Chikepe cheSiC Wafer che4″ 6″ 8″ cheHorizontal Furnace

Chikepe cheSiC Wafer chine 4" 6" 8" cheMoto Wakatsetseka

Chikepe cheSiC chevira rakatsetsekainonyanya kushandiswa pakutsigira nekutakura mawafer mukupisa kwakanyanya kwemawafer e semiconductor akadai sekupararira, oxidation, uye annealing. Kushanda kwawo kunokanganisa zvakananga kunaka kwechigadzirwa chewafer uye kushanda zvakanaka kwekugadzirwa.

Magadzirirwo echikepe chesilicon carbide wafer:
Kazhinji ine chimiro chakaita sechinotsemuka kana kuti chakaita sekamu;
Nzvimbo dzakawanda dzekuisa nekuparadzanisa mawafer;
Yakagadzirirwa kufunga nezvekupararira kwegasi, ichivimbisa kupisa nekutonhodza zvakaenzana;
Yakakodzera vira rakamira uye vira rakatwasuka;
Yakagadzirirwa saizi dzakasiyana dzakadai se3inch, 4inch, 6inch, 8inch, 12inch wafers.

Mabhoti eVET Energy esilicon carbide wafer akagadzirwa achishandisa tekinoroji yepamusoro yekupisa sintering uye akagadzirirwa kusangana nezvinodiwa zvekutakura zvinhu zvakanyanya zvekugadzirwa kwe semiconductor yepamusoro. Zvakanakira zvehunyanzvi zvawo zvinonyanya kuratidzwa muzvinhu zvinotevera:

1. Kuchena Kwakanyanya uye Kusvibiswa Kwakaderera Zvikuru
Tichishandisa zvinhu zvakabikwa zvine hutsanana hwakanyanya, tinova nechokwadi chekuti chigadzirwa ichi chine simbi shoma (isingasviki 1 ppm yeNa, K, Fe, uye Ca). Mvura shoma pakupisa kwakanyanya inodzivirira kusvibiswa kwewafer, zvichiita kuti ive negoho rakakura uye yakavimbika, zvichiita kuti ive sarudzo yakakodzera kune avo vari kuedza kuita zvinhu nemazvo.
2. Kushanda Kwakanaka Kwekupisa uye Kugadzikana
Chikepe chedu cheSiC wafer chine simba guru rekupisa uye chinogona kuramba kupisa zvakanyanya. Chinogona kutsungirira kuchinja-chinja kwekupisa kubva patembiricha yemukamuri kusvika pa1600℃ pasina kutsemuka kana kushanduka, zvichiita kuti chidzokororwe uye chigare zvakanaka, zvichideredza zvakanyanya nguva yekushanda isina kurongwa nekuda kwematambudziko ekutakura.
3.Kuramba Kusina Kunaka Kwengura uye Simba reMichina
Kuomarara kwakanyanya uye kuramba kupfeka kwakasimba, pamwe chete nekudzivirira zvakanyanya mamiriro ekunze ane acidic nealkaline, zvinopfuura quartz negraphite. Simba rayo remuchina rinodzivirira kugadzirwa kwezvidimbu panguva yekushandiswa otomatiki, zvichiwedzera hupenyu hwayo hwekushanda uye zvichideredza mari yekushandisa.
4. Dhizaini Yakarurama uye Kuenderana Kwakanaka Kwazvo
Tichishandisa matekinoroji epamusoro ekuumba nekugadzirisa, tinoona kuti chikepe chega chega chewafer chine saizi chaiyo uye kurongeka kwepamusoro, zvichiita kuti pave nenzvimbo yakafanana pakati pewafer uye mhepo inofamba zvakanaka.

Kuchenesa nekuchengetedza chikepe cheSiC wafer:
Zvinoda kucheneswa nguva dzose kubvisa zvinhu zvinogona kunge zvakaora;
Inoshandisa nzira dzekuchenesa dzakagadzirwa kuti isakuvara;