Dahaarka CVD

Dahaarka CVD ee loogu talagalay Habaynta Semiconductor-ka Sare

Iyada oo loo farsameeyay jawiyada muhiimka ah ee wax soo saarka semiconductor-ka, dahaarkayaga Kiimikada Uumiga ah (CVD) Silicon Carbide (SiC), Tantalum Carbide (TaC), iyo Pyrolytic Carbon (PyC) waxay bixiyaan firfircooni la'aan kiimiko oo heer sare ah, xasillooni kuleyl aad u daran, iyo daahirnimo aad u sarreysa (< 5 ppm). Loogu talagalay in lagu ilaaliyo graphite saafi ah iyo walxaha dhoobada ah ee ka yimaada balaasmaha gardarada ah, gaasaska habka falgalka ah, iyo wareegga kuleylka sare, dahaarkayaga horumarsan wuxuu yareeyaa soo saarista walxaha wuxuuna si weyn u kordhiyaa cimriga qaybahaSilikoon/SiC Epitaxy, MOCVD, Plasma Etching, iyo Monocrystal Growthcodsiyada.

Nadiifnimo Aad u Sareysa (< 5 ppm)

Wasakhda birta yar ee la xaqiijiyay ee GDMS si looga hortago wasakhowga wafer-ka ee hababka muhiimka ah.

Iska caabbinta Balaasmaha iyo Gaaska Sare

Qaab-dhismeedka crystalline-ka ee cufan wuxuu ka ilaaliyaa balaasmaha halogen (CF₄, NF₃, Cl₂) iyo gaasaska daxalka leh.

Iswaafajinta Kulaylka ee La Hagaajiyay

Xakamaynta adag ee CTE waxay baabi'inaysaa dildilaaca yar yar iyo dahaarka marka ay dhacdo shoog kulul oo daran.

Nooca Dahaadhka	Faa'iidada Farsamo ee Muhiimka ah	Codsiga Habka Koowaad
Dahaarka CVD SiC	Kobcinta kulaylka sare, iska caabin nabaad-guurka plasma oo aad u fiican	Qallalan Etch, Si Epitaxy, MOCVD, Kobaca Crystal
Dahaarka CVD TaC	Iska caabbinta heerkulka aadka u daran (>2000°C), xannibaadda daxalka H₂/SiH₄	Kobaca SiC Epitaxy, Hal-Kristaal SiC PVT
Dahaarka PyC	Shaabad gaas Hermetic ah, dusha sare ee kaarboon anisotropic ah oo aad u siman	Dahaarka beerta kulaylka, CZ Monocrystalline Silicon