Qayb ka mid ah Dayaxa badhkii ee SiC Graphite iyo Isku-dubaridka SiC Epitaxy

Qaybta iyo Isku-dubaridka Garaafiga ee SiC ee Dayaxa Badhkiisa ah ee SiC loogu talagalay SiC Epitaxy Sawirka La Soo Bandhigay

Sharaxaad Gaaban:

VET Energy waa soo-saare xirfadle ah iyo alaab-qeybiye ka shaqeeya qaybaha asaasiga ah ee foornadaha epitaxial-ka silicon carbide. Isku-darkayaga badh-moon wuxuu adeegsadaa garaafit saafi ah oo sarreeya oo ay weheliso tignoolajiyada dahaarka CVD ee horumarsan. Waxaa loogu talagalay jawiyada epitaxial-ka heerkulka sare iyo kuwa aadka u daxalaysan. Graphite-ka saafiga ah wuxuu qaybta siiyaa iska caabin heer sare ah oo heer sare ah (>1600℃) iyo xasilloonida kulaylka, taasoo hubinaysa isku-midnimada goobta kulaylka; dahaarka CVD wuxuu sameeyaa lakab ilaalin cufan oo dusha sare ah iyada oo loo marayo tignoolajiyada CVD, si weyn ayuu u hagaajiyaa sifooyinka ka-hortagga oksaydhka iyo ka-hortagga qool-qolista, wuxuuna kordhiyaa cimriga adeegga in ka badan 3 jeer.

Qalabka:Graphite saafi ah oo sare

Daaweynta:Dahaarka CVD-SiC ama CVD-TaC

Habayn:La heli karo

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Faahfaahinta Badeecada

Calaamadaha Alaabta

Qaybta Halfmoon ee SiC Graphite dahaarka lehwaa qayb muhiim ah oo loo isticmaalo hababka wax soo saarka semiconductor-ka, gaar ahaan qalabka epitaxial-ka SiC. Naqshadeynteeda qaab-dhismeedka iyo sifooyinka agabka ayaa si toos ah u go'aamiya tayada iyo hufnaanta wax soo saarka ee wafer-yada epitaxial-ka.

Dhismaha qolka falcelinta:
Qaybta badhkeed ee dayaxa waxay ka kooban tahay laba qaybood, qaybaha sare iyo kuwa hoose, kuwaas oo isku xidhan si ay u sameeyaan qol koritaan oo xiran, kaas oo ku habboon substrate-ka silicon carbide (badanaa 4H-SiC ama 6H-SiC) wuxuuna gaaraa koritaanka lakabka epitaxial isagoo si sax ah u xakameynaya goobta socodka gaaska (sida isku darka SiH₄, C₃H₈, iyo H₂).
Xakamaynta goobaha heerkulka:
Saldhigga garaafka saafiga ah ee sarreeya oo ay weheliso gariiradda kuleylinta ee induction-ka ayaa ilaalin kara isku-dhafka heerkulka qolka (gudaha ± 5°C) heerkul sare oo ah 1500-1700°C si loo hubiyo isku-dheelitirka dhumucda lakabka epitaxial.
Tilmaamaha socodka hawada:
Iyadoo la naqshadeynayo booska laga galo hawada iyo meesha laga baxo (sida meesha laga galo hawada ee dhinaca iyo meesha laga baxo hawada sare ee jirka foornada toosan), socodka laminar-ka gaaska falgalka ayaa lagu hagaa dusha sare ee substrate-ka si loo yareeyo cilladaha koritaanka ee ay keento jahwareerka.

Waxyaabaha saldhigga ah: graphite saafi ah oo sare
Shuruudaha Nadaafadda:Kaarboonka ≥99.99%, dambaska ≤5ppm, si loo hubiyo in aan wax wasakh ah la soo saarin si loo wasakheeyo lakabka epitaxial heerkulka sare.
Faa'iidooyinka waxqabadka:
Gudbinta kulaylka oo sareysa:Qaboojinta kulaylka heerkulka qolka waxay gaartaa 150W/(m・K), taas oo u dhow heerka naxaasta waxayna si dhakhso ah u gudbin kartaa kulaylka.
Isku-darka ballaarinta hoose:5×10^-6/℃ (25-1000℃), oo u dhigma substrate-ka silikoon carbide (4.2×10)^-6/℃), yaraynta dildilaaca dahaarka oo ay keento cadaadiska kulaylka.
Saxnaanta habaynta:Dulqaad cabbir ah oo ah ±0.05mm ayaa lagu gaaraa iyada oo loo marayo mashiinka CNC si loo hubiyo shaabadeynta qolka.

Adeegsiga kala duwan ee CVD SiC iyo CVD TaC

Dahaarka	Geedi socodka	Isbarbardhigga	Codsiga caadiga ah
CVD-SiC	Heerkulka: 1000-1200℃ Cadaadiska: 10-100 Torr	Adkaanshaha HV2500, dhumucdiisuna waa 50-100um, iska caabin oksaydh oo aad u fiican (xasilloon ka hooseeya 1600℃)	Foornooyinka epitaxial-ka ee caalamiga ah, oo ku habboon jawiga caadiga ah sida haydarojiin iyo silane
CVD-TaC	Heerkulka: 1600-1800℃ Cadaadiska: 1-10 Torr	Adkaanta HV3000, dhumucdiisuna waa 20-50um, aad u adkaysi u leh daxalka (waxay u adkeysan kartaa gaasaska daxalka sida HCl, NH₃, iwm.)	Deegaanno aad u daxal badan (sida qalabka GaN epitaxy iyo qalabka wax lagu qoro), ama habab gaar ah oo u baahan heerkul aad u sarreeya oo ah 2600°C

VET Energy waa soo saare xirfadle ah oo diiradda saaraya cilmi-baarista iyo horumarinta agabyada horumarsan sida graphite, silicon carbide, quartz, iyo sidoo kale daaweynta agabka sida dahaarka SiC, dahaarka TaC, dahaarka kaarboonka galaaska ah, dahaarka kaarboonka pyrolytic, iwm. Badeecadaha waxaa si weyn loogu isticmaalaa photovoltaic, semiconductor, tamar cusub, birta, iwm.

Kooxdayada farsamada waxay ka timaadaa hay'adaha cilmi-baarista ee ugu sarreeya gudaha, waxayna ku siin karaan xalal agab xirfadeed oo dheeraad ah.

Faa'iidooyinka Tamarta VET waxaa ka mid ah:
• Warshad iyo shaybaar xirfadeed oo gaar ah;
• Heerarka iyo tayada saafiga ah ee hormuudka ka ah warshadaha;
• Qiimo tartan ah & Waqtiga keenista degdegga ah;
• Iskaashi warshadeed oo badan oo adduunka oo dhan ah;

Waxaan kugu soo dhaweyneynaa inaad booqato warshadeenna iyo shaybaarkeenna wakhti kasta!