Tanderu mai lu'ulu'u ɗaya na'ura ce da ke amfani dahita mai graphitedon narkar da kayan silicon polycrystalline a cikin yanayin iskar gas (argon) mara aiki kuma yana amfani da hanyar Czochralski don haɓaka lu'ulu'u guda ɗaya waɗanda ba su narke ba. Ya ƙunshi galibin tsarin kamar haka:
Tsarin watsawa na inji
Tsarin watsawa na inji shine tsarin aiki na asali na tanderu mai lu'ulu'u ɗaya, wanda ke da alhakin sarrafa motsi na lu'ulu'u dabututun ruwa, gami da ɗagawa da juyawar lu'ulu'u na iri da kuma ɗagawa da juyawabututun ruwaYana iya daidaita sigogi daidai kamar matsayi, gudu da kusurwar juyawa na lu'ulu'u da ƙwanƙwasa don tabbatar da ci gaban tsarin girma na lu'ulu'u cikin sauƙi. Misali, a cikin matakai daban-daban na girma na lu'ulu'u kamar shuka, yanke wuya, kafada, girman diamita daidai da wutsiya, motsi na lu'ulu'u da ƙwanƙwasa iri yana buƙatar a sarrafa shi daidai ta wannan tsarin don biyan buƙatun tsarin girma na lu'ulu'u.
Tsarin kula da zafin jiki na dumama
Wannan yana ɗaya daga cikin manyan tsarin tanderun lu'ulu'u guda ɗaya, wanda ake amfani da shi don samar da zafi da kuma daidaita zafin da ke cikin tanderun daidai. Ya ƙunshi galibin abubuwa kamar masu dumama, na'urori masu auna zafin jiki, da masu sarrafa zafin jiki. Yawanci ana yin hita ne da kayan aiki kamar graphite mai tsabta. Bayan an canza wutar lantarki mai canzawa kuma an rage ta don ƙara wutar, hita tana samar da zafi don narke kayan polycrystalline kamar polysilicon a cikin bututun. Na'urar auna zafin jiki tana lura da canje-canjen zafin jiki a cikin tanderun a ainihin lokaci kuma tana aika siginar zafin jiki zuwa ga mai sarrafa zafin jiki. Mai sarrafa zafin jiki yana sarrafa ƙarfin dumama daidai bisa ga sigogin zafin jiki da aka saita da siginar zafin jiki, don haka yana kiyaye kwanciyar hankali na zafin jiki a cikin tanderun kuma yana samar da yanayin zafin da ya dace don haɓakar lu'ulu'u.
Tsarin injin tsotsa
Babban aikin tsarin injin tsabtace iska shine ƙirƙirar da kuma kula da muhallin injin tsabtace iska a cikin tanderu yayin tsarin haɓakar lu'ulu'u. Ana fitar da iskar gas da ƙazanta a cikin tanderu ta hanyar famfunan injin tsabtace iska da sauran kayan aiki don sa matsin lamba na iskar gas a cikin tanderu ya kai matakin ƙasa sosai, gabaɗaya ƙasa da 5TOR (torr). Wannan zai iya hana kayan silicon su zama masu kauri a yanayin zafi mai yawa kuma ya tabbatar da tsarki da ingancin girman lu'ulu'u. A lokaci guda, yanayin injin tsabtace iska kuma yana da amfani wajen cire ƙazanta masu canzawa da aka samar yayin tsarin haɓakar lu'ulu'u da inganta ingancin lu'ulu'u.
Tsarin argon
Tsarin argon yana taka rawa wajen karewa da daidaita matsin lamba a cikin tanderu a cikin tanderu guda ɗaya. Bayan an yi amfani da injin tsabtace iska, ana cika iskar argon mai tsarki (tsarki dole ne ya kasance sama da 6 9) a cikin tanderu. A gefe guda, yana iya hana iskar waje shiga tanderu kuma yana hana kayan silicon su zama masu oxidized; a gefe guda kuma, cike iskar argon zai iya kiyaye matsin lamba a cikin tanderu kuma ya samar da yanayi mai dacewa don haɓakar lu'ulu'u. Bugu da ƙari, kwararar iskar argon kuma zai iya kawar da zafi da ake samarwa yayin tsarin haɓakar lu'ulu'u, yana taka rawar sanyaya.
Tsarin sanyaya ruwa
Aikin tsarin sanyaya ruwa shine sanyaya sassa daban-daban na tanda mai lu'ulu'u guda ɗaya don tabbatar da aiki da tsawon rayuwar kayan aikin. A lokacin aikin tanda mai lu'ulu'u guda ɗaya, hita,mai kama da wuta, lantarki da sauran abubuwan da ke cikinsa za su samar da zafi mai yawa. Idan ba a sanyaya su akan lokaci ba, kayan aikin za su yi zafi fiye da kima, su lalace ko ma su lalace. Tsarin sanyaya ruwa yana ɗauke zafin waɗannan abubuwan ta hanyar zagayawa da ruwan sanyi don kiyaye zafin kayan aikin a cikin iyaka mai aminci. A lokaci guda, tsarin sanyaya ruwa kuma zai iya taimakawa wajen daidaita zafin da ke cikin tanderu don inganta daidaiton sarrafa zafin jiki.
Tsarin sarrafa wutar lantarki
Tsarin sarrafa wutar lantarki shine "kwakwalwa" na tanderun lu'ulu'u guda ɗaya, wanda ke da alhakin sa ido da kuma sarrafa aikin dukkan kayan aiki. Yana iya karɓar sigina daga na'urori masu auna zafin jiki daban-daban, kamar na'urorin auna matsin lamba, na'urorin auna matsayi, da sauransu, da kuma daidaita da sarrafa tsarin watsawa na inji, tsarin sarrafa zafin jiki na dumama, tsarin injin, tsarin argon da tsarin sanyaya ruwa bisa ga waɗannan sigina. Misali, a lokacin tsarin haɓakar lu'ulu'u, tsarin sarrafa wutar lantarki zai iya daidaita wutar dumama ta atomatik bisa ga siginar zafin jiki da na'urar auna zafin jiki ke bayarwa; bisa ga girman lu'ulu'u, yana iya sarrafa saurin motsi da kusurwar juyawa na lu'ulu'u iri da kuma bututun ƙarfe. A lokaci guda, tsarin sarrafa wutar lantarki kuma yana da ayyukan gano kurakurai da faɗakarwa, waɗanda zasu iya gano yanayin rashin daidaituwa na kayan aiki a cikin lokaci kuma su tabbatar da ingantaccen aikin kayan aiki.
Lokacin Saƙo: Satumba-23-2024