Cov Lus Qhia Xaiv Cov Khoom Siv Graphite Crucible Uas Muaj TaC Coated

Hauv cov khoom siv loj hlob siv lead ua kub thiab cov khoom siv epitaxy / deposition, lub graphite crucible ua peb lub luag haujlwm ib zaug: ciam teb thermal, qhov sib txuas lus teb, thiab qhov chaw muaj kuab paug. / kev thaiv kev ua qias tuaj. Qhov no yog vim li casCov khoom siv graphite coated TaCtab tom dhau los ua ntau zuj zus - txheej TaC muab peev xwm kub dua, muaj zog tiv taus corrosion, thiab kev tswj hwm zoo dua ntawm kev tsiv teb tsaws chaw tsis huv, khaws cov txiaj ntsig ntawm graphite thaum txo nws qhov tsis muaj zog.

1) Cov teeb meem dab tsi uas TaC txheej tuaj yeem daws tau?

A. Kev Tiv Thaiv Kev Xeb
Piv txwv li, kev loj hlob ntawm SiC thiab cov txheej txheem epitaxy cuam tshuam, cov hom silicon uas muaj qhov kub siab - ua ke nrog hydrogen thiab tej zaum halogen chemistries - tuaj yeem ua rau muaj kev xeb tas mus li thiab kev ua haujlwm tsis zoo ntawm cov khoom graphite. Cov ntawv ceeb toom kev lag luam kuj sau tseg tias nyob rau hauv cov huab cua nplua nuj silicon, corrosive saum toj no 2000 ° C, graphite crucibles yuav lwj heev tom qab tsuas yog ob peb lub voj voog, thaum cov txheej txheem xws li TaC tuaj yeem txhim kho kev ruaj khov.

B. Txo Cov Khoom Me Me thiab Kev Tsiv Mus Los ntawm Cov Pa roj Carbon
Thaum cov khoom me me graphite lossis cov pa roj carbon nkag mus rau hauv qhov chaw loj hlob lossis thaj chaw tso tawm, lawv tuaj yeem tshwm sim ncaj qha ua qhov tsis xws luag, kev suav nrog, qhov ceev ntawm kev hloov pauv ntau dua, thiab tej zaum yuav ua rau muaj kev ua qias tuaj yeem rov qab tau hauv chav. Ua ib txheej thaiv, lub hom phiaj ntawm TaC yog ua kom thermal stability thiab interfacial inertness tswj tau ntau dua. Cov kev tshawb fawb txuas ntxiv kuj qhia txog TaC coatings pab tiv thaiv graphite sublimation / structural degradation thiab txhim kho thermal stability hauv cov chaw loj hlob siv lead ua. ②

C. Lub Qhov Rai Txheej Txheem Dav Dua
Muaj ntau tus neeg siv cov crucibles ua cov khoom siv tau, tab sis hauv kev xyaum lawv ua haujlwm ua cov khoom siv raw."cov tshuab tsim cov xwm txheej ciam teb"Thaum qhov chaw crucible tseem ruaj khov, qhov thermal teb thiab cov pa roj-theem tshuaj tiv thaiv ua rau rov ua dua ntau dua. Thaum cov txheej nplaum tsis txaus - ua rau muaj microcracks lossis localized permeation - cov txheej txheem drift feem ntau pib nyob ntawd. Kev tshawb fawb tshwj xeeb ntawm kev sib txuas ntawm cov txheej txheem - graphite interfacial bonding zog twb tau tham txog nws ua qhov tseem ceeb uas cuam tshuam rau kev ua tau zoo ntawm ib leeg-siv lead ua.

2) Qhov twg zoo tshaj plaws?

• Kub heev, huab cua corrosive heev

• Cov kauj ruam kev loj hlob / kev tso tawm rhiab heev rau cov khoom me me thiab cov hlau tsis huv

• Cov kab ntau lawm uas xav tau lub neej ntev dua thiab kev sib xws nruj dua

3) Yuav Ua Li Cas Xaiv Ib Lub Crucible Graphite Uas Muaj TaC Coated

Kev txheej txheem TaC tsis yog ib txoj hauv kev "ib qho loj-haum-txhua tus". Siv CVD ua piv txwv, cov ntaub ntawv tau muab kev sib tham txog CVD deposition thiab kev ua tau zoo ntawm TaC / SiC ntawm graphite substrates.

Cov kev sib txawv ua rau muaj cov txiaj ntsig sib txawv:

• Qhov ceev thiab permeability:qhov txheej tuab dua, qhov zoo dua nws thaiv qhov xeb qeeb los ntawm cov pa roj / pa.

• Thickness thiab kev ntxhov siab:thaum cov tuab nce ntxiv, kev ntxhov siab thermal thiab kev pheej hmoo tawg kuj nce ntxiv, xav tau kev tswj hwm cov txheej txheem zoo dua.

• Kev kho tau thiab kev sib xws:Kev tsim khoom ntau ntau nyob ntawm seb muaj pes tsawg daim thiab seb puas ua haujlwm dua/rov txheej dua tau zoo.

4） Cov Qauv Tshuaj Xyuas Tseem Ceeb

• Qhov tsos thiab qhov xwm txheej ntawm qhov chaw:qhov, qhov poob, cov qauv "teev/ntses nplai", qhov tsis zoo nkauj/grey hauv zos

• Thickness thiab uniformity:cov npoo, cov ces kaum, thiab hauv qab yog cov cheeb tsam uas yuav nyias tshaj plaws

• Lub zog sib txuas / thermal shock tsis kam:yuav tsum tau txhais cov txheej txheem kuaj kom meej thiab cov txheej txheem pov tseg / tsis lees txais

• Microcracks thiab porosity:(sau ua ke nrog cov saum toj no hauv kev xyaum)

• Kev tswj kev ua qias tuaj:cov khoom tsis huv ntawm cov hlau, cov seem halogen, thiab qib kev huv ntawm cov khoom me me yuav tsum taug qab tau