Inqubo eyisisekeloI-SiCukukhula kwekristalu kuhlukaniswe ngokufakwa kwe-sublimation kanye nokubola kwezinto zokusetshenziswa ekushiseni okuphezulu, ukuthuthwa kwezinto zesigaba segesi ngaphansi kwesenzo se-gradient yokushisa, kanye nokukhula kabusha kwezinto zesigaba segesi kukristalu yembewu. Ngokusekelwe kulokhu, ingaphakathi le-crucible lihlukaniswe izingxenye ezintathu: indawo yezinto zokusetshenziswa, igumbi lokukhula kanye nekristalu yembewu. Imodeli yokulingisa yezinombolo yadwetshwa ngokusekelwe ekumelaneni kwangempela.I-SiCimishini yokukhulisa ikristalu eyodwa (bheka uMfanekiso 1). Esibalweni: phansi kweisikhuni esivuthayoKuqhele ngama-90 mm ukusuka phansi kwesifudumezi esiseceleni, izinga lokushisa eliphezulu lesitsha sokufudumeza lingu-2100 ℃, ububanzi bezinhlayiya zezinto zokusetshenziswa buyi-1000 μm, i-porosity ingu-0.6, ingcindezi yokukhula ingu-300 Pa, kanti isikhathi sokukhula singamahora ayi-100. Ubukhulu be-PG bungu-5 mm, ububanzi bulingana nobubanzi bangaphakathi besitsha sokufudumeza, futhi butholakala ngama-30 mm ngaphezu kwezinto zokusetshenziswa. Izinqubo ze-sublimation, i-carbonization, kanye ne-recrystallization zendawo yezinto zokusetshenziswa ziyacatshangelwa ekubalweni, futhi ukusabela phakathi kwezinto ze-PG kanye nesigaba segesi akucatshangelwa. Amapharamitha empahla ephathelene nokubala aboniswe kuThebula 1.
Umfanekiso 1 Imodeli yokubala yokulingisa. (a) Imodeli yensimu yokushisa yokulingisa ukukhula kwekristalu; (b) Ukuhlukaniswa kwendawo yangaphakathi yenkinga yokubethela kanye nezinkinga zomzimba ezihlobene nayo
Ithebula 1 Amanye amapharamitha angokoqobo asetshenziswe ekubalweni
Isibalo 2(a) sibonisa ukuthi izinga lokushisa lesakhiwo esiqukethe i-PG (elikhonjiswe njengesakhiwo 1) liphakeme kunesakhiwo esingena-PG (elikhonjiswe njengesakhiwo 0) ngaphansi kwe-PG, futhi liphansi kunesakhiwo 0 ngaphezu kwe-PG. Isilinganiso sokushisa sisonke siyanda, futhi i-PG isebenza njenge-ejenti yokuvimbela ukushisa. Ngokusho kwezithombe 2(b) no-2(c), i-axial kanye ne-radial temperature gradients yesakhiwo 1 endaweni yezinto zokusetshenziswa zincane, ukusatshalaliswa kwezinga lokushisa kuyafana kakhulu, futhi i-sublimation yezinto zokusetshenziswa iphelele kakhulu. Ngokungafani nendawo yezinto zokusetshenziswa, Isibalo 2(c) sibonisa ukuthi i-radial temperature gradient ku-seed crystal yesakhiwo 1 inkulu, okungase kubangelwe yizilinganiso ezahlukene zezindlela ezahlukene zokudlulisa ukushisa, okusiza i-crystal ukuthi ikhule nge-convex interface. Ku-Figure 2(d), izinga lokushisa ezindaweni ezahlukene ku-crucible libonisa ukuthambekela okwandayo njengoba ukukhula kuqhubeka, kodwa umehluko wokushisa phakathi kwesakhiwo 0 nesakhiwo 1 wehla kancane kancane endaweni yezinto zokusetshenziswa futhi uyanda kancane kancane ekamelweni lokukhula.
Umfanekiso 2 Ukusatshalaliswa kwezinga lokushisa kanye nezinguquko ku-crucible. (a) Ukusatshalaliswa kwezinga lokushisa ngaphakathi kwe-crucible yesakhiwo 0 (kwesobunxele) kanye nesakhiwo 1 (kwesokudla) ngo-0 h, iyunithi: ℃; (b) Ukusatshalaliswa kwezinga lokushisa emgqeni ophakathi we-crucible yesakhiwo 0 kanye nesakhiwo 1 kusukela phansi kwezinto zokusetshenziswa kuya ku-crystal yembewu ngo-0 h; (c) Ukusatshalaliswa kwezinga lokushisa kusukela maphakathi kuya emaphethelweni e-crucible ebusweni be-crystal yembewu (A) kanye nobuso bezinto zokusetshenziswa (B), maphakathi (C) kanye naphansi (D) ngo-0 h, i-axis evundlile r iyi-radius yekristalu yembewu ye-A, kanye ne-radius yendawo yezinto zokusetshenziswa ze-B~D; (d) Ukushintsha kwezinga lokushisa enkabeni yengxenye engenhla (A), ubuso bezinto zokusetshenziswa (B) kanye naphakathi (C) kwegumbi lokukhula lesakhiwo 0 kanye nesakhiwo 1 ngo-0, 30, 60, kanye namahora ayi-100.
Isithombe 3 sibonisa ukuthuthwa kwezinto ngezikhathi ezahlukene esitsheni esivuthayo sesakhiwo 0 nesakhiwo 1. Izinga lokugeleza kwezinto zesigaba segesi endaweni yezinto zokusetshenziswa kanye negumbi lokukhula liyakhula ngokukhula kwesikhundla, futhi ukuthuthwa kwezinto zokusetshenziswa kuyabuthaka njengoba ukukhula kuqhubeka. Isithombe 3 sibonisa nokuthi ngaphansi kwezimo zokulingisa, izinto zokusetshenziswa kuqala zidwetshwa odongeni oluseceleni lwesitsheni esivuthayo bese kuba phansi kwesitsheni esivuthayo. Ngaphezu kwalokho, kukhona ukuphinda kusetshenziswe ebusweni bezinto zokusetshenziswa futhi kancane kancane kuyaqina njengoba ukukhula kuqhubeka. Izibalo 4(a) kanye no-4(b) zibonisa ukuthi izinga lokugeleza kwezinto zokusetshenziswa ngaphakathi kwezinto zokusetshenziswa liyehla njengoba ukukhula kuqhubeka, futhi izinga lokugeleza kwezinto zokusetshenziswa emahoreni ayi-100 cishe lingama-50% wesikhathi sokuqala; noma kunjalo, izinga lokugeleza likhulu kakhulu emaphethelweni ngenxa yokuguqulwa kwezinto zokusetshenziswa ... Ngaphezu kwalokho, umphumela we-PG esakhiweni 1 wenza izinga lokugeleza kwezinto endaweni yezinto zokusetshenziswa zesakhiwo 1 libe ngaphansi kunelesakhiwo 0. KuMfanekiso 4(c), ukugeleza kwezinto kokubili endaweni yezinto zokusetshenziswa kanye negumbi lokukhula kuya ngokuya kuncipha njengoba ukukhula kuqhubeka, futhi ukugeleza kwezinto endaweni yezinto zokusetshenziswa kuyaqhubeka nokwehla, okubangelwa ukuvulwa kwesiteshi sokugeleza komoya onqenqemeni lwe-crucible kanye nokuvinjelwa kokusetshenziswa kabusha kwekristalu phezulu; ekamelweni lokukhula, izinga lokugeleza kwezinto zesakhiwo 0 lehla ngokushesha emahoreni angama-30 okuqala kuya ku-16%, futhi lehla ngo-3% kuphela esikhathini esilandelayo, kuyilapho isakhiwo 1 sihlala sizinzile phakathi nenqubo yokukhula. Ngakho-ke, i-PG isiza ekuqiniseni izinga lokugeleza kwezinto ekamelweni lokukhula. Isibalo 4(d) siqhathanisa izinga lokugeleza kwezinto ngaphambili kokukhula kwekristalu. Ngesikhathi sokuqala kanye namahora ayi-100, ukuthuthwa kwezinto ezibonakalayo endaweni yokukhula yesakhiwo 0 kunamandla kunaleyo esesakhiwo 1, kodwa kuhlale kukhona indawo yesivinini esikhulu sokugeleza emaphethelweni esakhiwo 0, okuholela ekukhuleni ngokweqile emaphethelweni. Ukuba khona kwe-PG esakhiweni 1 kuvimbela ngempumelelo lesi simo.
Umfanekiso 3 Ukugeleza kwezinto ezisetshenziswayo esitsheni esivuthayo. Imigqa (kwesobunxele) kanye namavektha ejubane (kwesokudla) okuthuthwa kwezinto ezisetshenziswayo zegesi ezakhiweni 0 kanye no-1 ngezikhathi ezahlukene, iyunithi yevektha yejubane: m/s
Umfanekiso 4 Izinguquko esilinganisweni sokugeleza kwezinto. (a) Izinguquko ekusabalalisweni kwesilinganiso sokugeleza kwezinto phakathi kwezinto zokusetshenziswa zesakhiwo 0 ku-0, 30, 60, kanye namahora ayi-100, r yirediyasi yendawo yezinto zokusetshenziswa; (b) Izinguquko ekusabalalisweni kwesilinganiso sokugeleza kwezinto phakathi kwezinto zokusetshenziswa zesakhiwo 1 ku-0, 30, 60, kanye namahora ayi-100, r yirediyasi yendawo yezinto zokusetshenziswa; (c) Izinguquko esilinganisweni sokugeleza kwezinto ngaphakathi kwegumbi lokukhula (A, B) kanye nangaphakathi kwezinto zokusetshenziswa (C, D) zezakhiwo 0 kanye no-1 ngokuhamba kwesikhathi; (d) Ukusabalala kwesilinganiso sokugeleza kwezinto eduze kobuso bekristalu yembewu yezakhiwo 0 kanye no-1 ku-0 kanye namahora ayi-100, r yirediyasi yekristalu yembewu
I-C/Si ithinta ukuzinza kwekristalu kanye nobuningi bokukhubazeka kokukhula kwekristalu ye-SiC. Isibalo 5(a) siqhathanisa ukusatshalaliswa kwesilinganiso se-C/Si kwezakhiwo ezimbili ngesikhathi sokuqala. Isilinganiso se-C/Si sincipha kancane kancane kusukela phansi kuya phezulu kwe-crucible, kanti isilinganiso se-C/Si sesakhiwo 1 sihlala siphakeme kunesesakhiwo 0 ezindaweni ezahlukene. Izibalo 5(b) kanye no-5(c) zibonisa ukuthi isilinganiso se-C/Si sikhula kancane kancane ngokukhula, okuhlobene nokwanda kokushisa kwangaphakathi esigabeni sakamuva sokukhula, ukuthuthukiswa kwe-graphitization yezinto zokusetshenziswa, kanye nokusabela kwezingxenye ze-Si esigabeni segesi ne-graphite crucible. Ku-Figure 5(d), izilinganiso ze-C/Si zesakhiwo 0 nesakhiwo 1 zihlukile kakhulu ngaphansi kwe-PG (0, 25 mm), kodwa zihlukile kancane ngaphezu kwe-PG (50 mm), futhi umehluko uyanda kancane kancane njengoba usondela kukristalu. Ngokuvamile, isilinganiso se-C/Si sesakhiwo 1 siphakeme, okusiza ukuzinzisa isimo sekristalu futhi kunciphise amathuba okuguquka kwesigaba.
Umfanekiso 5 Ukusatshalaliswa kanye nezinguquko zesilinganiso se-C/Si. (a) Ukusatshalaliswa kwesilinganiso se-C/Si ezitsheni eziphekwayo zesakhiwo 0 (kwesobunxele) kanye nesakhiwo 1 (kwesokudla) ngehora eli-0; (b) Isilinganiso se-C/Si emabangeni ahlukene ukusuka emgqeni ophakathi we-crucible yesakhiwo 0 ngezikhathi ezahlukene (0, 30, 60, 100 h); (c) Isilinganiso se-C/Si emabangeni ahlukene ukusuka emgqeni ophakathi we-crucible yesakhiwo 1 ngezikhathi ezahlukene (0, 30, 60, 100 h); (d) Ukuqhathaniswa kwesilinganiso se-C/Si emabangeni ahlukene (0, 25, 50, 75, 100 mm) ukusuka emgqeni ophakathi we-crucible yesakhiwo 0 (umugqa oqinile) kanye nesakhiwo 1 (umugqa onamachashazi) ngezikhathi ezahlukene (0, 30, 60, 100 h).
Isithombe 6 sibonisa izinguquko kububanzi bezinhlayiya kanye nokuvuleka kwezindawo zezinto zokusetshenziswa zezakhiwo ezimbili. Isithombe sibonisa ukuthi ububanzi bezinto zokusetshenziswa buyancipha futhi ukuvuleka kuyanda eduze kodonga lokubethela, futhi ukuvuleka komphetho kuyaqhubeka nokwanda futhi ububanzi bezinhlayiya buyaqhubeka nokuncipha njengoba ukukhula kuqhubeka. Ukuvuleka komphetho okuphezulu cishe kungama-0.99 emahoreni ayi-100, kanti ububanzi bezinhlayiya obuncane bungama-300 μm. Ububanzi bezinhlayiya buyanda futhi ukuvuleka kwenhlayiya kwehla ebusweni obungaphezulu bezinto zokusetshenziswa, okuhambisana nokuphinda kusetshenziswe. Ubukhulu bendawo yokuphinda kusetshenziswe buyanda njengoba ukukhula kuqhubeka, futhi usayizi wezinhlayiya kanye nokuvuleka kwenhlayiya kuyaqhubeka nokushintsha. Ububanzi bezinhlayiya obuphezulu bufinyelela ngaphezu kwama-1500 μm, kanti ukuvuleka okuncane kungu-0.13. Ngaphezu kwalokho, njengoba i-PG ikhulisa izinga lokushisa lendawo yezinto zokusetshenziswa kanye nokugcwala kwegesi kuncane, ukuvuleka kwengxenye engenhla yezinto zokusetshenziswa zesakhiwo 1 kuncane, okuthuthukisa izinga lokusetshenziswa kwezinto zokusetshenziswa.
Umfanekiso 6 Izinguquko kububanzi bezinhlayiyana (kwesobunxele) kanye nokuvuleka (kwesokudla) kwendawo yezinto zokusetshenziswa zesakhiwo 0 kanye nesakhiwo 1 ngezikhathi ezahlukene, iyunithi yobubanzi bezinhlayiyana: μm
Isithombe 7 sibonisa ukuthi isakhiwo 0 siyagoba ekuqaleni kokukhula, okungase kuhlotshaniswe nesilinganiso sokugeleza kwezinto eziningi okubangelwa yi-graphitization yomphetho wezinto zokusetshenziswa. Izinga lokugoba liyabuthaka ngesikhathi senqubo yokukhula elandelayo, okuhambisana noshintsho lwesilinganiso sokugeleza kwezinto ngaphambili kokukhula kwekristalu kwesakhiwo 0 kuMfanekiso 4 (d). Esakhiweni 1, ngenxa yomphumela we-PG, isikhombimsebenzisi sekristalu asibonisi ukugoba. Ngaphezu kwalokho, i-PG yenza futhi izinga lokukhula kwesakhiwo 1 libe ngaphansi kakhulu kunelesakhiwo 0. Ubukhulu obuphakathi bekristalu yesakhiwo 1 ngemva kwamahora ayi-100 buyi-68% kuphela yesakhiwo 0.
Umfanekiso 7 Izinguquko zesikhombimsebenzisi sesakhiwo 0 kanye nesakhiwo 1 amakristalu emahoreni angu-30, 60, kanye namahora ayi-100
Ukukhula kwekristalu kwenziwa ngaphansi kwezimo zenqubo yokulingisa ngezinombolo. Amakristalu akhuliswe ngesakhiwo 0 kanye nesakhiwo 1 aboniswe kuMfanekiso 8(a) kanye noMfanekiso 8(b), ngokulandelana. Ikristalu yesakhiwo 0 ikhombisa isixhumi esigoqekile, esinezingqimba endaweni ephakathi kanye nokuguquka kwesigaba onqenqemeni. Ukuguquguquka kobuso kumelela izinga elithile lokungalingani ekuthuthweni kwezinto zesigaba segesi, futhi ukwenzeka kokuguquka kwesigaba kuhambisana nesilinganiso esiphansi se-C/Si. Isixhumi esigoqekile sekristalu ekhuliswe ngesakhiwo 1 sigoqekile kancane, akukho ukuguquka kwesigaba okutholakalayo, futhi ubukhulu bungu-65% wekristalu ngaphandle kwe-PG. Ngokuvamile, imiphumela yokukhula kwekristalu ihambelana nemiphumela yokulingisa, ngomehluko omkhulu wokushisa kwe-radial esixhumeni sekristalu sesakhiwo 1, ukukhula okusheshayo onqenqemeni kuyacindezelwa, futhi izinga lokugeleza kwezinto lihamba kancane. Umkhuba jikelele uhambisana nemiphumela yokulingisa ngezinombolo.
Umfanekiso 8 Amakristalu e-SiC akhuliswe ngaphansi kwesakhiwo 0 kanye nesakhiwo 1
Isiphetho
I-PG ikhuthaza ukuthuthukiswa kwezinga lokushisa eliphelele lendawo yezinto zokusetshenziswa kanye nokuthuthukiswa kokulingana kwezinga lokushisa le-axial kanye ne-radial, okukhuthaza ukuncishiswa okuphelele kanye nokusetshenziswa kwezinto zokusetshenziswa; umehluko wokushisa ophezulu nophansi uyanda, kanye nokuphakama kwe-radial ebusweni bekristalu yembewu kuyanda, okusiza ukugcina ukukhula kwesikhombisi esihlanganisiwe. Ngokuphathelene nokudluliselwa kwesisindo, ukwethulwa kwe-PG kunciphisa izinga lokudluliselwa kwesisindo lilonke, izinga lokugeleza kwezinto ekamelweni lokukhula eliqukethe i-PG lishintsha kancane ngokuhamba kwesikhathi, futhi yonke inqubo yokukhula izinzile. Ngesikhathi esifanayo, i-PG nayo ivimbela ngempumelelo ukwenzeka kokudluliselwa kwesisindo ngokweqile komphetho. Ngaphezu kwalokho, i-PG iphinde ikhulise isilinganiso se-C/Si sendawo yokukhula, ikakhulukazi emaphethelweni angaphambili esikhombisi sekristalu yembewu, okusiza ukunciphisa ukwenzeka koshintsho lwesigaba ngesikhathi senqubo yokukhula. Ngesikhathi esifanayo, umphumela wokushisa we-PG unciphisa ukwenzeka kokuphinda kusetshenziswe engxenyeni engenhla yezinto zokusetshenziswa ngezinga elithile. Ekukhuleni kwekristalu, i-PG yehlisa izinga lokukhula kwekristalu, kodwa isikhombisi sokukhula siyinkimbinkimbi kakhulu. Ngakho-ke, i-PG iyindlela ephumelelayo yokuthuthukisa indawo yokukhula kwamakristalu e-SiC nokuthuthukisa ikhwalithi yamakristalu.
Isikhathi sokuthunyelwe: Juni-18-2024