Nā mea hana i holo pono ʻia, ka hui waiwai loea, a me nā huahana a me nā lawelawe ma hope o ke kūʻai aku ʻoi aku ka maikaʻi; He hoa pili nui mākou i hoʻohui ʻia, pili kēlā me kēia kanaka i ka pono o ka hui "unification, dedication, tolerance" no ka Silicon Carbide RBSIC/SISIC Cantilever Paddle maikaʻi i hoʻohana ʻia ma ka ʻoihana Solar Photovoltaic, hoʻokipa mākou i nā hoa ʻoihana ʻelua o nā ʻāina ʻē a me nā kūloko, a ke manaʻolana nei e hana pū me ʻoe i ka wā lōʻihi!
Nā mea hana i holo pono ʻia, ka hui waiwai loea, a me nā huahana a me nā lawelawe ma hope o ke kūʻai aku ʻoi aku ka maikaʻi; He hoa kāne a wahine hoʻi mākou a me nā keiki nui i hoʻohui ʻia, pili kēlā me kēia kanaka i ka pono o ka hui "unification, dedication, tolerance" noʻO ka umu keramika a me ka umu seramika Kina, No ka hoʻokō ʻana i nā koi o nā mea kūʻai aku no kēlā me kēia ʻano lawelawe kūpono a me nā mea paʻa. Hoʻokipa maikaʻi mākou i nā mea kūʻai aku a puni ka honua e kipa mai iā mākou, me kā mākou laulima multi-faceted, a hui pū i ka hoʻomohala ʻana i nā mākeke hou, e hana i kahi wā e hiki mai ana!
ʻUhi SiC/uhi ʻia o ka substrate Graphite no Semiconductor Hoʻopaʻa a hoʻomehana nā Susceptors i nā wafers semiconductor i ka wā o ka hana wela. Hana ʻia kahi susceptor i kahi mea e omo ai i ka ikehu ma o ka induction, conduction, a/a i ʻole radiation a hoʻomehana i ka wafer. ʻO kona kūpaʻa haʻalulu wela, ka conductivity wela, a me ka maʻemaʻe he mea nui ia no ka hana wela wikiwiki (RTP). Hoʻohana pinepine ʻia ka graphite i uhi ʻia me ka Silicon carbide, silicon carbide (SiC), a me ka silicon (Si) no nā susceptors ma muli o ke kaiapuni wela a me ke kemika kikoʻī. ʻO PureSiC® CVD SiC a me ClearCarbon™ mea ultra-pure e hāʻawi ana i ka paʻa wela kiʻekiʻe, ke kūpaʻa i ka palaho, a me ka lōʻihi. Wehewehe Huahana
ʻO ka uhi ʻana o SiC o ka substrate Graphite no nā noi Semiconductor e hana i kahi ʻāpana me ka maʻemaʻe kiʻekiʻe a me ke kūʻē ʻana i ka lewa oxidizing.
Hoʻopili ʻia ʻo CVD SiC a i ʻole CVI SiC i ka Graphite o nā ʻāpana hoʻolālā maʻalahi a paʻakikī paha. Hiki ke hoʻopili ʻia ka uhi ʻana i nā mānoanoa like ʻole a i nā ʻāpana nui loa.
He koho kūlohelohe nā keramika loea no nā noi hana wela semiconductor e like me RTP (Rapid Thermal Processing), Epi (Epitaxial), diffusion, oxidation, a me annealing. Hāʻawi ʻo CoorsTek i nā ʻāpana mea holomua i hoʻolālā kūikawā ʻia e kū i nā haʻalulu wela me ka maʻemaʻe kiʻekiʻe, paʻa, hana hou no ka mahana kiʻekiʻe.
Nā Hiʻohiʻona:
· Kū'ē Kū'ē Wela Maika'i Loa
· Kū'ē Kū'ē Kino Maika'i Loa
· Kū'ē Kemika Maikaʻi Loa
· Maʻemaʻe Kiʻekiʻe Loa
· Loaʻa i ke ʻano paʻakikī
· Hiki ke hoʻohana ʻia ma lalo o ka Oxidizing Atmosphere
noi
Pono kahi wafer e hala i kekahi mau ʻanuʻu ma mua o ka mākaukau ʻana no ka hoʻohana ʻana i nā mea uila. ʻO kahi kaʻina hana koʻikoʻi ʻo ia ka silicon epitaxy, kahi e lawe ʻia ai nā wafers ma luna o nā susceptors graphite. ʻO nā waiwai a me ke ʻano o nā susceptors he hopena koʻikoʻi i ka maikaʻi o ka papa epitaxial o ka wafer.
Nā Waiwai Maʻamau o ka Mea Graphite Base:
| Ka nui o ka ʻike ʻia: | 1.85 g/cm3 |
| Ke kū'ē uila: | 11 μΩm |
| Ikaika Flexural: | 49 MPa (500kgf/cm2) |
| Paʻakikī Kahakai: | 58 |
| Lehu: | <5ppm |
| Ka Hoʻokele Wela: | 116 W/mK (100 kcal/mhr-℃) |
Nā huahana hou aku
