Paddle yeSiC Cantilever yeAdvanced yeKugadzira Wafer

Paddle yeSiC Cantilever Yepamusoro yekugadzira Wafer Mufananidzo Wakaratidzwa

Tsananguro pfupi:

Chidzitiro cheAdvanced SiC Cantilever Paddle cheWafer Processing chakatangwa nevet-china chinoshandisa zvinhu zveSiC zvemhando yepamusoro kuti chiwedzere kushanda zvakanaka uye kunyatsogadzirwa kwewafer. Chidzitiro cheVet-china cantilever paddle chine simba guru rekudzivirira kupisa uye ngura, zvichiita kuti chive chakakodzera kubata wafer zvakanaka munzvimbo dzakaoma dzekugadzira, zvichiita kuti ive sarudzo yakanaka yekuvandudza goho rekugadzira.

Tumira email kwatiri Dhaunirodha sePDF

Ruzivo rweChigadzirwa

Matagi eChigadzirwa

YepamusoroChikepe cheSiC CantileverKugadziriswa kweWafer kwakagadzirwa nevet-china kunopa mhinduro yakanaka kwazvo yekugadzira semiconductor. Iyi cantilever paddle yakagadzirwa nezvinhu zveSiC (silicon carbide), uye kuoma kwayo kwakanyanya uye kuramba kupisa kunoita kuti irambe ichishanda zvakanaka munzvimbo dzinopisa zvakanyanya uye dzinopisa. Dhizaini yeCantilever Paddle inobvumira wafer kutsigirwa zvakavimbika panguva yekugadzirisa, zvichideredza njodzi yekupwanyika nekukuvadzwa.

Chikepe cheSiC Cantileverchinhu chakakosha chinoshandiswa mukugadzira michina ye semiconductor senge oxidation furnace, diffusion furnace, uye annealing furnace, chinonyanya kushandiswa ndechekuisa uye kuburitsa wafer, kutsigira uye kutakura wafers panguva yekupisa kwakanyanya.

Zvivakwa zvakafananayeSiCcantitileverpwedzera: Chivako che cantilever, chakasimbiswa kune rimwe divi uye chisina kuvharwa kune rimwe divi, chinowanzova nechimiro chakati sandara uye chakaita sechikwambo.

VET Energy inoshandisa zvinhu zvesilicon carbide zvakagadziriswazve kuti ive nechokwadi chekuti zvinhu izvi zvakanaka.

Hunhu hwepanyama hweSilicon Carbide Yakagadziriswazve
Pfuma	Kukosha Kwakajairika
Tembiricha yekushanda (°C)	1600°C (ine okisijeni), 1700°C (nzvimbo inoderedza kupisa)
Zviri mukati meSiC	> 99.96%
Zvemukati zveSi zvemahara	< 0.1%
Kuwanda kwehuwandu	2.60-2.70 g/cm³
Kuoneka kwekureruka	< 16%
Simba rekudzvanya	> 600MPa
Simba rekukotama rinotonhora	80-90 MPa (20°C)
Simba rinopisa rekukotama	90-100 MPa (1400°C)
Kuwedzera kwekupisa @1500°C	4.70 10^-6/°C
Kufambisa kwekupisa @1200°C	23W/m•K
Modulus yakasununguka	240 GPa
Kudzivirira kupisa kwekupisa	Zvakanaka kwazvo