CVD Coatings yeAdvanced Semiconductor Processing
Zvakagadzirwa kuti zvikwanise kugadzira zvinhu zvakasiyana-siyana, machira edu eChemical Vapor Deposition (CVD) Silicon Carbide (SiC), Tantalum Carbide (TaC), uye Pyrolytic Carbon (PyC) anopa kusagadzikana kwakanyanya kwemakemikari, kugadzikana kwakanyanya kwekupisa, uye kuchena kwakanyanya (<5 ppm). Akagadzirwa kuchengetedza graphite neceramic substrates dzakachena zvakanyanya kubva kuplasma ine simba, magasi ekugadzirisa, uye kupisa kwakanyanya, machira edu epamusoro anoderedza kugadzirwa kwezvikamu uye anowedzera hupenyu hwezvikamu muSilicon/SiC Epitaxy, MOCVD, Kuchekwa kwePlasma, uye Kukura kweMonocrystalmafomu.
Kusvibiswa kwesimbi kwakasimbiswa neGDMS kudzivirira kusvibiswa kwewafer mumabasa akakosha.
Maumbirwo ekristaro akakora anodzivirira kubva ku halogen plasma (CF₄, NF₃, Cl₂) uye magasi anoparadza.
Kudzora kwakasimba kweCTE kunobvisa kutsemuka kweganda uye kuputika kweganda kana paine kupisa kwakanyanya.
| Rudzi rwekuputira | Chinhu Chinokosha Chehunyanzvi | Kushandiswa Kwekutanga Kwemaitiro |
|---|---|---|
| Kuputira kweCVD SiC | Kupisa kwakanyanya, kuramba kukuru kwekukura kweropa muplasma | Dry Etch, Si Epitaxy, MOCVD, Kukura kweCrystal |
| Kuputira kweCVD TaC | Kudzivirira kupisa kwakanyanya (>2000°C), H₂/SiH₄ chidziviriro chengura | Kukura kweSiC Epitaxy, Single-Crystal SiC PVT |
| Kuputira PyC | Kuvharwa kwegasi rinopinda mumhepo, pamusoro pekabhoni inotsvedzerera zvikuru | Kudzivirira kupisa kwemunda, CZ Monocrystalline Silicon |
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TaC Coated Susceptor yeEpitaxy Equipment
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Tantalum Carbide Coated Chikamu Ring
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Yakachena Kwazvo CVD SiC Yakawanda Ine Graphite Base
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Tantalum carbide yakafukidzwa nepurasitiki ine maburi akawanda ...
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Tantalum carbide yakafukidzwa nepurasitiki ine girafu
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Mhete dzeTantalum Carbide Coating Guide
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Tantalum Carbide Kupfeka Ring
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Yakagadzirwa neTaC Coated Graphite Crucible
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Mhete yekutungamira yeTaC Coating