Waʻa Wafer Quartzhe mea lawe koʻikoʻi ia i ka hana semiconductor, ka hana ʻana o nā cell photovoltaic a me ka noiʻi a me ka hoʻomohala ʻana i nā mea holomua, i hoʻolālā ʻia no ka hoʻoili wafer paʻa a me ke kau ʻana i nā kaʻina hana wela kiʻekiʻe. Hana ʻia kēia huahana me ka silica fused maʻemaʻe ultra-kiʻekiʻe (SiO2), me ke kūpaʻa wela maikaʻi loa, ke kūpaʻa kemika a me nā ʻano haumia metala ultra-haʻahaʻa, kūpono no ka umu diffusion, ka umu oxidation, PECVD/LPCVD a me nā lako ʻē aʻe, hoʻohana nui ʻia i ka uhi wafer, ka hoʻokomo ʻana ion, ka annealing wela kiʻekiʻe a me nā kaʻina hana koʻikoʻi ʻē aʻe.
Nā Pōmaikaʻi Koʻikoʻi o ka waʻa quartz a VET Energy:
- Mea maʻemaʻe loa
Maʻemaʻe ≥99.99%: ʻO ka nui o ka haumia (Na, K, Fe, a pēlā aku) <5ppm, e pale ana i ka haumia o ka wafer a me ka hōʻoiaʻiʻo ʻana i ka hua o nā ʻāpana.
Haʻahaʻa ka ua a me ka adsorption: ua poli ʻia ka ʻili (Ra≤0.4μm) e hōʻemi i ka hoʻopili ʻana o nā ʻāpana a me ke koena kinoea. - Paʻa o ka mahana kiʻekiʻe
Palena mahana: Ka mahana hana lōʻihi o 1100 ℃, ka piko pōkole o 1300 ℃, ʻaʻohe deformation, ʻaʻohe ua kristal.
ʻO ke koina hoʻonui wela haʻahaʻa (5.5x10-7/℃), ke kūpaʻa haʻalulu wela maikaʻi loa, hiki ke hoʻololi i ke kaʻina hana piʻi wikiwiki a me ka hāʻule ʻana o ka mahana (e like me ka RTP rapid annealing). - Hoʻolālā kūkulu pololei
Pololei o ke kau ±0.1mm: hoʻohālikelike i nā wafers 2”a 12”, hewa like ʻana o ka hoʻokaʻawale ʻana <0.05mm, e hōʻoiaʻiʻo ana ʻaʻohe offset o nā wafers.
Ka nui o ka ukana: Ka nui o ka ukana he 50 mau wafers (ma ke ʻano o 12” mau wafers) i loko o hoʻokahi waʻa, e kākoʻo ana i ka hoʻoili paʻa ʻana o nā wafers lahilahi (≥100um). - Ka inertness kemika
Ke kūpaʻa ʻana i ka pala: Kū i ka waikawa (koe wale nō ʻo HF), alkali a me ka pala o ka mea hoʻoheheʻe organik, kūpono me ke kaʻina hana hoʻomaʻemaʻe CMP.
Paʻa kinoea maikaʻi loa: Ka helu leakage <5x10-10 Pa.m3/s, kūpono no nā wahi vacuum a me nā wahi kinoea pale. - Ola lōʻihi a me ka mālama ʻana
ʻO ke ola lōʻihi ≥ 5000 mau pōʻaiapuni (nā kūlana hana maʻamau), hiki ke hoʻomaʻemaʻe pinepine ʻia ka ʻili a hoʻohana ʻia, e hōʻemi ana i ke kumukūʻai holoʻokoʻa.
Hoʻolālā modular: kākoʻo i ka hoʻololi hapa (e laʻa me ka niho waʻa hoʻokahi), e hōʻemi ana i ka downtime.
Hāʻawi mākou i nā ʻili moakāka a me nā ʻili hau e like me nā koi a ka mea kūʻai aku:
ʻO Ningbo VET Energy Technology Co., Ltd kahi ʻoihana ʻenehana kiʻekiʻe e kālele ana i ka hana ʻana a me ke kūʻai aku ʻana i nā mea holomua kiʻekiʻe, nā mea hana a me nā ʻenehana e pili ana i ka graphite, silicon carbide, keramika, ka mālama ʻana i ka ʻili e like me ka SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, etc., ua hoʻohana nui ʻia kēia mau huahana i ka photovoltaic, semiconductor, ikehu hou, metallurgy, etc..
Hele mai kā mākou hui loea mai nā ʻoihana noiʻi kūloko kiʻekiʻe, a ua hoʻomohala i nā ʻenehana i hoʻopaʻa ʻia he nui e hōʻoia i ka hana huahana a me ka maikaʻi, hiki ke hāʻawi i nā mea kūʻai aku me nā hoʻonā mea ʻoihana.
