Ngokuvelisa kancinci kancinci ii-substrates ze-SiC eziqhubayo, iimfuno eziphezulu ziyabekwa phambili ukuze inkqubo izinze kwaye iphindaphindeke. Ngokukodwa, ulawulo lweziphene, ukulungiswa okuncinci okanye ukushukuma kwentsimi yobushushu esithandweni, kuya kuzisa utshintsho lwekristale okanye ukwanda kweziphene. Kwixesha elizayo, kufuneka sijongane nomngeni "wokukhula ngokukhawuleza, okude nokutyebileyo, kunye nokukhula", ukongeza ekuphuculweni kwethiyori kunye nobunjineli, sikwadinga izixhobo zentsimi yobushushu eziphucukileyo njengenkxaso. Sebenzisa izixhobo eziphambili, khulisa iikristale eziphambili.
Ukusetyenziswa gwenxa kwezinto ezisetyenziswa ekutshiseni, ezifana negrafiti, igrafiti enemingxuma, umgubo we-tantalum carbide, njl.njl. kwindawo eshushu kuya kukhokelela kwiziphene ezifana nokwanda kokufakwa kwekhabhoni. Ukongeza, kwezinye iinkqubo, ukungena kwegrafiti enemingxuma akwanelanga, kwaye kufuneka imingxunya eyongezelelweyo ukuze kwandiswe ukungena. Igrafiti enemingxuma enomngxuma ophezulu ijongene nemingeni yokucubungula, ukususa umgubo, ukugrumba njalo njalo.
I-VET izisa isizukulwana esitsha sezinto ezikhula ngekristale yeSiC, i-tantalum carbide enemingxuma. Isiqalo sehlabathi.
Amandla nobunzima be-tantalum carbide buphezulu kakhulu, kwaye ukuyenza ibe nemingxuma lucelomngeni. Ukwenza i-tantalum carbide enemingxuma enemingxuma emikhulu kunye nobunyulu obuphezulu lucelomngeni olukhulu. I-Hengpu Technology iqalise i-tantalum carbide eneemingxuma enemingxuma emikhulu, enemingxuma ephezulu ye-75%, ekhokela ihlabathi.
Kungasetyenziswa ukuhluzwa kwecandelo legesi, ukulungiswa kweqondo lobushushu lendawo, indlela yokuhamba kwezinto, ulawulo lokuvuza, njl.njl. Ingasetyenziswa kunye nenye i-tantalum carbide eqinileyo (i-compact) okanye i-tantalum carbide coating evela kwi-Hengpu Technology ukwenza izinto zasekhaya ezine-flow conductance eyahlukileyo.
Ezinye izinto zingaphinda zisetyenziswe.
Ixesha lokuthumela: Julayi-14-2023
