Aratohu Kōwhiringa Para Whakarewa Karāpiti Panipania TaC

I roto i ngā taputapu tipu tioata pāmahana-tiketike me te epitaxy/whakatakotoranga, e toru ngā mahi a te oko karāhe i te wā kotahi: he rohe wera, he atanga tauhohenga, me te pūtake poke pea. / ārai poke. Koia te takeNgā oko whakarewa karāpeti kua pania ki te TaCkei te piki haere te rongonui—ka taea e te paparanga TaC te tuku i te kaha pāmahana teitei ake, kaha ake te ātete ki te waikura, ā, he pai ake te pehi i te hekenga o te poke, me te pupuri tonu i ngā painga o te karāpeti me te whakaiti i ōna ngoikoretanga.

1) He aha ngā raruraru ka taea e te paninga TaC te whakaoti?

A. Ātete ki te Waikura
Hei tauira, mā te whakamahi i te tipu SiC me ngā tukanga epitaxy e pā ana, ka taea e ngā momo kei roto te silicon i te pāmahana teitei—me te hauwai me ngā matū halogen pea—te arahi ki te waikura tonu me te hekenga o te mahi o ngā wāhanga graphite. E kī ana hoki ngā pūrongo ahumahi i roto i ngā āhuarangi waikura nui-silicon i runga ake i te 2000°C, ka tino pirau ngā ipu graphite i muri i ētahi huringa noa iho, engari ka taea e ngā paninga pēnei i te TaC te whakapai ake i te roa o te ora.

B. Ngā Matūriki Whakaitihia me te Hekenga Waro
Kia uru atu ngā matūriki karāpeti, te hekenga waro rānei ki te atanga tipu, ki te rohe whakatakotoranga rānei, ka puta tika mai hei hapa, hei whakaurunga, hei kiato nekenekehanga teitei ake, ā, ka puta pea he poke rūma kore e taea te whakakore. Hei paparanga ārai, ko te whāinga o te TaC he whakahaere i te pumau o te wera me te kore e taea te whakahaere i te āputaputa. Kei te pūrongohia hoki e ngā rangahau tonu te āwhina a ngā paninga TaC ki te pehi i te whakangawari o te karāpeti/te pirau hanganga me te whakapai ake i te pumau o te wera i roto i ngā taiao tipu tioata. ②

C. He Matapihi Tukanga Whānui Ake
He tokomaha te hunga e whakaaro ana ki ngā ipu para hei mea e pau ana, engari i roto i te mahi he rite tonu ki te"ngā kaihanga āhuatanga rohe"Ina pumau tonu te mata o te ipu para, ka kaha ake te whakahokinga o te mara wera me ngā tauhohenga hau-āhua. Ina kore e ranea te piri o te paninga—ka puta he kapiti moroiti, he urunga ā-rohe rānei—ka tīmata te nekenekehanga o te tukanga ki reira. Kua kōrerohia kētia tēnei e ngā rangahau motuhake mō te kaha o te hononga ā-kanohi paninga-karāpiti hei taurangi matua e pā ana ki te mahi tipu o te tioata kotahi.

2) Kei hea te mea tino pai?

• Ngā āhuarangi tino pāmahana teitei, tino waikura

• He tino tairongo ngā taahiraa tipu/whakatakoto ki ngā matūriki me ngā poke konganuku

• Ngā raina whakaputa nui e hiahia ana kia roa ake te ora me te pumau tonu

3) Me pēhea te whiriwhiri i tētahi ipu parai kua pania ki te TaC

Ehara te paninga TaC i te huarahi tukanga kotahi "kotahi te rahi mō te katoa". Mā te whakamahi i te CVD hei tauira, kua whakaratohia e ngā tuhinga he matapakinga pūnaha mō te whakatakotoranga CVD me te whakaahuatanga mahi o TaC/SiC ki runga i ngā papa karāhe.

Ka puta ngā hua rerekē i ngā huarahi rerekē:

• Te mātotoru me te uruhanga:ka nui ake te matotoru o te paninga, ka pai ake te aukati i te waikura puhoi e uru ana ki roto e ngā hau/kohu.

• Te matotoru me te ahotea:I te piki haere o te matotoru, ka piki ake hoki te mōrearea o te ahotea wera me te pakaru, me pai ake te whakahaere tukanga.

• Te āheinga ki te whakatika me te ōritetanga:Ko te hanga papatipu e whakawhirinaki ana ki te ōritetanga o ia puranga, me te āheinga hoki ki te mahi anō/paninga anō kia pono.

4）Ngā Paearu Tirotiro Matua e Haere Mai Ana

• Te āhua me te āhua o te mata:he pū kōhao, he rua, he kakano "unahi/unahi ika", he rerekē te tae/hina o te rohe

• Matotoru me te ōritetanga:ko ngā taha, ko ngā kokonga, me raro ngā wāhi tino kikokore

• Kaha here / ātete ki te ru wera:me tautuhi ngā tikanga whakamātautau mārama me ngā paearu para/whakakorenga

• Ngā kapiti iti me te porosity:(kua whakarārangihia ngātahi me ngā mea o runga ake nei i roto i te mahi)

• Te whakahaere poke:me taea te whai i ngā poke whakarewa, ngā toenga halogen, me te taumata ma o ngā matūriki.