Isithando somlilo sekristalu esisodwa siyindlela esebenzisaisifudumezi se-graphiteukuncibilikisa izinto ze-silicon ze-polycrystalline endaweni yegesi engasebenzi kahle (i-argon) futhi kusebenzisa indlela ye-Czochralski ukukhulisa amakristalu angahlukanisiwe. Yakhiwa kakhulu yizinhlelo ezilandelayo:
Uhlelo lokudlulisa ngomshini
Uhlelo lokudlulisa ngomshini luyisistimu yokusebenza eyisisekelo yesithando sekristalu esisodwa, esinomthwalo wemfanelo omkhulu wokulawula ukuhamba kwamakristalu kanyeizitsha zomlilo, okuhlanganisa ukuphakamisa nokujikeleza kwamakristalu embewu kanye nokuphakamisa nokujikelezaizitsha zomlilo. Ingalungisa ngokunembile amapharamitha afana nendawo, isivinini kanye ne-engeli yokujikeleza kwamakristalu nezimbobo zokusika ukuze kuqinisekiswe inqubekela phambili ebushelelezi yenqubo yokukhula kwekristalu. Isibonelo, ezigabeni ezahlukene zokukhula kwekristalu njengokutshala, ukugoba, ukugoba, ukukhula okulinganayo kobubanzi kanye nokugoba, ukunyakaza kwamakristalu nezimbobo zokusika kudinga ukulawulwa ngokunembile yilolu hlelo ukuze kuhlangatshezwane nezidingo zenqubo yokukhula kwekristalu.
Uhlelo lokulawula izinga lokushisa lokushisa
Lena enye yezinhlelo eziyinhloko zesithando somlilo esisodwa sekristalu, esisetshenziselwa ukukhiqiza ukushisa nokulawula ngokunembile izinga lokushisa esithandweni somlilo. Yakhiwe kakhulu yizingxenye ezifana nezifudumezi, izinzwa zokushisa, kanye nezilawuli zokushisa. Isifudumezi sivame ukwenziwa ngezinto ezifana ne-graphite ehlanzekile kakhulu. Ngemva kokuba ugesi oshintshashintshayo ushintshiwe futhi wehliswa ukuze kwandiswe ugesi, isifudumezi sikhiqiza ukushisa ukuze kuncibilikiswe izinto ze-polycrystalline ezifana ne-polysilicon esitsheni esivuthayo. Inzwa yokushisa iqapha izinguquko zokushisa esithandweni somlilo ngesikhathi sangempela futhi idlulisele isignali yokushisa kumlawuli wokushisa. Isilawuli sokushisa silawula ngokunembile amandla okushisa ngokuya ngamapharamitha okushisa abekwe kanye nesignali yokushisa yempendulo, ngaleyo ndlela sigcina ukuzinza kokushisa esithandweni somlilo futhi sinikeze indawo yokushisa efanelekile yokukhula kwekristalu.
Uhlelo lokuhlanza
Umsebenzi oyinhloko wesistimu ye-vacuum ukudala nokugcina indawo ye-vacuum esithandweni ngesikhathi senqubo yokukhula kwekristalu. Amagesi omoya kanye nokungcola esithandweni akhishwa ngamaphampu e-vacuum kanye neminye imishini ukuze ingcindezi yegesi esithandweni ifinyelele ezingeni eliphansi kakhulu, ngokuvamile ngaphansi kwe-5TOR (torr). Lokhu kungavimbela izinto ze-silicon ukuthi zingangcoliswa emazingeni okushisa aphezulu futhi kuqinisekiswe ubumsulwa kanye nekhwalithi yokukhula kwekristalu. Ngesikhathi esifanayo, indawo ye-vacuum nayo ikulungele ukususa ukungcola okuguquguqukayo okukhiqizwa ngesikhathi senqubo yokukhula kwekristalu nokuthuthukisa ikhwalithi yekristalu.
Uhlelo lwe-Argon
Uhlelo lwe-argon ludlala indima ekuvikeleni nasekulawuleni ingcindezi esithandweni esithandweni sekristalu elilodwa. Ngemva kokuhlanza, igesi ye-argon ehlanzekile kakhulu (ubumsulwa kumele bube ngaphezu kuka-69) igcwaliswa esithandweni. Ngakolunye uhlangothi, ingavimbela umoya wangaphandle ukuthi ungene esithandweni futhi ivimbele izinto ze-silicon ukuthi zingabi yi-oxidized; ngakolunye uhlangothi, ukugcwaliswa kwegesi ye-argon kungagcina ingcindezi esithandweni izinzile futhi kuhlinzeke indawo efanele yokucindezela yokukhula kwekristalu. Ngaphezu kwalokho, ukugeleza kwegesi ye-argon nakho kungasusa ukushisa okukhiqizwa ngesikhathi senqubo yokukhula kwekristalu, kudlala indima ethile yokupholisa.
Uhlelo lokupholisa amanzi
Umsebenzi wesistimu yokupholisa amanzi ukupholisa izingxenye ezahlukahlukene zokushisa okuphezulu zesithando sekristalu esisodwa ukuqinisekisa ukusebenza okuvamile kanye nokuphila kwenkonzo yemishini. Ngesikhathi sokusebenza kwesithando sekristalu esisodwa, isifudumezi,isikhuni esivuthayo, i-electrode nezinye izingxenye zizokhiqiza ukushisa okuningi. Uma zingapholiswanga ngesikhathi, imishini izoshisa kakhulu, ishintshe noma yonakale. Uhlelo lokupholisa amanzi lususa ukushisa kwalezi zingxenye ngokujikeleza amanzi okupholisa ukuze kugcinwe izinga lokushisa lemishini lisebangeni eliphephile. Ngesikhathi esifanayo, uhlelo lokupholisa amanzi lungasiza futhi ekulungiseni izinga lokushisa esithandweni somlilo ukuze kuthuthukiswe ukunemba kokulawula izinga lokushisa.
Uhlelo lokulawula kagesi
Uhlelo lokulawula ugesi “luyingqondo” yesithando sekristalu esisodwa, olunesibopho sokuqapha nokulawula ukusebenza kwemishini yonke. Lungathola izimpawu ezivela ezinzwa ezahlukahlukene, njengezinzwa zokushisa, izinzwa zokucindezela, izinzwa zesikhundla, njll., futhi luqondise futhi lulawule uhlelo lokudlulisa ngomshini, uhlelo lokulawula izinga lokushisa lokushisa, uhlelo lwe-vacuum, uhlelo lwe-argon kanye nohlelo lokupholisa amanzi ngokusekelwe kulezi zimpawu. Isibonelo, ngesikhathi senqubo yokukhula kwekristalu, uhlelo lokulawula ugesi lungalungisa ngokuzenzakalelayo amandla okushisa ngokuya ngesignali yokushisa enikezwa yinzwa yokushisa; ngokuya ngokukhula kwekristalu, lungalawula isivinini sokunyakaza kanye ne-engeli yokujikeleza kwekristalu yembewu kanye ne-crucible. Ngesikhathi esifanayo, uhlelo lokulawula ugesi luphinde lube nemisebenzi yokuxilonga amaphutha kanye ne-alamu, engathola izimo ezingavamile zemishini ngesikhathi futhi iqinisekise ukusebenza okuphephile kwemishini.
Isikhathi sokuthunyelwe: Septhemba-23-2024