Ngā taputapu whakahaere pai, te kapa hua ngaio, me ngā hua me ngā ratonga muri-hoko pai ake; He hoa rangatira kotahi mātou, he whānau nui, e piri ana te katoa ki te kamupene e whai hua ana ki te "whakakotahitanga, te whakapau kaha, te manawanui" mō te Hoe Cantilever Silicon Carbide RBSIC/SISIC kounga teitei e whakamahia ana i roto i te umanga photovoltaic solar, e mihi ana mātou ki ngā hoa pakihi o tāwāhi me o roto, ā, e tumanako ana mātou ki te mahi tahi me koe i roto i te wā tata!
Ngā taputapu whakahaere pai, te kapa hua ngaio, me ngā hua me ngā ratonga muri-hoko pai ake; He hoa rangatira kotahi mātou, he tamariki hoki, e piri ana te katoa ki te "whakakotahitanga, te whakapau kaha, te manawanui" e whai hua ana ki te kamupene.Te oumu uku me te oumu uku o Haina, Hei whakatutuki i ngā hiahia o ia kiritaki mō ia ratonga tino pai me ngā taonga kounga pumau. E mihi ana mātou ki ngā kiritaki o te ao katoa ki te toro mai ki a mātou, me ā mātou mahi tahi maha-āhua, me te whakawhanake tahi i ngā mākete hou, hei waihanga i tētahi heke mai kanapa!
Paninga/paninga SiC o te papa Graphite mō te Semiconductor Ka pupuri, ka whakamahana hoki ngā whakapūmau i ngā papa haurua-ira i te wā e tukatukahia ana te wera. He mea hanga te whakapūmau i tētahi rauemi e mimiti ana i te pūngao mā te whakaawe, te kawe hiko, me/ranei te irahiko, ā, ka whakamahana i te papa. He mea nui tōna ātete ki te ru wera, tōna kawe hiko, me tōna parakore ki te tukatuka wera tere (RTP). Ko te karāpeti kua pania ki te karāpeti silicon, te karāpeti silicon (SiC), me te silicon (Si) e whakamahia whānuitia ana mō ngā whakapūmau i runga i te taiao wera me te matū motuhake. He rauemi tino parakore a PureSiC® CVD SiC me ClearCarbon™ e whakarato ana i te pumau wera pai rawa atu, te ātete ki te waikura, me te roa. Whakaahuatanga Hua
Mā te paninga SiC o te papa graphite mō ngā tono Semiconductor ka puta he wāhanga he tino parakore, ā, he ātete hoki ki te hau waikura.
Ka whakamahia te CVD SiC, te CVI SiC rānei, ki te karāpiti o ngā wāhanga hoahoa māmā, uaua rānei. Ka taea te pani i te paninga i ngā matotoru rerekē, ā, ki ngā wāhanga tino nunui.
He kōwhiringa tūturu ngā uku hangarau mō ngā tono tukatuka wera haurua-haurua tae atu ki te RTP (Tukatuka Wera Tere), te Epi (Epitaxial), te horapa, te waikura, me te whakamahana. Ka whakaratohia e CoorsTek ngā wāhanga rauemi matatau kua hangaia kia tu atu ki ngā ru wera me te mahi parakore teitei, pakari, ka taea te whakahoki anō mō te pāmahana teitei.
Ngā Āhuatanga:
· Ātete Tino Pai ki te Ru Wera
· Ātete Tino Pai ki te Ru
· Ātete Matū Tino Pai
· Tino Parakore
· Kei te wātea i roto i te Āhua Matatini
· Ka taea te whakamahi i raro i te Āhua Whakahāora
tono：
Me haere te wafer i roto i ētahi taahiraa i mua i te rite mō te whakamahi i roto i ngā taputapu hiko. Ko tētahi tukanga nui ko te epitaxy silicon, e haria ai ngā wafer i runga i ngā kaitautoko graphite. He pānga nui ngā āhuatanga me te kounga o ngā kaitautoko ki te kounga o te paparanga epitaxial o te wafer.
Ngā Āhuatanga Noa o te Rauemi Graphite Turanga:
| Te Matotoru Āhua: | 1.85 karamu/cm3 |
| Ātete Hiko: | 11 μΩm |
| Kaha Whakapiko: | 49 MPa (500kgf/cm2) |
| Te Pakari o te Takutai: | 58 |
| Te pungarehu: | <5ppm |
| Te Arahi Wera: | 116 W/mK (100 kcal/mhr-℃) |
He Hua Anō
