Paninga CVD

Ngā Paninga CVD mō te Tukatuka Ārahi Matatau

I hangaia mō ngā taiao hanga haurua-haurua nui, ko ā mātou paninga Whakatakotoranga Matū Vapor Deposition (CVD) Silicon Carbide (SiC), Tantalum Carbide (TaC), me te Pyrolytic Carbon (PyC) e tuku ana i te koretake matū tino pai, te pumau wera nui, me te tino parakore (< 5 ppm). I hangaia hei tiaki i ngā papa graphite me ngā papa uku tino parakore mai i te plasma kaha, ngā hau tukanga tauhohe, me te huringa wera nui, ka whakaitihia e ā mātou paninga matatau te whakaputanga matūriki me te whakaroa i te roa o te oranga o ngā wāhanga i roto i.Te Epitaxy Silicon/SiC, te MOCVD, te Whakairo Plasma, me te Tipu Kotahi-kiriatangā tono.

Teitei rawa o te Parakore (< 5 ppm)

He iti ngā poke whakarewa kua manatokohia e te GDMS hei ārai i te poke o te wafer i roto i ngā tukanga nui.

Ātete Pai Rawa ki te Plasma me te Hau

Ka ārai te hanganga tioata matotoru i te plasma halogen (CF₄, NF₃, Cl₂) me ngā hau waikura.

Te Whakataurite Wera Arotau

Mā te mana whakahaere CTE tino pakari ka kore e pakaru moroiti me te wehewehenga o te paninga i raro i ngā ru wera nui.

Momo Paninga	Painga Hangarau Matua	Tono Tukanga Matua
Paninga CVD SiC	Te kawe wera teitei, te ātete pai ki te horo o te toto	Te Whakairo Maroke, Te Epitaxy Si, MOCVD, Te Tipu Tioata
Paninga CVD TaC	Ātete pāmahana tino nui (>2000°C), ārai waikura H₂/SiH₄	Te Epitaxy SiC, Te Tipu PVT SiC Karaihe-Kotahi
Paninga PyC	Hiri hau Hermetic, mata waro anisotropic tino maeneene	Te whakamarumaru o te papa wera, CZ Monocrystalline Silicon