Umhlahlandlela Wokukhetha I-Graphite Embozwe Nge-TaC

Emishinini yokukhula kwekristalu eshisa kakhulu kanye ne-epitaxy/deposition, i-graphite crucible idlala izindima ezintathu ngesikhathi esisodwa: umngcele wokushisa, isikhombimsebenzisi sokusabela, kanye nomthombo wokungcola okungenzeka. / isithiyo sokungcola. YingakhoIzitsha ze-graphite ezimbozwe nge-TaCziya ngokuya zivamile—ungqimba lwe-TaC lunikeza amandla okushisa aphezulu, ukumelana nokugqwala okunamandla, kanye nokunciphisa kangcono ukufuduka kokungcola, kugcina izinzuzo ze-graphite ngenkathi kunciphisa ubuthakathaka bayo.

1) Yiziphi Izinkinga Ezingaxazululwa Yi-TaC Coating?

A. Ukumelana Nokugqwala
Uma sibheka ukukhula kwe-SiC kanye nezinqubo ezihlobene ne-epitaxy njengesibonelo, izinhlobo eziqukethe i-silicon ekushiseni okuphezulu—kanye ne-hydrogen kanye namakhemikhali e-halogen okungenzeka ukuthi akhona—kungaholela ekugqwaleni okuqhubekayo kanye nokuwohloka kokusebenza kwezingxenye ze-graphite. Imibiko yezimboni iphinde iphawule ukuthi ezindaweni ezigcwele i-silicon, ezigqwalisayo ezingaphezu kuka-2000°C, izinto eziqongelela i-graphite zingase zonakale kakhulu ngemva kwemijikelezo embalwa kuphela, kuyilapho izinto zokumboza ezifana ne-TaC zingathuthukisa kakhulu ukuqina.

B. Izinhlayiya Ezincishisiwe Nokufuduka Kwekhabhoni
Uma izinhlayiya ze-graphite noma ukufuduka kwe-carbon kungena endaweni yokukhula noma indawo yokubeka, zingabonakala ngqo njengeziphambeko, ukufakwa, ubuningi obukhulu bokuhlukana, futhi zingase zibangele ngisho nokungcoliswa kwegumbi okungenakuguqulwa. Njengesendlalelo sokuvimbela, umgomo we-TaC ukwenza ukuzinza kokushisa kanye nokungangeni kahle kobuso kulawuleke kakhudlwana. Izifundo eziqhubekayo zibika nokuhlanganiswa kwe-TaC okusiza ukucindezela ukuncishiswa kwe-graphite/ukuwohloka kwesakhiwo kanye nokuthuthukisa ukuzinza kokushisa ezindaweni zokukhula kwekristalu. ②

C. Iwindi Lenqubo Ebanzi
Abantu abaningi baphatha izitsha ezibaziwe njengezidliwayo, kodwa empeleni zisebenza njengezinto ezidliwayo."amajeneretha anemibandela yomngcele.Uma indawo ebhodweni ihlala izinzile, ukusabela kwensimu yokushisa kanye nesigaba segesi kuyaphindaphindeka kakhudlwana. Lapho ukunamathela kokubopha kunganele—okuholela ekuqhekekeni okuncane noma ekungeneni kwendawo—ukunyakaza kwenqubo kuvame ukuqala lapho. Ucwaningo oluzinikele ngamandla okubopha phakathi kwe-coating-graphite seluxoxe ngakho njengokuguquguquka okubalulekile okuthinta ukusebenza kokukhula kwekristalu elilodwa.

2) Kukuphi Okufanelekile Kakhulu?

• Izimo ezishisa kakhulu, ezigqwala kakhulu

• Izinyathelo zokukhula/zokubekwa phansi zizwela kakhulu ezinhlayiyeni kanye nokungcola kwensimbi

• Imigqa yokukhiqiza ephezulu edinga isikhathi eside sokuphila kanye nokuvumelana okuqinile

3) Indlela Yokukhetha I-TaC Coated Graphite Crucible

Ukugqoka i-TaC akuyona indlela eyodwa yenqubo "efanela bonke ngobukhulu obufanayo". Kusetshenziswa i-CVD njengesibonelo, izincwadi zinikeze ingxoxo ehlelekile ngokufakwa kwe-CVD kanye nokucaciswa kokusebenza kwe-TaC/SiC kuma-graphite substrates.

Izindlela ezahlukene ziholela emiphumeleni ehlukene:

• Ubuningi kanye nokuvuleka kwamanzi:Uma ungqimba lujiyile, kungcono ukuthi luvimbele ukugqwala kokungena kancane kwamagesi/imihwamuko.

• Ubukhulu nokucindezeleka:njengoba ukujiya kukhuphuka, ukucindezeleka kokushisa kanye nengozi yokuqhekeka nakho kuyakhuphuka, okudinga ukulawulwa okungcono kwenqubo.

• Ukulungiswa kanye nokungaguquguquki:Ukukhiqizwa ngobuningi kuncike ekuqineni kwe-batch-to-batch nokuthi ngabe ukuphinda usebenze/ukuphinda ugcobe kungenziwa ngokuthembeka.

4）Izindlela Eziyinhloko Zokuhlola Ezingenayo

• Ukubukeka nesimo sobuso:imigodi, imigodi, ukuthungwa “kwezikali/kwezikali zenhlanzi”, ukushintsha kombala/ukuba mpunga endaweni ethile

• Ukujiya kanye nokufana:imiphetho, amakhona, kanye nephansi yizindawo okungenzeka kakhulu ukuthi zibe zincane

• Amandla ebhondi / ukumelana nokushaqeka kokushisa:izindlela zokuhlola ezicacile kanye nezindlela zokulahla/zokwenqaba kumele zichazwe

• Ukuqhekeka okuncane kanye nokuvuleka kwesikhumba:(kubhalwe kanye nalokhu okungenhla ngokusebenza)

• Ukulawulwa kokungcola:ukungcola kwensimbi, izinsalela ze-halogen, kanye nezinga lokuhlanzeka kwezinhlayiya kufanele konke kulandelelwe