SiC Dahaarka Garaafka Halfmoon Qaybta loogu talagalay Foornada Silicon Carbide Epitaxial

Sharaxaad Gaaban:

VET Energy waa soo-saare xirfad leh oo soo saarta qaybaha asaasiga ah ee foornooyinka epitaxial silicon carbide. Qaybtayada garaafiga ee dahaarka leh ee SiC-da nusmoon waxay isticmaashaa garaafka saafiga ah oo sarreeya oo ay weheliso tignoolajiyada daahanka sare ee CVD. Waxaa loogu talagalay heer kulka sare iyo deegaanka epitaxial ee aadka u daxalka leh. Garaafka saafiga ah ee sare wuxuu siinayaa qaybta iska caabin heerkul sare oo heer sare ah (> 1600 ℃) iyo xasilloonida kulaylka, hubinta isku mid ahaanshaha goobta kulaylka; dahaarka CVD wuxuu sameeyaa lakab difaac cufan oo dusha sare ah iyada oo loo marayo tignoolajiyada CVD, taasoo si weyn u wanaajinaysa sifooyinka anti-oxidation iyo anti-etching, iyo kordhinta nolosha adeegga in ka badan 3 jeer.

Qalab:Garaafka nadiifka sare

Nadiifinta:5pm

Dahaarka:CVD-SiC ama CVD-TaC

Habaynta:Foornada Brand ama OEM

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Faahfaahinta Alaabta

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Qaybta SiC Dahaarka Garaafka Halfmoonwaa qayb muhiim ah oo loo isticmaalo hababka wax soo saarka semiconductor, gaar ahaan qalabka SiC epitaxial. Waxaan u isticmaalnaa tignoolajiyadayada rukhsadda leh si aan uga dhigno qaybta nuska ah oo leh daahir aad u sarreeya, lebbis dahaar wanaagsan iyo nolol adeeg oo aad u wanaagsan, iyo sidoo kale iska caabbinta kiimikada sare iyo guryaha xasilloonida kuleylka.

Qalabka saldhigga ah: graphite-nadiifinta sare
Shuruudaha nadiifnimada:Kaarboonka ≥99.99%, ka kooban dambas ≤5ppm, si loo hubiyo in wax wasakh ah aysan soo degdegin si ay u wasakhayso lakabka epitaxial heerkulka sare.
Faa'iidooyinka waxqabadka:
Dhaqdhaqaaqa kulaylka sare:Heerkulka kulaylka ee heerkulka qolka wuxuu gaaraa 150W / (m・K), kaas oo ku dhow heerka naxaasta oo si dhakhso ah u wareejin kara kulaylka.
Isku xidhka balaadhinta hoose:5×10^-6/ ℃ (25-1000 ℃), oo ku habboon substrate carbide silicon (4.2 × 10)^-6/ ℃), yaraynta dildilaaca dahaarka ay keento cadaadiska kulaylka.
Xaqiijinta habaynta:Dulqaadka cabbirka ± 0.05mm waxaa lagu gaaraa mashiinnada CNC si loo hubiyo xiridda qolka.

Codsiyada kala duwan ee CVD SiC iyo CVD TaC

Dahaarka	Habka	Isbarbardhigga	Codsiga caadiga ah
CVD-SiC	Heerkulka: 1000-1200 ℃ Cadaadis: 10-100 Torr	Hardness HV2500, dhumucdiisuna waxay tahay 50-100um, iska caabin oksaydhka heer sare ah (xasillooni ka hooseeya 1600 ℃)	Foornooyinka epitaxial Universal, oo ku habboon jawiga caadiga ah sida hydrogen iyo silane
CVD-TaC	Heerkulka: 1600-1800 ℃ Cadaadis: 1-10 Torr	Hardness HV3000, dhumucdiisuna waa 20-50um, aad u adkaysta daxalka (waxay u adkeysan kartaa gaasaska daxalka ah sida HCl, NH₃, iwm.)	Deegaan aad u daxalaysa (sida GaN epitaxy iyo qalabka etching), ama hababka gaarka ah ee u baahan heerkul aad u sarreeya oo ah 2600°C

Kormeer tayo leh

Dhumucda dahaarka: cabbirka dhumucda laysarka (sax ahaan ± 1um) ama falanqaynta qaybta SEM.
Xoogga dammaanadda: Tijaabada xoqitaanka (culayska muhiimka ah> 50N) ama tijaabada ultrasonic (xawaaraha codka> 5000m/s).
Iska caabinta daxalka: heerka luminta tirada badan (<0.1 mg/cm²・h) lagu tijaabiyay jawiga HCl (5 vol%, 1600℃).

VET Energy waa saaraha xirfadeed diiradda on R & D iyo wax soo saarka ee-dhamaadka sare qalab horumarsan sida graphite, silikon carbide, quartz, iyo sidoo kale daaweynta alaabta sida daahan SiC, daahan TaC, daahan carbon galaas, daahan carbon pyrolytic, iwm Alaabooyinka waxaa si ballaaran loo isticmaalaa in photovoltaic, semiconductor, tamarta cusub, metallurgy, iwm.

Kooxdayada farsamo waxay ka yimaadaan hay'adaha cilmi-baarista gudaha ee ugu sarreeya, waxay ku siin karaan xalal qalab xirfadeed oo dheeraad ah adiga.

Faa'iidooyinka tamarta VET waxaa ka mid ah:
• Warshad iyo shaybaadhka xirfadlayaasha ah;
• Heerarka nadiifka ah ee hogaaminaya warshadaha iyo tayada;
• Qiimaha tartanka & wakhtiga keenista degdega ah;
• Iskaashiyo badan oo warshadeed oo caalami ah;

Waxaan kugu soo dhawaynaynaa inaad booqato warshadeena iyo shaybaadhka wakhti kasta!