Zvishandiso zvinofambiswa zvakanaka, vashandi vane purofiti, uye zvigadzirwa nemasevhisi ari nani mushure mekutengesa; Tave tiriwo vakaroorana nevana vakabatana, munhu wese anonamatira ku "kubatana, kuzvipira, kushivirira" kwekambani. Paddle yeSilicon Carbide yemhando yepamusoro RBSIC/SISIC Cantilever Inoshandiswa muindasitiri yeSolar Photovoltaic, Tinogamuchira nemwoyo wese mabhizinesi maviri ekunze neemuno, uye tinotarisira kushanda nemi munguva pfupi iri kutevera!
Zvishandiso zvinofambiswa zvakanaka, vashandi vane purofiti, uye zvigadzirwa nemasevhisi zviri nani mushure mekutengesa; Isu tave tiriwo murume kana mukadzi nevana vakabatana, munhu wese anonamatira kubatsiro kwekambani "kubatana, kuzvipira, kushivirira"China Refractory zvedongo uye zvedongo zvedongo, Kuti tigutse zvinodiwa nevatengi vemunhu mumwe nemumwe kuti vawane basa rakakwana uye zvinhu zvemhando yepamusoro zvakagadzikana. Tinogamuchira neushamwari vatengi pasi rese kuti vatishanyire, nekubatana kwedu kwakasiyana-siyana, uye pamwe chete tigadzire misika mitsva, tigadzire ramangwana rakanaka!
SiC coating/coated yeGraphite substrate yeSemiconductor MaSusceptor anobata uye anopisa mawafer e semiconductor panguva yekupisa. Susceptor inogadzirwa nezvinhu zvinotora simba kuburikidza ne induction, conduction, uye/kana radiation uye zvinopisa wafer. Kusagadzikana kwayo nekupisa, thermal conductivity, uye kuchena zvakakosha pakukurumidza kupisa (RTP). Silicon carbide coated graphite, silicon carbide (SiC), uye silicon (Si) zvinowanzo shandiswa kuma susceptors zvichienderana nenzvimbo chaiyo yekupisa uye makemikari. PureSiC® CVD SiC uye ClearCarbon™ zvinhu zvakachena kwazvo zvinopa kugadzikana kwekupisa kwakanyanya, kuramba ngura, uye kugara kwenguva refu. Tsananguro yeChigadzirwa
SiC coating yeGraphite substrate yekushandisa Semiconductor inogadzira chikamu chakachena zvakanyanya uye chinodzivirira mhepo inooxidating.
CVD SiC kana CVI SiC inoiswa paGraphite yezvikamu zviri nyore kana zvakaoma. Kuputira kunogona kuiswa muhukobvu hwakasiyana uye kuzvikamu zvikuru.
Zvigadzirwa zvesimbi zvemhando yepamusoro zvinosarudzwa zvekushandisa semiconductor thermal processing zvinosanganisira RTP (Rapid Thermal Processing), Epi (Epitaxial), diffusion, oxidation, uye annealing. CoorsTek inopa zvinhu zvepamusoro zvakagadzirirwa kutsungirira kupisa nekupisa kwakanyanya, kwakasimba, uye kunogona kudzokorora kushanda kwekupisa kwakanyanya.
Zvimiro:
· Kudzivirira Kupisa Kwakanaka
· Kudzivirira Kuvhunduka Kwemuviri Kwakanaka
· Kurwisa Makemikoro Zvakanaka
· Kuchena Kwakanyanya
· Kuwanikwa muchimiro chakaoma
· Inoshandiswa pasi peOxidizing Atmosphere
chikumbiro：
Wafer inofanira kupfuura nematanho akati wandei isati yagadzirira kushandiswa mumidziyo yemagetsi. Imwe nzira inokosha ndeye silicon epitaxy, umo wafer dzinotakurwa pa graphite susceptors. Hunhu uye mhando ye susceptors zvine chekuita nehunhu hwe epitaxial layer yewafer.
Hunhu Hwakajairika hweBase Graphite Material:
| Kuwanda Kunoonekwa: | 1.85 g/cm3 |
| Kuramba kweMagetsi: | 11 μΩm |
| Simba reFlexural: | 49 MPa (500kgf/cm2) |
| Kuoma kweGungwa: | 58 |
| Dota: | <5ppm |
| Kufambisa kwekupisa: | 116 W/mK (100 kcal/mhr-℃) |
Zvimwe Zvigadzirwa
