Chikepe cheQuartz Chakachena Kwazvo Chekugadzirisa Wafer

Tsananguro pfupi:

Simba reVET kuchena kwakanyanya zvikepe zve quartz Zvakagadzirirwa kushandiswa semiconductor uye solar wafer. Zvichishandiswa quartz yemhando yepamusoro, zvikepe izvi zvinopa kugadzikana kwakanaka kwekupisa, kuramba makemikari, uye kushanda zvakanaka pasina kusvibiswa kwemaitiro akasiyana-siyana ekupisa kwakanyanya.

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Ruzivo rweChigadzirwa

Matagi eChigadzirwa

Tsananguro yeChigadzirwa

Chikepe cheQuartz Waferchishandiso chakakosha mukugadzira ma semiconductor, kugadzira ma cell e photovoltaic uye kutsvaga nekugadzira zvinhu zvepamusoro, chakagadzirirwa kutamiswa kwe wafer uye kuiswa munzvimbo dzakagadzikana mukupisa kwakanyanya. Chigadzirwa ichi chakagadzirwa ne ultra-high purity fused silica (SiO2), ine simba rekudzivirira kupisa, kugadzikana kwemakemikari uye hunhu hwe ultra-low simbi, yakakodzera ku diffusion furnace, oxidation furnace, PECVD/LPCVD nezvimwe zvishandiso, zvinoshandiswa zvakanyanya mu wafer coating, ion implantation, high temperature annealing nezvimwe zvinhu zvepakati.

Mabhenefiti Akakosha echikepe che quartz cheVET Energy:

Zvinhu zvakachena zvakanyanya
Kuchena ≥99.99%: Kusachena (Na, K, Fe, nezvimwewo) <5ppm, zvichidzivirira kusvibiswa kwewafer uye zvinovimbisa goho remachipisi.
Mvura shoma uye kunyungudika: pamusoro payo pakakweshwa zvakanyanya (Ra≤0.4μm) kuderedza kunamira kwezvimedu uye kusaririra kwegasi.
Kugadzikana kwekupisa kwakanyanya
Muganho wekupisa: Tembiricha yekushanda kwenguva refu ye1100℃, nguva pfupi yepamusoro ye1300℃, hapana kuchinja, hapana kunaya kwemvura kwekristaro.
Kuwanda kwekuwedzera kwekupisa kwakaderera (5.5x10-7/℃), kudzivirira kupisa kwakanyanya, kunogona kuchinjika nekukwira nekukurumidza uye kudonha kwekupisa (semuenzaniso RTP rapid annealing).
Dhizaini chaiyo yekuvaka
Kunyatsojeka kwenzvimbo ± 0.1mm: kufananidza mawafer ane 2” kusvika 12”, kukanganisa kwekuenzana kwenzvimbo <0.05mm, kuve nechokwadi chekuti mawafer haana kukanganiswa.
Kutakura kwakanyanya: Kutakura kwakanyanya kwemawafers makumi mashanu (kana tichitarisa mawafers e12”) muchikepe chimwe chete, zvichitsigira kutamiswa kwakasimba kwemawafers matete (≥100um).
Kusashanda kwemakemikari
Kuramba ngura: Kuramba acid (kunze kweHF), alkali uye organic solvent ngura, inoenderana nemaitiro ekuchenesa eCMP.
Kusimba kwegasi kwakanaka: Mwero wekubuda kwemvura <5x10-10 Pa.m3/s, yakakodzera nzvimbo dzinopisa uye dzinodzivirira gasi.
Hupenyu hurefu uye kugona kutarisirwa
Nguva yekurarama ≥ 5000 macycles (mamiriro ekushanda akajairika), pamusoro pechinhu ichi chinogona kucheneswa uye kushandiswa kakawanda, zvichideredza mutengo wose.
Dhizaini yemodular: inotsigira kutsiva zvishoma (semuenzaniso zino rechikepe chimwe chete), ichideredza nguva yekushanda.

Tinopa nzvimbo dzakajeka uye dzakanyorova zvichienderana nezvinodiwa nevatengi:

Ruzivo rweKambani

Ningbo VET Energy Technology Co., Ltd ibhizinesi repamusoro-soro rinotarisa pakugadzirwa nekutengesa zvinhu zvepamusoro-soro, zvinhu netekinoroji zvinosanganisira graphite, silicon carbide, ceramics, kurapwa kwepamusoro senge SiC coating, TaC coating, girazi carbon coating, pyrolytic carbon coating, nezvimwewo, zvigadzirwa izvi zvinoshandiswa zvakanyanya mu photovoltaic, semiconductor, new energy, metallurgy, nezvimwewo.

Chikwata chedu chehunyanzvi chinobva kumasangano epamusoro ekutsvagisa emuno, uye chakagadzira matekinoroji akawanda ane patent kuti chive nechokwadi chekuti chigadzirwa chinoshanda uye chemhando yepamusoro, chinogonawo kupa vatengi mhinduro dzehunyanzvi.