Mkhalidwe ndi Kachitidwe ka Kafukufuku wa Metallization pa Malo Opangira Ceramic Substrate

Pambuyo pachoumbaGawo la pansi limasiyidwa ndikupangidwa, pamwamba pake pamafunika kupangidwa ndi chitsulo, kenako mawonekedwe a pamwamba amapangidwa kudzera mu kusamutsa chithunzi kuti akwaniritse kulumikizana kwamagetsi kwa gawo la pansi la ceramic. Kupangidwa kwa zitsulo pamwamba ndi gawo lofunika kwambiri popanga magawo a ceramic. Izi zili choncho chifukwa kuthekera konyowetsa zitsulo ku malo a ceramic pa kutentha kwakukulu kumatsimikiza mphamvu yolumikizira pakati pa zitsulo ndi zoumba. Mphamvu yabwino yolumikizira ndi chitsimikizo chofunikira cha kukhazikika kwa magwiridwe antchito a LED. Pakadali pano, njira zodziwika bwino zolumikizira zitsulo pamalo a ceramic zitha kugawidwa m'mitundu ingapo, kuphatikiza njira zoyatsira pamodzi (HTCC ndi LTCC), njira yothina ya filimu (TFC), njira yolunjika ya mkuwa (DBC), njira yolunjika ya aluminiyamu (DBA), ndi njira yothina ya filimu (DPC).

Njira Yogwirira Ntchito Pamodzi (HTCC/LTCC)

Pali mitundu iwiri ya njira zolumikizirana: imodzi ndi yolumikizirana kutentha kwambiri (HTCC), ndipo inayo ndi yolumikizirana kutentha kochepa (LTCC). Njira zonse ziwirizi ndi zofanana. Njira zazikulu zopangira zinthu zimaphatikizapo kukonzekera matope, kuponya ndi kupanga mizere, kuumitsa matupi obiriwira, kuboola mabowo, kusindikiza pazenera ndi mabowo odzaza, ma circuits osindikizira pazenera, kuyika ndi kusakaniza, ndi kudula komaliza ndi njira zina zochiritsira pambuyo pake. Ufa wa alumina umasakanizidwa ndi zomangira zachilengedwe kuti upange matope, kenako matopewo amakonzedwa kukhala mapepala ndi chokokera. Pambuyo pouma, thupi lobiriwira la ceramic limapangidwa [10]. Kenako, malinga ndi zofunikira pakupanga, kudzera m'mabowo amakonzedwa pa thupi lobiriwira ndikudzazidwa ndi ufa wachitsulo. Pamwamba pa thupi lobiriwira limakutidwa ndi mawonekedwe a mzere pogwiritsa ntchito ukadaulo wosindikiza pazenera. Pomaliza, matupi obiriwira a gawo lililonse amaunikidwa ndikukanikizidwa pamodzi, kenako amasunthidwa ndikupangidwa mu uvuni wolumikizirana. Ngakhale njira ziwiri zolumikizirana zimakhala zofanana, kutentha kwa sintering kumasiyana kwambiri. Kutentha kwa HTCC komwe kumayatsidwa ndi magetsi ndi 1300 mpaka 1600℃, pomwe kutentha kwa LTCC komwe kumayatsidwa ndi magetsi ndi 850 mpaka 900℃. Chifukwa chachikulu cha kusiyana kumeneku ndichakuti slurry ya LTCC yomwe imayatsidwa ndi magetsi ili ndi zinthu zagalasi zomwe zimatha kuchepetsa kutentha kwa sintering, zomwe sizipezeka mu slurry ya HTCC yomwe imayatsidwa ndi magetsi. Ngakhale kuti zinthu zagalasi zimatha kuchepetsa kutentha kwa sintering, zimapangitsa kuti kutentha kwa substrate kuchepe kwambiri.

Filimu Yokhuthala ya Ceramic (TFC)

Njira yothina ya filimu imatanthauza njira yopangira momwe phala loyendetsa limapakidwa mwachindunji pa ceramic substrate posindikiza pazenera, kenako wosanjikiza wachitsulo umamatiridwa mwamphamvu ku ceramic substrate kudzera mu kutentha kwambiri. Kusankha slurry ya thina-film conductor ndi chinthu chofunikira kwambiri podziwa njira yothina ya filimu. Imapangidwa ndi gawo logwira ntchito (monga, ufa wachitsulo wokhala ndi tinthu tating'onoting'ono tosakwana 2μm), gawo lomangirira (binder), ndi chonyamulira chachilengedwe. Ufa wamba wachitsulo umaphatikizapo Au, Pt, Au/Pt, Au/Pd, Ag, Ag/Pt, Ag/Pd, Cu, Ni, Al ndi W, pakati pawo Ag, Ag/Pd ndi Cu slurries ndizofala kwambiri. Binder nthawi zambiri imakhala galasi, chitsulo oxide kapena chisakanizo cha zonse ziwiri. Ntchito yake ndikulumikiza ceramic ndi chitsulo ndikudziwa kumatirira kwa slurry ya thina ya filimu ku base ceramic. Ndi chinsinsi chopangira slurry ya thina ya filimu. Ntchito yaikulu ya chonyamulira chachilengedwe ndikugawa gawo logwira ntchito ndi gawo lomangirira, pomwe ikusunga kukhuthala kwina kwa slurry yokhuthala ya filimu kuti ikonzekere kusindikiza kwa screen. Pang'onopang'ono idzasinthasintha panthawi ya ndondomeko yoyeretsera.

Mkuwa Wolumikizidwa Molunjika (DBC)

DBC ndi njira yopangira zitsulo zomangira zojambula zamkuwa pamalo a ceramic (makamaka Al2O3 ndi AlN). Ndi njira yatsopano yomwe idapangidwa ndi kukwera kwa ukadaulo wa chip on Board (COB). Mfundo yayikulu ndikuyika zinthu za okosijeni pakati pa Cu ndi ceramics, kenako ndikupanga gawo la Cu/O eutectic liquid pa 1065 mpaka 1083℃. Gawoli limakumananso ndi ceramic matrix ndi zojambula zamkuwa kuti lipange CuAlO2 kapena Cu(AlO2)2, ndipo pansi pa ntchito ya gawo lapakati, zojambula zamkuwa zimalumikizidwa ku matrix. Popeza Al N ndi ya zoumba zopanda oxide, chinsinsi cha utoto wamkuwa pamwamba pake chimakhala pakupanga gawo losinthira la Al2O3 pamwamba pake, ndikukwaniritsa mgwirizano wothandiza pakati pa zojambula zamkuwa ndi zoumba pansi pa ntchito ya gawo losinthira.

Aluminiyamu Yolumikizidwa Mwachindunji (DAB)

Njira yophikira aluminiyamu mwachindunji imagwiritsa ntchito mwayi wabwino wonyowa kwa aluminiyamu ku zinthu zadothi zomwe zili mu mkhalidwe wamadzimadzi kuti ikwaniritse mgwirizano wa ziwirizi. Kutentha kukakwera pamwamba pa 660℃, aluminiyamu yolimba imasungunuka. Aluminiyamu yamadzimadzi ikanyowetsa pamwamba pa ceramic, pamene kutentha kumatsika, ma nuclei a kristalo omwe amaperekedwa ndi aluminiyamu pamwamba pa ceramic amaundana ndikukula. Ikazizira kutentha kwa chipinda, kuphatikiza kwa ziwirizi kumachitika. Chifukwa cha reactivity yayikulu ya aluminiyamu, imakhala ndi oxidation pa kutentha kwakukulu kuti ipange filimu ya Al2O3 yomwe ilipo pamwamba pa madzi a aluminiyamu, zomwe zimachepetsa kwambiri kunyowa kwa madzi a aluminiyamu pamwamba pa ceramic ndikupangitsa kuti mgwirizanowo ukhale wovuta. Chifukwa chake, iyenera kuchotsedwa isanalumikizidwe kapena mgwirizanowo uyenera kuchitika pansi pa mikhalidwe yopanda mpweya. Peng Rong et al. [23,27] adagwiritsa ntchito njira ya graphite mold die-casting kuti ifalikire aluminiyamu yosungunuka bwino pamwamba pa Al2O3 substrate ndi AlN substrate pansi pa kupanikizika. Chifukwa cha kusowa kwa kusinthasintha kwa filimu ya Al2O3, idatsalira mu nkhungu. Pambuyo poziziritsa, gawo lolimba la DAB linapezeka.

Mkuwa Wowongoka Molunjika (DPC)

Njira yopyapyala ndi njira yomwe imagwiritsa ntchito kwambiri kuyika nthunzi yeniyeni (monga kupopera vacuum, magnetron sputtering, ndi zina zotero) ndi njira zina zopangira chitsulo pamwamba pa zoumba, kenako imagwiritsa ntchito chophimba, kupukuta ndi ntchito zina kuti ipange chitsulo. Pakati pawo, kuyika nthunzi yeniyeni ndiyo njira yodziwika kwambiri yopangira filimu yopyapyala.