Pūngao VETKo te kawe karāpeti tukanga PECVD he mea pau kounga teitei i hangaia mō te tukanga PECVD (plasma enhanced chemical vapor deposition). He mea hanga tēnei kawe karāpeti ki te rauemi karāpeti tino parakore, tino matotoru, he ātete pāmahana teitei, he ātete waikura, he pumau āhua me ētahi atu āhuatanga, ka taea te whakarato i tētahi tūāpapa kawe pumau mō te tukanga PECVD, hei whakarite i te ōritetanga me te papatahi o te whakatakotoranga kiriata angiangi.
Ko ngā kaikawe karāpiti mō te tukanga PECVD he whai ake nei ngā āhuatanga:
▪ Teitei o te parakore: he tino iti te poke, e ārai ana i te poke o te kiriata, ā, e whakarite ana i te kounga o te kiriata.
▪ Teitei o te mātotoru: te nui o te mātotoru, te kaha ā-mīhini, ka taea te tu atu i te pāmahana teitei me te pēhanga teitei o te taiao PECVD.
▪ He pai te pumau o ngā āhuatanga: he iti noa te panonitanga o ngā āhuatanga i te pāmahana teitei, kia mau ai te pumau o te tukanga.
▪ He kawe wera tino pai: he pai te whakawhiti wera hei ārai i te wera nui o te wafer.
▪ He ātete kaha ki te waikura: ka taea te ātete ki te horo o ngā hau waikura me te plasma.
▪ Ratonga ritenga: ka taea te whakarite i ngā kaikawe karāhe o ngā rahi me ngā āhua rerekē kia rite ki ngā hiahia o te kiritaki.
Rauemi karāpiti mai i SGL:
| Tawhā noa: R6510 | |||
| Rārangi | Paerewa whakamātautau | Uara | Wāhanga |
| Rahi witi toharite | ISO 13320 | 10 | µm |
| Kīanga papatipu | DIN IEC 60413/204 | 1.83 | karamu/henitimi3 |
| Pūngao tuwhera | DIN66133 | 10 | % |
| Rahi waenga o ngā pūwero | DIN66133 | 1.8 | µm |
| Āheitanga uruhanga | DIN 51935 | 0.06 | henimita/hekona |
| Te pakeketanga o Rockwell HR5/100 | DIN IEC60413/303 | 90 | HR |
| Ātete hiko motuhake | DIN IEC 60413/402 | 13 | μΩm |
| Kaha piko | DIN IEC 60413/501 | 60 | MPa |
| Kaha pēhanga | DIN 51910 | 130 | MPa |
| Te modulus a Young | DIN 51915 | 11.5×10³ | MPa |
| Te whakawhanuitanga wera (20-200 ℃) | DIN 51909 | 4.2X10-6 | K-1 |
| Te kawe wera (20℃) | DIN 51908 | 105 | Wm-1K-1 |
He mea hanga motuhake mō te hanga pūtau pūngao rā tino whai hua, hei tautoko i te tukatuka angiangi rahi G12. Mā te hoahoa kawe kua arotauhia ka nui ake te kaha whakaputa, ka taea ai te piki ake o ngā reiti hua me te whakaiti i ngā utu whakaputa.
| Taonga | Momo | Kaikawe tau wafer |
| Waka Grephite PEVCD - Te raupapa 156 | 156-13 poti grephite | 144 |
| 156-19 poti grephite | 216 | |
| 156-21 poti grephite | 240 | |
| 156-23 poti karāhe | 308 | |
| Waka Grephite PEVCD - Te raupapa 125 | Waka grephite 125-15 | 196 |
| 125-19 poti grephite | 252 | |
| 125-21 poti graphite | 280 |
