Susceptor-ka Garaafiga ee SiC ee Dahaarka leh iyo Side-ka loogu talagalay Wafer

Sawirka muuqada leh ee loo yaqaan 'SiC' oo leh suuska garaafka iyo side-ka loogu talagalay wafer

Sharaxaad Gaaban:

VET Energy SiC Coated Graphite Suscepter waa badeeco waxqabad sare leh oo loogu talagalay inay bixiso waxqabad joogto ah oo la isku halleyn karo muddo dheer. Waxay leedahay iska caabin kulayl oo aad u wanaagsan iyo isku mid ahaanshaha kulaylka, daahirnimo sare, iska caabin nabaad-guur, taasoo ka dhigaysa xalka ugu habboon ee codsiyada habaynta wafer-ka.

Qalabka:Saxnaan sare oo ah graphite isostatic

Nadiifinta: <5ppm

Dahaarka:CVD-SiC, CVD-TaC, Pyro-kaarboon

ODM-ka OEM:La heli karo

Noo soo dir emayl Soo dejiso sida PDF ahaan

Faahfaahinta Badeecada

Calaamadaha Alaabta

Shaashadda graphite ee SiC-da dahaarka lehwaa qayb muhiim ah oo loo isticmaalo hababka kala duwan ee wax soo saarka semiconductor-ka. Waxaan isticmaalnaa tignoolajiyadeena shatiga leh si aan u samayno suscetpor-ka dahaarka leh ee SiC oo leh daahirnimo aad u sarreysa, isku mid ahaanshaha dahaarka wanaagsan iyo cimri adeeg oo aad u wanaagsan, iyo sidoo kale iska caabin kiimiko oo sare iyo sifooyin xasillooni kuleyl.

Astaamaha alaabtayada:

1. Iska caabinta oksaydhka heerkulka sare ilaa 1700℃.
2. Nadiifnimo sare iyo isku midnimo kuleyl
3. Iska caabin aad u fiican oo daxalka ah: aashitada, alkali, milixda iyo walxaha dabiiciga ah.
4. Adkayn sare, dusha sare oo is haysta, iyo walxo yaryar.
5. Adeeg dheer iyo cimri dheer

CVD SiC薄膜基本物理性能 Sifooyinka aasaasiga ah ee jireed ee CVD SiCdahaarka
性质 / Hantida	典型数值 / Qiimaha Caadiga ah
晶体结构 / Qaab-dhismeedka Crystal	Marxaladda FCC β多晶，主要为（111) 取向
密度 / Cufnaanta	3.21 g/cm³
硬度 / Adkaanta	2500 维氏硬度（500g oo culeys ah
晶粒大小 / Xaddiga Badarka	2 ~ 10μm
纯度 / Nadiifinta Kiimikada	99.99995%
热容 / Awoodda Kulaylka	640 J·kg^-1·K^-1
升华温度 / Heerkulka Sublimation	2700℃
抗弯强度 / Xoogga Laablaabashada	415 MPa RT 4-dhibcood
杨氏模量 / Modulus-ka Young	430 GPA 4pt laab, 1300℃
导热系数 / ThermalGudbinta	300W·m^-1·K^-1
热膨胀系数 / Ballaarinta Kulaylka (CTE)	4.5 × 10^-6K^-1

VET Energy waa soo saare xirfadle ah oo diiradda saaraya cilmi-baarista iyo horumarinta agabyada horumarsan sida graphite, silicon carbide, quartz, iyo sidoo kale daaweynta agabka sida dahaarka SiC, dahaarka TaC, dahaarka kaarboonka galaaska ah, dahaarka kaarboonka pyrolytic, iwm. Badeecadaha waxaa si weyn loogu isticmaalaa photovoltaic, semiconductor, tamar cusub, birta, iwm.

Kooxdayada farsamada waxay ka timaadaa hay'adaha cilmi-baarista ee ugu sarreeya gudaha, waxayna ku siin karaan xalal agab xirfadeed oo dheeraad ah.

Faa'iidooyinka Tamarta VET waxaa ka mid ah:
• Warshad iyo shaybaar xirfadeed oo gaar ah;
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• Qiimo tartan ah & Waqtiga keenista degdegga ah;
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