Qaybta Halfmoonka ee SiC ee dahaarka leh ee loogu talagalay Silicon Carbide Epitaxial Foorno

Qaybta Halfmoonka ee SiC ee lagu dahaadhay Garaafiga ee Silicon Carbide-ka Epitaxial Foornada Sawirka La Soo Bandhigay

Sharaxaad Gaaban:

VET Energy waa soo saare xirfadle ah iyo alaab-qeybiye ka shaqeeya qaybaha asaasiga ah ee foornadaha epitaxial-ka ee silicon carbide. Qaybtayada halfmoon ee graphite-ka ee SiC-ga lagu dahaadhay waxay isticmaashaa graphite saafi ah oo sarreeya oo ay weheliso tiknoolajiyadda dahaarka CVD ee horumarsan. Waxaa loogu talagalay jawiyada epitaxial-ka ee heerkulka sare iyo kuwa aadka u daxalaysan. Graphite-ka saafiga ah wuxuu qaybta siiyaa iska caabin heer sare ah oo heer sare ah (>1600℃) iyo xasilloonida kulaylka, taasoo hubinaysa isku mid ahaanshaha goobta kulaylka; dahaarka CVD wuxuu sameeyaa lakab ilaalin cufan oo dusha sare ah iyada oo loo marayo tignoolajiyada CVD, si weyn ayuu u hagaajiyaa sifooyinka ka-hortagga oksaydhka iyo ka-hortagga qoolaynta, wuxuuna kordhiyaa cimriga adeegga in ka badan 3 jeer.

Qalabka:Graphite saafi ah oo sare

Nadiifinta:＜5ppm

Dahaarka:CVD-SiC ama CVD-TaC

Habayn:Foornada nooca ama OEM

Noo soo dir emayl Soo dejiso sida PDF ahaan

Faahfaahinta Badeecada

Calaamadaha Alaabta

Qaybta Halfmoon ee SiC Graphite dahaarka lehwaa qayb muhiim ah oo loo isticmaalo hababka wax soo saarka semiconductor-ka, gaar ahaan qalabka epitaxial-ka SiC. Waxaan isticmaalnaa tignoolajiyadeena shatiga leh si aan u samayno qaybta badhtamaha oo leh daahirnimo aad u sareysa, isku mid ahaanshaha dahaarka wanaagsan iyo cimri adeeg oo aad u fiican, iyo sidoo kale iska caabin kiimiko oo sare iyo sifooyin xasillooni kuleyl.

Waxyaabaha saldhigga ah: graphite saafi ah oo sare
Shuruudaha Nadaafadda:Kaarboonka ≥99.99%, dambaska ≤5ppm, si loo hubiyo in aan wax wasakh ah la soo saarin si loo wasakheeyo lakabka epitaxial heerkulka sare.
Faa'iidooyinka waxqabadka:
Gudbinta kulaylka oo sareysa:Qaboojinta kulaylka heerkulka qolka waxay gaartaa 150W/(m・K), taas oo u dhow heerka naxaasta waxayna si dhakhso ah u gudbin kartaa kulaylka.
Isku-darka ballaarinta hoose:5×10^-6/℃ (25-1000℃), oo u dhigma substrate-ka silikoon carbide (4.2×10)^-6/℃), yaraynta dildilaaca dahaarka oo ay keento cadaadiska kulaylka.
Saxnaanta habaynta:Dulqaad cabbir ah oo ah ±0.05mm ayaa lagu gaaraa iyada oo loo marayo mashiinka CNC si loo hubiyo shaabadeynta qolka.

Adeegsiga kala duwan ee CVD SiC iyo CVD TaC

Dahaarka	Geedi socodka	Isbarbardhigga	Codsiga caadiga ah
CVD-SiC	Heerkulka: 1000-1200℃ Cadaadiska: 10-100 Torr	Adkaanshaha HV2500, dhumucdiisuna waa 50-100um, iska caabin oksaydh oo aad u fiican (xasilloon ka hooseeya 1600℃)	Foornooyinka epitaxial-ka ee caalamiga ah, oo ku habboon jawiga caadiga ah sida haydarojiin iyo silane
CVD-TaC	Heerkulka: 1600-1800℃ Cadaadiska: 1-10 Torr	Adkaanta HV3000, dhumucdiisuna waa 20-50um, aad u adkaysi u leh daxalka (waxay u adkeysan kartaa gaasaska daxalka sida HCl, NH₃, iwm.)	Deegaanno aad u daxal badan (sida qalabka GaN epitaxy iyo qalabka wax lagu qoro), ama habab gaar ah oo u baahan heerkul aad u sarreeya oo ah 2600°C

Kormeerka tayada

Dhumucda dahaarka: cabbirka dhumucda laysarka (saxnaanta ± 1um) ama falanqaynta qaybaha isgoyska SEM.
Xoogga isku xidhka: tijaabada xoqidda (culus muhiim ah > 50N) ama tijaabada ultrasound (xawaaraha codka > 5000m/s).
Iska caabbinta daxalka: heerka luminta tirada (<0.1 mg/cm²・h) oo lagu tijaabiyay jawiga HCl (5 vol%, 1600℃).

VET Energy waa soo saare xirfadle ah oo diiradda saaraya cilmi-baarista iyo horumarinta agabyada horumarsan sida graphite, silicon carbide, quartz, iyo sidoo kale daaweynta agabka sida dahaarka SiC, dahaarka TaC, dahaarka kaarboonka galaaska ah, dahaarka kaarboonka pyrolytic, iwm. Badeecadaha waxaa si weyn loogu isticmaalaa photovoltaic, semiconductor, tamar cusub, birta, iwm.

Kooxdayada farsamada waxay ka timaadaa hay'adaha cilmi-baarista ee ugu sarreeya gudaha, waxayna ku siin karaan xalal agab xirfadeed oo dheeraad ah.

Faa'iidooyinka Tamarta VET waxaa ka mid ah:
• Warshad iyo shaybaar xirfadeed oo gaar ah;
• Heerarka iyo tayada saafiga ah ee hormuudka ka ah warshadaha;
• Qiimo tartan ah & Waqtiga keenista degdegga ah;
• Iskaashi warshadeed oo badan oo adduunka oo dhan ah;

Waxaan kugu soo dhaweyneynaa inaad booqato warshadeenna iyo shaybaarkeenna wakhti kasta!