Isithando somlilo sekristale esinye sisixhobo esisebenzisaisifudumezi segrafayithiukunyibilikisa izinto ze-silicon ze-polycrystalline kwindawo engenagesi (argon) kwaye isebenzisa indlela yeCzochralski ukukhulisa iikristale ezingenanto yakwenza ne-single crystals. Iquka ikakhulu ezi nkqubo zilandelayo:
Inkqubo yokudlulisela oomatshini
Inkqubo yokudlulisa oomatshini yinkqubo esisiseko yokusebenza kwesithando sekristale esinye, esinoxanduva olukhulu lokulawula ukuhamba kweekristale kunyeiziqwenga zomlilo, kuquka ukuphakanyiswa nokujikeleza kweekristale zembewu kunye nokuphakanyiswa nokujikelezaiziqwenga zomliloIngalungisa ngokuchanekileyo iiparameter ezifana nendawo, isantya kunye ne-engile yokujikeleza kweekristale kunye nee-crucibles ukuqinisekisa inkqubela egudileyo yenkqubo yokukhula kwekristale. Umzekelo, kumanqanaba ahlukeneyo okukhula kwekristale afana nokuhlwayela imbewu, ukugoba intamo, ukuxhoma amagxa, ukukhula okulinganayo kunye nomsila, ukuhamba kweekristale zembewu kunye nee-crucibles kufuneka kulawulwe ngokuchanekileyo yile nkqubo ukuze kuhlangatyezwane neemfuno zenkqubo yokukhula kwekristale.
Inkqubo yokulawula ubushushu bokufudumeza
Le yenye yeenkqubo eziphambili ze-single crystal furnace, esetyenziselwa ukuvelisa ubushushu nokulawula ngokuchanekileyo ubushushu kwi-furnace. Iquka ikakhulu izinto ezifana nezifudumezi, izinzwa zobushushu, kunye nezilawuli zobushushu. I-heater idla ngokwenziwa ngezinto ezifana ne-high-purity graphite. Emva kokuba i-alternating current iguqulwe kwaye incitshisiwe ukuze inyuse i-current, i-heater ivelisa ubushushu bokunyibilikisa izinto ze-polycrystalline ezifana ne-polysilicon kwi-crucible. I-temperature sensor ijonga utshintsho lobushushu kwi-furnace ngexesha langempela kwaye idlulisele isignali yobushushu kumlawuli wobushushu. I-temperature controller ilawula ngokuchanekileyo amandla obushushu ngokweeparamitha zobushushu ezibekiweyo kunye nesignali yobushushu bempendulo, ngaloo ndlela igcina uzinzo lobushushu kwi-furnace kwaye ibonelela ngendawo efanelekileyo yobushushu yokukhula kwe-crystal.
Inkqubo yokufunxa umoya
Umsebenzi ophambili wenkqubo yokufunxa umoya kukudala nokugcina imeko-bume yokufunxa umoya kwisithando ngexesha lenkqubo yokukhula kwekristale. Iigesi zomoya kunye nokungcola kwesithando zikhutshwa ngeempompo zokufunxa umoya kunye nezinye izixhobo ukwenza uxinzelelo lwegesi kwisithando lufikelele kwinqanaba eliphantsi kakhulu, ngokubanzi ngaphantsi kwe-5TOR (torr). Oku kunokuthintela ukuba izinto zesilicon zingabi yi-oxidized kumaqondo obushushu aphezulu kwaye kuqinisekiswe ubunyulu kunye nomgangatho wokukhula kwekristale. Kwangaxeshanye, imeko-bume yokufunxa umoya ikwalungele ukususa ukungcola okuguquguqukayo okuveliswa ngexesha lenkqubo yokukhula kwekristale kunye nokuphucula umgangatho wekristale.
Inkqubo yeArgon
Inkqubo ye-argon idlala indima ekukhuseleni nasekulawuleni uxinzelelo olukwisithando somlilo kwisithando somlilo sekristale enye. Emva kokucoca nge-vacuum, igesi ye-argon ecocekileyo kakhulu (ubumsulwa kufuneka bube ngaphezulu kwe-6 9) izaliswa kwisithando somlilo. Kwelinye icala, inokuthintela umoya wangaphandle ukuba ungene kwisithando somlilo kwaye ithintele ukuba izinto ze-silicon zingabi yi-oxidized; kwelinye icala, ukuzaliswa kwegesi ye-argon kunokugcina uxinzelelo olukwisithando somlilo luzinzile kwaye kubonelele ngendawo efanelekileyo yoxinzelelo lokukhula kwekristale. Ukongeza, ukuhamba kwegesi ye-argon kunokususa ubushushu obuveliswa ngexesha lenkqubo yokukhula kwekristale, kudlala indima ethile yokupholisa.
Inkqubo yokupholisa amanzi
Umsebenzi wenkqubo yokupholisa amanzi kukupholisa izinto ezahlukeneyo ezinobushushu obuphezulu ze-single crystal oven ukuqinisekisa ukusebenza okuqhelekileyo kunye nobomi benkonzo yesixhobo. Ngexesha lokusebenza kwe-single crystal oven, i-heater,umnqamlezo, i-electrode kunye nezinye izinto ziya kuvelisa ubushushu obuninzi. Ukuba azipholiswanga ngexesha, izixhobo ziya kushushu kakhulu, zitshintshe okanye zonakale. Inkqubo yokupholisa amanzi isusa ubushushu bezi zinto ngokujikeleza amanzi okupholisa ukuze kugcinwe ubushushu bezixhobo zikwindawo ekhuselekileyo. Kwangaxeshanye, inkqubo yokupholisa amanzi inokunceda ekulungiseni ubushushu kwi-oven ukuphucula ukuchaneka kolawulo lobushushu.
Inkqubo yolawulo lombane
Inkqubo yolawulo lombane "yingqondo" yesithando sekristale esinye, esinoxanduva lokujonga nokulawula ukusebenza kwezixhobo zonke. Ingafumana imiqondiso evela kwiisensa ezahlukeneyo, ezinje ngeesensa zobushushu, iisensa zoxinzelelo, iisensa zesikhundla, njl.njl., kwaye ilungelelanise kwaye ilawule inkqubo yokuhambisa oomatshini, inkqubo yolawulo lobushushu bobushushu, inkqubo ye-vacuum, inkqubo ye-argon kunye nenkqubo yokupholisa amanzi ngokusekelwe kwezi zibonakaliso. Umzekelo, ngexesha lenkqubo yokukhula kwekristale, inkqubo yolawulo lombane ingazilungisa ngokuzenzekelayo amandla obushushu ngokwesignali yobushushu enikwa yisensa yobushushu; ngokukhula kwekristale, inokulawula isantya sokuhamba kunye ne-engile yokujikeleza kwekristale yembewu kunye ne-crucible. Kwangaxeshanye, inkqubo yolawulo lombane ikwanayo nemisebenzi yokuchonga iimpazamo kunye ne-alamu, enokuchonga iimeko ezingaqhelekanga zezixhobo ngexesha kwaye iqinisekise ukusebenza ngokukhuselekileyo kwezixhobo.
Ixesha lokuthumela: Sep-23-2024