He taputapu te oumu karaihe kotahi e whakamahi ana i tewhakamahana karāhehei whakarewa i ngā rauemi silicon polycrystalline i roto i te taiao hau korekore (argon) me te whakamahi i te tikanga Czochralski hei whakatipu i ngā tioata takitahi kāore i te nekehia. Ko te nuinga o tēnei he mea tito mai i ngā pūnaha e whai ake nei:
Pūnaha tuku miihini
Ko te pūnaha tuku miihini te pūnaha whakahaere taketake o te oumu karaihe kotahi, koia te kawenga matua mō te whakahaere i te nekehanga o ngā karaihe mengā oko whakarewa, tae atu ki te hiki me te huri i ngā tioata purapura me te hiki me te huri ingā oko whakarewaKa taea e ia te whakarite tika i ngā tawhā pēnei i te tūranga, te tere me te koki hurihuri o ngā tioata me ngā oko whakarewa kia pai ai te haere o te tukanga tipu tioata. Hei tauira, i ngā wāhanga tipu tioata rerekē pēnei i te whakatō, te whakapūpū, te whakapūpū, te tipu rite te diameter me te whakapūpū, me whakahaere tika te nekehanga o ngā tioata purapura me ngā oko whakarewa e tēnei pūnaha kia tutuki ai ngā whakaritenga tukanga o te tipu tioata.
Pūnaha whakahaere pāmahana whakamahana
Koinei tētahi o ngā pūnaha matua o te oumu karaihe kotahi, e whakamahia ana hei whakaputa wera me te whakahaere tika i te pāmahana i roto i te oumu. Ko te nuinga o te wā he mea hanga mai i ngā wāhanga pēnei i ngā whakamahana, ngā pūoko pāmahana, me ngā kaiwhakahaere pāmahana. Ko te whakamahana he mea hanga i ngā rauemi pēnei i te karāpeti parakore-teitei. I muri i te whakawhiti me te whakaiti i te iahiko whakawhiti hei whakanui ake i te iahiko, ka whakaputa te whakamahana i te wera hei whakarewa i ngā rauemi polycrystalline pēnei i te polysilicon i roto i te para. Ka aroturukihia e te pūoko pāmahana ngā huringa pāmahana i roto i te oumu i te wā tūturu, ā, ka tukuna te tohu pāmahana ki te kaiwhakahaere pāmahana. Ka whakahaere tika te kaiwhakahaere pāmahana i te mana whakamahana kia rite ki ngā tawhā pāmahana kua whakaritea me te tohu pāmahana urupare, kia mau tonu ai te pumau o te pāmahana i roto i te oumu, kia whakaratohia ai he taiao pāmahana e tika ana mō te tipu tioata.
Pūnaha korehau
Ko te mahi matua o te pūnaha korehau he waihanga me te pupuri i tētahi taiao korehau i roto i te oumu i te wā e tipu ana te tioata. Ka tangohia te hau me ngā hau poke i roto i te oumu mā roto i ngā papu korehau me ētahi atu taputapu kia eke te pēhanga hau i roto i te oumu ki tētahi taumata tino iti, i raro iho i te 5TOR (torr). Mā tēnei ka ārai i te waikura o te rauemi silicon i ngā pāmahana teitei, ā, ka whakarite i te parakore me te kounga o te tipu tioata. I taua wā anō, he pai hoki te taiao korehau ki te tango i ngā poke pūngāwerewere i puta i te wā e tipu ana te tioata, me te whakapai ake i te kounga o te tioata.
Pūnaha ākona
He mahi tā te pūnaha argon ki te tiaki me te whakahaere i te pēhanga i roto i te oumu i roto i te oumu karaihe kotahi. Whai muri i te whakakorekore, ka whakakīia te hau argon tino parakore (me neke atu i te 6 9 te parakore) ki roto i te oumu. I tetahi taha, ka taea e ia te aukati i te hau o waho ki te tomo ki roto i te oumu, me te ārai i te waikura o ngā rauemi silicon; i tetahi atu taha, mā te whakakī i te hau argon ka taea te pupuri i te pēhanga i roto i te oumu kia pumau, ā, ka whakaratohia he taiao pēhanga e tika ana mō te tipu o te karaihe. Hei tāpiri, ka taea hoki e te rere o te hau argon te tango i te wera i puta i te wā o te tukanga tipu karaihe, ka whai wāhi ki te whakamatao.
Pūnaha whakamatao wai
Ko te mahi a te pūnaha whakamatao wai he whakamatao i ngā wāhanga pāmahana-tiketike o te oumu karaihe kotahi kia mau tonu ai te mahi me te roa o te mahi a te taputapu. I te wā e whakahaerehia ana te oumu karaihe kotahi, te whakamahana,ipu para, ka nui te wera ka puta mai i te hikohiko me ētahi atu wāhanga. Ki te kore e whakamataohia i te wā tika, ka wera rawa te taputapu, ka rerekē te āhua, ka pakaru rānei. Ka tangohia e te pūnaha whakamatao wai te wera o ēnei wāhanga mā te huri i te wai whakamatao kia mau tonu te pāmahana o te taputapu i roto i te awhe haumaru. I taua wā anō, ka taea hoki e te pūnaha whakamatao wai te āwhina ki te whakarerekē i te pāmahana i roto i te oumu hei whakapai ake i te tika o te whakahaere pāmahana.
Pūnaha whakahaere hiko
Ko te pūnaha whakahaere hiko te "roro" o te oumu karaihe kotahi, e aro turuki ana me te whakahaere i te mahi a te taputapu katoa. Ka taea e ia te whiwhi tohu mai i ngā momo pūoko, pērā i ngā pūoko pāmahana, ngā pūoko pēhanga, ngā pūoko tūnga, me ētahi atu, ā, ka whakarite me te whakahaere i te pūnaha tuku miihini, te pūnaha whakahaere pāmahana whakamahana, te pūnaha korehau, te pūnaha argon me te pūnaha whakamatao wai i runga i ēnei tohu. Hei tauira, i te wā o te tukanga tipu karaihe, ka taea e te pūnaha whakahaere hiko te whakarite aunoa i te mana whakamahana kia rite ki te tohu pāmahana e tukuna ana e te pūoko pāmahana; kia rite ki te tipu o te karaihe, ka taea e ia te whakahaere i te tere nekehanga me te koki hurihuri o te karaihe purapura me te oko. I taua wā anō, kei te pūnaha whakahaere hiko hoki ngā mahi tātaritanga hapa me te whakaoho, ka taea te kite i ngā āhuatanga rerekē o te taputapu i te wā tika, me te whakarite i te mahi haumaru o te taputapu.
Wā tuku: Hepetema-23-2024