Suuxiyaha Foosto ee SiC ee Dahaaran

Sawirka Soo-bandhigidda Foosto ee SiC ee Dahaaran

Sharaxaad Gaaban:

VET Energy SiC Coated Barrel Suscepter waa badeeco waxqabad sare leh oo loogu talagalay inay bixiso waxqabad joogto ah oo la isku halleyn karo muddo dheer. Waxay leedahay iska caabin kulayl oo aad u wanaagsan iyo isku mid ahaanshaha kulaylka, daahirnimo sare, iska caabin nabaad-guur, taasoo ka dhigaysa xalka ugu habboon ee codsiyada habaynta wafer-ka.

Meesha Asalka ah:Shiinaha

Qaab-dhismeedka Crystal:Marxaladda FCCβ

Cufnaanta:3.21 g/cm;

Adkaanta:2500 Vickers;

Cabbirka Badarka:2 ~ 10μm;

Nadiifinta Kiimikada:99.99995%;

Awoodda Kulaylka:640J·kg-1·K-1;

Heerkulka Sublimation:2700℃;

Xoogga Feexural-ka:415 Mpa (RT 4-Dhibcood);

Modulus-ka Young:430 Gpa (4pt laab, 1300℃);

Ballaarinta Kulaylka (CTE):4.5 10-6K-1;

Qaboojinta Kulaylka:300 (W/MK);

Noo soo dir emayl Soo dejiso sida PDF ahaan

Faahfaahinta Badeecada

Calaamadaha Alaabta

Sumowga Foosto is a furahaqayb loo isticmaalo hababka wax soo saarka semiconductor kala duwan.Waxaan isticmaalnaa teknoolojiyadeenna shatiga leh si aan u sameynosuuxdinta foostooo lehdaahirnimo aad u sarreysa,wanaagsandahaarkamidnimoiyo nolol adeeg oo aad u fiican, sidoo kaleiska caabinta kiimikada sare iyo sifooyinka xasilloonida kulaylka.

Tamarta VET waa Shaki kuma jiro insoo saaraha dhabta ah ee alaabada graphite iyo silicon carbide ee loo habeeyay oo leh dahaarka CVD,bixin karaakala duwanqaybo loo habeeyey warshadaha semiconductor iyo photovoltaic. OKooxda farsamada ee aad ka tirsan tahay waxay ka timaadaa hay'adaha cilmi-baarista ee ugu sarreeya gudaha, waxayna bixin karaan xalal agab xirfadeed oo dheeraad ahadiga.

Waxaan si joogto ah u horumarinnaa habab horumarsan si aan u bixinno agab horumarsan,iyoWaxaan soo saarnay tiknoolajiyad gaar ah oo shati leh, taas oo ka dhigi karta isku xirka u dhexeeya dahaarka iyo substrate-ka mid adag oo aan u nuglaan karin kala-goynta.

Fcuntooyinka alaabtayada:

1. Iska caabinta oksaydhka heerkulka sare ilaa 1700℃.
2. Nadiifnimo sare iyoisku mid ahaanshaha kulaylka
3. Iska caabin aad u fiican oo daxalka ah: aashitada, alkali, milixda iyo walxaha dabiiciga ah.
4. Adkayn sare, dusha sare oo is haysta, iyo walxo yaryar.
5. Adeeg dheer iyo cimri dheer

CVD SiC薄膜基本物理性能 Sifooyinka aasaasiga ah ee jireed ee CVD SiCdahaarka
性质 / Hantida	典型数值 / Qiimaha Caadiga ah
晶体结构 / Qaab-dhismeedka Crystal	Marxaladda FCC β多晶，主要为（111) 取向
密度 / Cufnaanta	3.21 g/cm³
硬度 / Adkaanta	2500 维氏硬度（500g oo culeys ah
晶粒大小 / Xaddiga Badarka	2 ~ 10μm
纯度 / Nadiifinta Kiimikada	99.99995%
热容 / Awoodda Kulaylka	640 J·kg^-1·K^-1
升华温度 / Heerkulka Sublimation	2700℃
抗弯强度 / Xoogga Laablaabashada	415 MPa RT 4-dhibcood
杨氏模量 / Modulus-ka Young	430 GPA 4pt laab, 1300℃
导热系数 / ThermalGudbinta	300W·m^-1·K^-1
热膨胀系数 / Ballaarinta Kulaylka (CTE)	4.5 × 10^-6K^-1