Yayin da masana'antar semiconductor ke ci gaba zuwa ga ƙananan yanayin na'urori, yawan amfani da wafer, da kuma ƙa'idodin sarrafa gurɓatawa masu tsauri, kayan aikin sarrafa zafi suna fuskantar ƙalubalen injiniya da ba a taɓa gani ba. Tsarin aiki kamar LPCVD, iskar shaka ta thermal, yaɗuwar dopant, da kuma annealing mai zafi yanzu ba wai kawai yana buƙatar daidaiton zafin jiki mai ƙarfi ba, har ma da tsawon lokacin aiki na kayan aiki, ƙarancin samar da barbashi, da kuma ingantaccen maimaitawa na tsari.
Ko da yake sau da yawa ana yin watsi da shi idan aka kwatanta da iskar gas mai aiki, bututun tanderu, ko kuma sinadaran adanawa, babban abin da ke ƙayyade yadda wafers ke aiki a cikin yanayin zafi mai zafi. A cikin masana'antun da yawa na zamani, ba a sake ɗaukarsa a matsayin abu mai sauƙi da za a iya amfani da shi ba, amma a maimakon haka babban abin da ke ba da damar aiki don sarrafa semiconductor mai dorewa da maimaitawa.
Menene SiC Cantilever Paddle?
SiC Cantilever Paddle wani sinadari ne mai tsafta wanda ake amfani da shi musamman a cikin tanderun watsawa na semiconductor da tsarin LPCVD. Yawanci ana tsara shi azaman dogayen katako mai iya tallafawa kwale-kwalen quartz ko SiC wafer yayin sarrafa zafin jiki mai yawa.
Ana yin bangaren gabaɗaya ta amfani da:
● sake yin amfani da silicon carbide (RSiC)
● tururin sinadarai da aka ajiye a cikin silicon carbide (CVD SiC)
● kayan SiC masu haɗin kai mai yawan yawa
Dangane da bayanan kayan da CoorsTek da Saint-Gobain Performance Ceramics suka buga, kayan SiC masu tsafta galibi suna nuna:
● Matsakaicin zafin jiki: kimanin 120–200 W/m·K a zafin ɗaki
● Matsakaicin zafin aiki a cikin yanayin da ba shi da aiki: sama da 1600°C.
● Ma'aunin faɗaɗa zafi (CTE): kimanin 4.0–4.5×10⁻⁶/K.
● Kyakkyawan juriya ga sinadaran HCl, NH₃, O₂, da kuma sinadarin chlorine da aka yi amfani da shi.
Matsayin SiC Cantilever Paddle a cikin Sarrafa LPCVD
Daga cikin dukkan aikace-aikacen, tsarin LPCVD yana wakiltar ɗayan mahimman sharuɗɗan amfani ga SiC Cantilever Paddles.
Tsarukan aiki kamar:
● zubar da polysilicon.
● silicon nitride (Si₃N₄).
● ajiyar iskar oxygen mai ƙarancin matsin lamba.
Yawanci yana aiki tsakanin digiri 500 zuwa digiri 900 na Celsius, sau da yawa a ƙarƙashin tsawon zagayowar tsari da kuma yanayin sinadarai masu amsawa sosai.
A cikin waɗannan tsarin, faifan cantilever yana yin ayyuka da yawa masu mahimmanci a lokaci guda.
Da farko, yana samar da ingantaccen jigilar injina ga jiragen ruwa masu shiga da fita daga bututun tanderu. Saboda murhun zamani na tsaye na iya ɗaukar ɗaruruwan wafers a kowane rukuni, ko da ƙaramin canjin faifan zai iya haifar da rashin daidaituwar wafer, tazara mara tabbas, ko tarin damuwa na inji.
Na biyu, faifan yana taka muhimmiyar rawa wajen daidaita yanayin zafi. Babban ƙarfin watsa zafi na SiC yana ba da damar zafi ya bazu daidai gwargwado tare da tsarin tallafi, yana rage yawan yanayin zafi na gida wanda zai iya shafar daidaiton ajiyar kaya.
Na uku, ƙarancin samar da ƙwayoyin cuta yana da matuƙar muhimmanci. Ƙwayoyin Semiconductor suna kashe yawan amfanin ƙasa kai tsaye, musamman a fannin ci gaba da samar da na'urar samar da sinadarai masu ƙarfi. Saboda tsarinsa mai yawa na yumbu da kuma ƙarfin juriyar tsatsa, SiC mai tsafta yana rage haɗarin zubar ƙwayoyin cuta idan aka kwatanta da kayan gargajiya.
A cikin layukan samar da LPCVD masu ci gaba, kwanciyar hankali na dogon lokaci na paddle yana tasiri kai tsaye:
● daidaiton kauri na fim.
● maimaituwa tsakanin wafer da wafer.
● lokacin aiki a cikin tanda.
Ningbo VET Energy ya ƙware a fannin fasahar graphite mai ci gaba, tukwanen silicon carbide, da kuma kayan aikin semiconductor masu rufi na CVD waɗanda aka tsara don yanayin masana'antar semiconductor mai wahala.
Samfuran Core semiconductor sun haɗa da:
● SiC Cantilever Paddle
● SiC Mai Rufin Graphite Susceptor
● Mai ɗaukar Wafer Mai Rufi na SiC
● Abubuwan Rabin Wata Masu Rufi na SiC
● Gurasar Carbon-Carbon Composite
● Jigon Jafananci Mai Taushi da Tauri
Ana amfani da waɗannan samfuran sosai a cikin waɗannan yanayi:
● Tsarin Epitaxy
● Masu samar da wutar lantarki na LPCVD
● Tanderun Yaɗuwa
● Tsarin girma na lu'ulu'u na SiC
● Kayan aikin sarrafa zafi mai zafi mai zafi.
Tare da saurin ci gaban SiC da kuma ci gaban masana'antar semiconductor mai ƙarfi, buƙatar kayan tanderu masu tsabta da kwanciyar hankali za su ci gaba da ƙaruwa. A wannan mahallin, fasahar SiC Cantilever Paddle za ta ci gaba da kasancewa ɗaya daga cikin muhimman abubuwan da ke tallafawa aikin semiconductor na zamani.
Lokacin Saƙo: Mayu-14-2026