ag, Ag/Pd me te Cu ngā mea tino noa. Ko te here he mea karāhe, he waikura whakarewa, he ranunga rānei o ngā mea e rua. Ko tana mahi he hono i te uku me te whakarewa me te whakatau i te piri o te para kiriata matotoru ki te uku turanga. Koinei te mea nui ki te hanga para kiriata matotoru. Ko te mahi matua a te kaikawe rauropi he whakamarara i te wāhanga mahi me te wāhanga here, me te pupuri tonu i te matotoru o te paru kiriata matotoru hei whakarite mō te tānga mata e whai ake nei. Ka āta memeha haere i te wā e whakapūmau ana.
Parahi Herea Tika (DBC)
Ko te DBC he tikanga whakarewa mō te here i te pepa parahi ki runga i ngā mata uku (ko te nuinga ko te Al2O3 me te AlN). He tukanga hou tēnei i whakawhanakehia me te aranga ake o te hangarau takai maramara-ki-te-papa (COB). Ko te kaupapa matua ko te whakauru i ngā huānga hāora ki waenganui i te Cu me ngā uku, kātahi ka hanga he wāhanga wai Cu/O eutectic i te 1065 ki te 1083℃. Kātahi ka tauhohe tēnei wāhanga ki te matrix uku me te pepa parahi hei whakaputa i te CuAlO2, Cu(AlO2)2 rānei, ā, i raro i te mahi a te wāhanga waenga, ka herea te pepa parahi ki te matrix. Nā te mea no ngā uku kore-waikura te AlN, ko te mea nui ki te paninga parahi i runga i tōna mata ko te hanga i tētahi paparanga whakawhiti Al2O3 i runga i tōna mata, me te whakatutuki i te hononga whai hua i waenganui i te pepa parahi me te uku turanga i raro i te mahi a te paparanga whakawhiti.
Herea Konumohe Tika (DAB)
Ka whakamahia e te tikanga paninga konumohe tika te pai o te makuku o te konumohe ki ngā uku i roto i te āhua wai hei whakatutuki i te hononga o te rua. Ina piki te pāmahana ki runga ake i te 660℃, ka rewa te konumohe totoka. I muri i te makuku o te konumohe wai i te mata uku, i te hekenga o te pāmahana, ka tioata ngā karihi tioata e whakaratohia ana e te konumohe i runga i te mata uku, ka tipu. Ina whakamataohia ki te pāmahana rūma, ka tutuki te whakakotahitanga o te rua. Nā te kaha o te tauhohenga o te konumohe, ka ngāwari ki te waikura i ngā pāmahana teitei hei hanga i tētahi kiriata Al2O3 kei runga i te mata o te wai konumohe, ka whakaiti nui i te makuku o te wai konumohe i runga i te mata uku, ā, ka uaua te whakatutuki i te hononga. Nō reira, me tango i mua i te hononga, me mahi rānei te hononga i raro i ngā āhuatanga kore-hāora. I tangohia e Peng Rong et al. [23,27] te tikanga o te maka-mate pokepokea ai te karāhe hei hora i te konumohe rewa parakore ki runga i ngā mata o te papa Al2O3 me te papa AlN i raro i te pēhanga. Nā te kore o te rere o te kiriata Al2O3, i noho tonu i roto i te kōhao pokepokea ai. I muri i te whakamatao, i whiwhihia he papa DAB e piri pai ana.
Parahi Whakakikoruatia Tika (DPC)
Ko te tikanga kiriata angiangi he tukanga e whakamahi ana i te nuinga o te wā i te whakatakotoranga kohu ā-tinana (pēnei i te mimiti korehau, te pupuhi magnetron, me ētahi atu) me ētahi atu tikanga hei hanga i tētahi paparanga whakarewa ki runga i te mata o ngā uku, kātahi ka whakamahi i te hipoki, te whakairo me ētahi atu mahi hei hanga i tētahi paparanga ara iahiko whakarewa. I roto i ēnei, ko te whakatakotoranga kohu ā-tinana te tukanga hanga kiriata angiangi tino noa.
Wā tuku: Hurae-16-2025