Inkqubo esisisekoI-SiCUkukhula kwekristale kwahlulwe ngokwe-sublimation kunye nokubola kwezinto ezikrwada kubushushu obuphezulu, ukuthuthwa kwezinto zesigaba segesi phantsi kwesenzo se-gradient yobushushu, kunye nokukhula kwakhona kwezinto zesigaba segesi kwikristale yembewu. Ngokusekelwe koku, ingaphakathi le-crucible lahlulwe libe ngamacandelo amathathu: indawo yezinto ezikrwada, igumbi lokukhula kunye nekristale yembewu. Imodeli yokulinganisa yamanani yadwetshwa ngokusekelwe kwi-resistance yokwenyani.I-SiCizixhobo zokukhulisa iikristale enye (jonga uMfanekiso 1). Ekubaleni: ezantsi kweumnqamlezoikude ngama-90 mm ukusuka ezantsi kweheater esecaleni, ubushushu obuphezulu be-crucible yi-2100 ℃, ububanzi be-particle yezinto ezikrwada yi-1000 μm, i-porosity yi-0.6, uxinzelelo lokukhula yi-300 Pa, kwaye ixesha lokukhula liyi-100 h. Ubukhulu be-PG yi-5 mm, ububanzi bulingana nobubanzi bangaphakathi be-crucible, kwaye ikwi-30 mm ngaphezulu kwezinto ezikrwada. Iinkqubo ze-sublimation, i-carbonization, kunye ne-recrystallization zone yezinto ezikrwada ziyaqwalaselwa ekubalweni, kwaye impendulo phakathi kwezinto ze-PG kunye ne-gas phase ayiqwalaselwa. Iiparameter zepropathi ebonakalayo ezinxulumene nokubala ziboniswe kwiTheyibhile 1.
Umfanekiso 1 Imodeli yokubala ukulinganisa. (a) Imodeli yentsimi yobushushu yokulinganisa ukukhula kwekristale; (b) Ukwahlulahlula indawo yangaphakathi ye-crucible kunye neengxaki zomzimba ezinxulumene nayo
Itheyibhile 1 Ezinye iiparameter ezibonakalayo ezisetyenzisiweyo ekubaleni
Umfanekiso 2(a) ubonisa ukuba ubushushu besakhiwo esine-PG (esichazwe njengesakhiwo 1) buphezulu kunesakhiwo esingena-PG (esichazwe njengesakhiwo 0) ngaphantsi kwe-PG, kwaye buphantsi kunesakhiwo 0 ngaphezulu kwe-PG. I-gradient yobushushu iyonke iyanda, kwaye i-PG isebenza njenge-arhente yokukhusela ubushushu. NgokweMifanekiso 2(b) kunye no-2(c), i-gradients yobushushu ye-axial kunye ne-radial yesakhiwo 1 kwindawo yezinto ezikrwada zincinci, usasazo lobushushu lufana ngakumbi, kwaye i-sublimation yezinto zigqibelele ngakumbi. Ngokungafaniyo nendawo yezinto ezikrwada, Umfanekiso 2(c) ubonisa ukuba i-gradient yobushushu be-radial kwi-crystal yembewu yesakhiwo 1 inkulu, enokubangelwa ziimilinganiselo ezahlukeneyo zeendlela ezahlukeneyo zokudlulisa ubushushu, ezinceda i-crystal ikhule nge-interface ye-convex. KuMfanekiso 2(d), ubushushu kwiindawo ezahlukeneyo kwi-crucible bubonisa umkhwa okhulayo njengoko ukukhula kuqhubeka, kodwa umahluko wobushushu phakathi kwesakhiwo 0 kunye nesakhiwo 1 uyehla kancinci kwindawo yezinto ezikrwada kwaye uyanda kancinci kwigumbi lokukhula.
Umfanekiso 2 Ukusasazwa kobushushu kunye notshintsho kwi-crucible. (a) Ukusasazwa kobushushu ngaphakathi kwi-crucible yesakhiwo 0 (ekhohlo) kunye nesakhiwo 1 (ekunene) kwi-0 h, iyunithi: ℃; (b) Ukusasazwa kobushushu kumgca osembindini we-crucible yesakhiwo 0 kunye nesakhiwo 1 ukusuka ezantsi kwezinto eziluhlaza ukuya kwi-crystal yembewu kwi-0 h; (c) Ukusasazwa kobushushu ukusuka embindini ukuya kumphetho we-crucible kumphezulu we-crystal yembewu (A) kunye nomphezulu wezinto eziluhlaza (B), embindini (C) nasezantsi (D) kwi-0 h, i-axis ethe tye r yi-radius ye-crystal yembewu ye-A, kunye ne-radius yendawo yezinto eziluhlaza ye-B~D; (d) Utshintsho lobushushu embindini wenxalenye ephezulu (A), umphezulu wezinto eziluhlaza (B) kunye nombindi (C) wegumbi lokukhula lesakhiwo 0 kunye nesakhiwo 1 kwi-0, 30, 60, kunye ne-100 h.
Umfanekiso 3 ubonisa ukuthuthwa kwezinto ngamaxesha ahlukeneyo kwi-crucible yesakhiwo 0 kunye nesakhiwo 1. Izinga lokuhamba kwezinto zesigaba segesi kwindawo yezinto eziluhlaza kunye negumbi lokukhula liyanda ngokunyuka kwendawo, kwaye ukuthuthwa kwezinto kuyancipha njengoko ukukhula kuqhubeka. Umfanekiso 3 ukwabonisa ukuba phantsi kweemeko zokulinganisa, izinto eziluhlaza kuqala zi-graphize eludongeni olusecaleni lwe-crucible kwaye emva koko zibe sezantsi kwe-crucible. Ukongeza, kukho ukuphinda kusetyenziswe kumphezulu wezinto eziluhlaza kwaye kancinci kancinci zikhula njengoko ukukhula kuqhubeka. Umfanekiso 4(a) kunye no-4(b) zibonisa ukuba izinga lokuhamba kwezinto ngaphakathi kwezinto eziluhlaza liyancipha njengoko ukukhula kuqhubeka, kwaye izinga lokuhamba kwezinto kwi-100 h limalunga nama-50% omzuzu wokuqala; nangona kunjalo, izinga lokuhamba lilikhulu kakhulu kumda ngenxa ye-graphitization yezinto eziluhlaza, kwaye izinga lokuhamba kumda lingaphezulu kwe-10 kunezinga lokuhamba kwindawo ephakathi kwi-100 h; Ukongeza, isiphumo se-PG kwisakhiwo 1 senza izinga lokuhamba kwezinto kwindawo yezinto eziluhlaza zesakhiwo 1 libe phantsi kunelo lesakhiwo 0. KuMfanekiso 4(c), ukuhamba kwezinto kwindawo yezinto eziluhlaza kunye negumbi lokukhula kuyancipha kancinci njengoko ukukhula kuqhubeka, kwaye ukuhamba kwezinto kwindawo yezinto eziluhlaza kuyaqhubeka nokuncipha, okubangelwa kukuvulwa komjelo womoya kumphetho we-crucible kunye nokuthintelwa kwe-recrystallization phezulu; kwigumbi lokukhula, izinga lokuhamba kwezinto zesakhiwo 0 liyancipha ngokukhawuleza kwiiyure ezingama-30 zokuqala ukuya kwi-16%, kwaye lehla kuphela nge-3% kwixesha elilandelayo, ngelixa isakhiwo 1 sihlala sizinzile kuyo yonke inkqubo yokukhula. Ke ngoko, i-PG inceda ukuzinzisa izinga lokuhamba kwezinto kwigumbi lokukhula. Umfanekiso 4(d) uthelekisa izinga lokuhamba kwezinto ngaphambili kwekristale. Kwimizuzu yokuqala ne-100 h, ukuthuthwa kwezinto kwindawo yokukhula yesakhiwo 0 kunamandla kunoko kwisakhiwo 1, kodwa kusoloko kukho indawo enesantya esiphezulu sokuhamba kwamanzi kumda wesakhiwo 0, nto leyo ekhokelela ekukhuleni okugqithisileyo kumda. Ubukho be-PG kwisakhiwo 1 buyithintela ngempumelelo le meko.
Umfanekiso 3 Ukuhamba kwezinto kwi-crucible. Imigca ecacileyo (ekhohlo) kunye neevektha zesantya (ekunene) zothutho lwezinto zegesi kwizakhiwo 0 kunye no-1 ngamaxesha ahlukeneyo, iyunithi yevektha yesantya: m/s
Umfanekiso 4 Utshintsho kwisantya sokuhamba kwezinto. (a) Utshintsho kwisantya sokuhamba kwezinto phakathi kwezinto eziluhlaza zesakhiwo 0 kwi-0, 30, 60, kunye ne-100 h, r yirediyasi yendawo yezinto eziluhlaza; (b) Utshintsho kwisantya sokuhamba kwezinto phakathi kwezinto eziluhlaza zesakhiwo 1 kwi-0, 30, 60, kunye ne-100 h, r yirediyasi yendawo yezinto eziluhlaza; (c) Utshintsho kwisantya sokuhamba kwezinto ngaphakathi kwigumbi lokukhula (A, B) kunye nangaphakathi kwezinto eziluhlaza (C, D) zezakhiwo 0 kunye no-1 ngokuhamba kwexesha; (d) Utshintsho kwisantya sokuhamba kwezinto kufutshane nomphezulu wekristale yembewu yezakhiwo 0 kunye no-1 kwi-0 kunye ne-100 h, r yirediyasi yekristale yembewu
I-C/Si ichaphazela uzinzo lwekristale kunye noxinano olungalunganga lokukhula kwekristale yeSiC. Umfanekiso 5(a) uthelekisa ukusasazwa komlinganiselo we-C/Si wezakhiwo ezibini ngexesha lokuqala. Umlinganiselo we-C/Si uyancipha kancinci ukusuka ezantsi ukuya phezulu kwe-crucible, kwaye umlinganiselo we-C/Si wesakhiwo 1 uhlala uphezulu kunowosakhiwo 0 kwiindawo ezahlukeneyo. Imifanekiso 5(b) kunye no-5(c) zibonisa ukuba umlinganiselo we-C/Si uyanda kancinci ngokukhula, oku kunxulumene nokunyuka kobushushu bangaphakathi kwinqanaba lokugqibela lokukhula, ukuphuculwa kwe-graphitization yezinto eziluhlaza, kunye nokusabela kwezinto ze-Si kwisigaba segesi kunye ne-graphite crucible. Kumfanekiso 5(d), umlinganiselo we-C/Si wesakhiwo 0 kunye nesakhiwo 1 wahlukile kakhulu ngaphantsi kwe-PG (0, 25 mm), kodwa wahlukile kancinci ngaphezu kwe-PG (50 mm), kwaye umahluko uyanda kancinci njengoko usondela kwikristale. Ngokubanzi, umlinganiselo we-C/Si wesakhiwo 1 uphezulu, onceda ukuzinzisa imo yekristale kwaye unciphise amathuba okutshintsha kwesigaba.
Umfanekiso 5 Ukusasazwa kunye notshintsho lomlinganiselo we-C/Si. (a) Ukusasazwa komlinganiselo we-C/Si kwii-crucibles zesakhiwo 0 (ekhohlo) kunye nesakhiwo 1 (ekunene) nge-0 h; (b) Umlinganiselo we-C/Si kumgama owahlukileyo ukusuka kumgca ophakathi we-crucible yesakhiwo 0 ngamaxesha ahlukeneyo (0, 30, 60, 100 h); (c) Umlinganiselo we-C/Si kumgama owahlukileyo ukusuka kumgca ophakathi we-crucible yesakhiwo 1 ngamaxesha ahlukeneyo (0, 30, 60, 100 h); (d) Uthelekiso lomlinganiselo we-C/Si kumgama owahlukileyo (0, 25, 50, 75, 100 mm) ukusuka kumgca ophakathi we-crucible yesakhiwo 0 (umgca oqinileyo) kunye nesakhiwo 1 (umgca oqhekekileyo) ngamaxesha ahlukeneyo (0, 30, 60, 100 h).
Umfanekiso 6 ubonisa utshintsho kububanzi be-particle kunye ne-porosity yeendawo zezinto ezikrwada zezakhiwo ezimbini. Lo mfanekiso ubonisa ukuba ububanzi bezinto ezikrwada buyancipha kwaye i-porosity iyanda kufutshane nodonga oluqhekekayo, kwaye i-porosity yomphetho iyaqhubeka nokwanda kwaye ububanzi be-particle buyaqhubeka nokuncipha njengoko ukukhula kuqhubeka. I-porosity yomphetho ophezulu imalunga ne-0.99 kwiiyure ezili-100, kwaye ububanzi be-particle obuncinci bumalunga ne-300 μm. Ububanzi be-particle buyanda kwaye i-porosity iyancipha kumphezulu ophezulu wezinto ezikrwada, okuhambelana nokuphinda kusetyenziswe. Ubukhulu bendawo yokuphinda kusetyenziswe izinto buyanda njengoko ukukhula kuqhubeka, kwaye ubungakanani be-particle kunye ne-porosity ziyaqhubeka nokutshintsha. Ububanzi be-particle obuphezulu bufikelela ngaphezu kwe-1500 μm, kwaye i-porosity encinci yi-0.13. Ukongeza, ekubeni i-PG yonyusa ubushushu bendawo yezinto ezikrwada kwaye i-gas supersaturation incinci, ubukhulu be-recrystallization yenxalenye ephezulu yezinto ezikrwada zesakhiwo 1 buncinci, nto leyo ephucula izinga lokusetyenziswa kwezinto ezikrwada.
Umfanekiso 6 Utshintsho kububanzi be-particle (ekhohlo) kunye ne-porosity (ekunene) yendawo yezixhobo eziluhlaza zesakhiwo 0 kunye nesakhiwo 1 ngamaxesha ahlukeneyo, iyunithi yobubanzi be-particle: μm
Umfanekiso 7 ubonisa ukuba isakhiwo 0 siyajika ekuqaleni kokukhula, okunokunxulunyaniswa nesantya sokuhamba kwezinto esigqithisileyo esibangelwa yi-graphitization yomphetho wezinto eziluhlaza. Iqondo lokujika liyabuthathaka ngexesha lenkqubo yokukhula elandelayo, ehambelana notshintsho kwisantya sokuhamba kwezinto ngaphambili kokukhula kwekristale yesakhiwo 0 kuMfanekiso 4 (d). Kwisakhiwo 1, ngenxa yesiphumo se-PG, ujongano lwekristale alubonisi ukujika. Ukongeza, i-PG ikwayenza isantya sokukhula kwesakhiwo 1 sibe phantsi kakhulu kuneso sesakhiwo 0. Ubukhulu obuphakathi bekristale yesakhiwo 1 emva kweeyure ezili-100 yi-68% kuphela yesakhiwo 0.
Umfanekiso 7 Utshintsho lojongano lwesakhiwo 0 kunye nesakhiwo 1 iikristale kwi-30, 60, kunye ne-100 h
Ukukhula kwekristale kwenziwe phantsi kweemeko zenkqubo yokulinganisa ngamanani. Iikristale ezikhuliswe ngesakhiwo 0 kunye nesakhiwo 1 ziboniswe kuMfanekiso 8(a) kunye noMfanekiso 8(b), ngokulandelelana. Ikristale yesakhiwo 0 ibonisa ujongano olugobileyo, olunee-undulations kwindawo ephakathi kunye notshintsho lwesigaba kumphetho. Ukujikeleza komphezulu kubonisa inqanaba elithile lokungahambelani ekuthuthweni kwezinto zesigaba segesi, kwaye ukwenzeka kotshintsho lwesigaba kuhambelana nomlinganiselo ophantsi weC/Si. Ujongano lwekristale olukhuliswe ngesakhiwo 1 lugobile kancinci, akukho tshintsho lwesigaba olufumanekayo, kwaye ubukhulu buyi-65% yekristale ngaphandle kwe-PG. Ngokubanzi, iziphumo zokukhula kwekristale zihambelana neziphumo zokulinganisa, kunye nomahluko omkhulu wobushushu be-radial kumphezulu wekristale wesakhiwo 1, ukukhula okukhawulezayo kumphetho kuyacinezelwa, kwaye izinga lokuhamba kwezinto lilonke lihamba kancinci. Umkhwa uwonke uhambelana neziphumo zokulinganisa ngamanani.
Umfanekiso 8 Iikristale zeSiC ezikhuliswe phantsi kwesakhiwo 0 kunye nesakhiwo 1
Isiphelo
I-PG inceda ekuphuculeni ubushushu obupheleleyo bendawo yezinto ezikrwada kunye nokuphucula ukulingana kobushushu be-axial kunye ne-radial, ikhuthaza ukuncitshiswa ngokupheleleyo kunye nokusetyenziswa kwezinto ezikrwada; umahluko wobushushu obuphezulu nobosezantsi uyanda, kwaye i-radial gradient yomphezulu wekristale yembewu iyanda, nto leyo enceda ukugcina ukukhula kojongano lwe-convex. Ngokuphathelele ukudluliselwa kobuninzi, ukungeniswa kwe-PG kunciphisa izinga lokudluliselwa kobunzima ngokubanzi, izinga lokuhamba kwezinto kwigumbi lokukhula eliqulethe i-PG alitshintshi kangako ngokuhamba kwexesha, kwaye yonke inkqubo yokukhula izinzile ngakumbi. Kwangaxeshanye, i-PG ikwathintela ngokufanelekileyo ukwenzeka kokudluliselwa kobuninzi bomphetho. Ukongeza, i-PG ikwanyusa umlinganiselo we-C/Si wendawo yokukhula, ngakumbi kumda ongaphambili wojongano lwekristale yembewu, nto leyo enceda ekunciphiseni ukwenzeka kotshintsho lwesigaba ngexesha lenkqubo yokukhula. Kwangaxeshanye, isiphumo sokufakelwa kobushushu se-PG sinciphisa ukwenzeka kokuphinda kusetyenziswe kwakhona kwinxalenye ephezulu yezinto ezikrwada ukuya kwinqanaba elithile. Ekukhuleni kwekristale, i-PG iyanciphisa izinga lokukhula kwekristale, kodwa ujongano lokukhula luxinene ngakumbi. Ngoko ke, i-PG yindlela esebenzayo yokuphucula imeko yokukhula kweekristale zeSiC kunye nokuphucula umgangatho wekristale.
Ixesha leposi: Juni-18-2024