Gwaro Rekusarudza Graphite Yakaputirwa neTaC

Mumidziyo yekukura kwekristaro inodziya zvakanyanya uye epitaxy/deposition, graphite crucible inoita mabasa matatu panguva imwe chete: muganhu wekupisa, reaction interface, uye potential complexity source. / chinodzivirira kusvibiswa. NdosakaZvigadziko zvegrafiti zvakaputirwa neTaCzviri kuwedzera kuwanda—TaC layer inopa kugona kwakanyanya kupisa, kuramba kwakasimba kwengura, uye zviri nani kudzvinyirirwa kwekutamiswa kwetsvina, zvichichengetedza zvakanakira zvegraphite ukuwo zvichideredza kusasimba kwayo.

1) Matambudziko api anogona kugadziriswa neTaC Coating?

A. Kuramba Kuora
Tichitora kukura kweSiC uye maitiro akafanana epitaxy semuenzaniso, mhando dzine silicon pakupisa kwakanyanya—pamwe chete nehydrogen uye zvinogona kunge zviri halogen chemistryries—zvinogona kutungamira mukuora kuri kuramba kuchiitika uye kudzikira kwekushanda kwezvikamu zvegraphite. Mishumo yeindasitiri inotaurawo kuti munzvimbo dzine silicon yakawanda, inoparadza iri pamusoro pe2000°C, graphite crucibles dzinogona kuora zvakanyanya mushure menguva shoma chete, nepo machira akadai seTaC achigona kuvandudza kugara kwenguva refu.

B. Zvidimbu Zvakaderedzwa uye Kufamba kweKabhoni
Kana zvidimbu zvegraphite kana kabhoni zvapinda mukukura kana nzvimbo yekuisa zvinhu, zvinogona kuoneka zvakananga sezvikanganiso, zvinhu zvinosanganisirwa, huwandu hwakawanda hwe dislocation, uye zvinogona kutokonzera kusvibiswa kwekamuri kusingadzoreki. Sechidziviriro, chinangwa cheTaC ndechekuita kuti kugadzikana kwekupisa uye kusagadzikana kweinterfacial kuve nyore kudzora. Zvidzidzo zviri kuenderera mberi zvinoshumawo kuti TaC coatings inobatsira kudzvinyirira graphite sublimation/structural degradation uye kuvandudza kugadzikana kwekupisa munzvimbo dzekukura kwekristaro. ②

C. Hwindo reMaitiro Akakura
Vanhu vazhinji vanoona zvimedu zvechibage sezvinhu zvinodyiwa, asi mukuita kwavo vanoita se"majenareta emamiriro emuganhu. ”Kana nzvimbo inonamira pamoto ikaramba yakasimba, simba rekupisa uye gasi-phase reactions zvinova nyore kudzokorora. Kana kunamatira kwe coating kusina kukwana—zvichikonzera kutsemuka kwe microcracks kana kuyerera kwe localized—process drift inowanzotanga ipapo. Tsvagiridzo yakatsaurirwa pamusoro pe coating-graphite interfacial bonding strength yakatokurukura nezvayo sechinhu chakakosha chinokanganisa single-crystal growth performance.

2) Ndeipi Inonyanya Kushandiswa?

• Mamiriro ekunze ane kupisa kwakanyanya, uye anoparadza zvakanyanya

• Matanho ekukura/kudonhedza zvinhu anonyanya kubatwa nezvidimbu uye tsvina yesimbi

• Mitsetse yekugadzira yakawanda inoda hupenyu hwakareba uye kugadzikana kwakasimba

3) Maitiro Ekusarudza TaC Coated Graphite Crucible

Kuputira TaC hakusi nzira imwe chete yekuita "chinhu chimwe chete chinokodzera zvese". Tichishandisa CVD semuenzaniso, mabhuku akapa hurukuro yakarongeka pamusoro pekuiswa kweCVD uye hunhu hwekushanda kweTaC/SiC pa graphite substrates.

Nzira dzakasiyana dzinopa mhedzisiro dzakasiyana:

• Kuwanda uye kuvhurika kwemvura:Kana chifukidziro chacho chikanyanya kusimba, zvinoita kuti chidzivise ngura inononoka kuyerera nemagasi/utsi.

• Ukobvu uye kushushikana:ukobvu hwacho huchikwira, kushushikana kwekupisa uye njodzi yekutsemuka zvinokwirawo, zvichida kuti maitiro acho ave nani.

• Kugadziriswa uye kuenderana:Kugadzirwa kwehuwandu kunoenderana nekuenderana kwehuwandu hwezvinhu uye kana kugadzirisa/kudzoreredza zvinhu kunogona kuitwa nenzira yakavimbika.

4） Maitiro Akakosha Ekuongorora Anouya

• Chitarisiko uye mamiriro epamusoro:maburi ane maburi, maburi ane maburi, magadzirirwo e "maburi/maburi ehove", kusviba kweruvara/ruvara rwegirini munzvimbo iyoyo

• Ukobvu uye kufanana:mipendero, makona, uye pasi ndizvo zvinonyanya kuonda

• Simba reBond / Kudzivirira kupisa:nzira dzekuedza dzakajeka uye zvinodiwa zvekurasa/kuramba zvinofanirwa kutsanangurwa

• Kutsemuka kwemukati uye kuvhurika kwemukati:(zvakanyorwa pamwe chete nezviri pamusoro apa zvichiri kuitwa)

• Kudzora kusvibiswa:tsvina yesimbi, marara e halogen, uye mwero wekuchena kwezvikamu zvese zvinofanirwa kuteverwa